RO138575A2 - RESISTIVE FORMALDEHYDE SENSOR - Google Patents
RESISTIVE FORMALDEHYDE SENSOR Download PDFInfo
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Abstract
Invenţia se referă la un senzor rezistiv de monitorizare a concentraţiei de formaldehidă. Senzorul conform invenţiei este alcătuit dintr-un substrat dielectric realizat din Si/SiO2, nişte electrozi (1, 2) metalici şi un strat senzitivconstituit dintr-un film subţire nanohibrid binar de tipul nanohornurilor carbonice dopate cu azot (CNHs-N)/oxid de cupru (CuO), senzorul fiind bazat pe principiul de detecţie conform căruia rezistenţa stratului senzitiv creşte cu nivelul concentraţiei de formaldehidă.The invention relates to a resistive sensor for monitoring formaldehyde concentration. The sensor according to the invention is made up of a dielectric substrate made of Si/SiO2, some metallic electrodes (1, 2) and a sensitive layer made up of a thin binary nanohybrid film of the nitrogen-doped carbon nanohorns (CNHs-N)/copper oxide (CuO) type, the sensor being based on the detection principle according to which the resistance of the sensitive layer increases with the level of formaldehyde concentration.
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OFICIUL bb STAT PENTRU INVENȚÎ Cerere do de lnvej STATE OFFICE FOR INVENTION Application for Invention
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Senzor rezistiv de formaldehidăResistive formaldehyde sensor
Inventatori:Inventors:
Bogdan-Cătălin Șerban, Octavian Buiu, Marius Bumbac, Cristina Mihaela NicolescuBogdan-Cătălin Șerban, Octavian Buiu, Marius Bumbac, Cristina Mihaela Nicolescu
Formaldehida este o substanță volatilă organică (VOC), inflamabilă, incoloră, cu miros puternic, fiind un intermediar valoros în industria chimică, industria ușoară, etc. Formaldehida este utilizată ca materie primă în sinteza unor compuși precum rășinile ureo-formaldehidice, rășinile melaminice, 1,4 butandiolul, polioximetilena, etc. Nu în ultimul rând, este utilizată ca fungicid, germicid, dezinfectant precum și în calitate de conservant al preparatelor anatomice [1,2].Formaldehyde is a volatile organic compound (VOC), flammable, colorless, with a strong odor, being a valuable intermediate in the chemical industry, light industry, etc. Formaldehyde is used as a raw material in the synthesis of compounds such as urea-formaldehyde resins, melamine resins, 1,4 butanediol, polyoxymethylene, etc. Last but not least, it is used as a fungicide, germicide, disinfectant, and as a preservative for anatomical preparations [1,2].
Sursele tradiționale de formaldehidă sunt reprezentate de focurile forestiere, gazele de eșapament și fumul de țigară. Produsele de lemn presat, plăcile aglomerate, materiale utilizate frecvent drept bază în fabricarea mobilei, conțin rășini ureo-formaldehidice care, în timp, emit cantități semnificative de formaldehidă [3,4], Eliberarea acestui compus organic volatil în interiorul clădirilor reprezintă o componentă majoră a fenomenului numit poluare interioară (“indoor pollution”). Formaldehida este asociată cu mulți factori de risc pentru sănătate (lăcrimarea ochilor, senzații de arsură în ochi și gât, stări de greață și dificultăți de respirație) și a fost identificată ca o cauză majoră a sindromului clădirii bolnave (SBS) [5]. Merită menționat faptul că Agenția Internațională pentru Cercetarea Cancerului (IARC) clasifică formaldehida drept cancerigen uman. Astfel, Institutul Național pentru Securitate și Sănătate Ocupațională (NIOSH) din SUA a stabilit o limită maximă de expunere pe termen lung de 0,016 ppm (TWA) [6,7].Traditional sources of formaldehyde include forest fires, exhaust fumes and cigarette smoke. Pressed wood products, particle boards, materials frequently used as a base for furniture, contain urea-formaldehyde resins which, over time, emit significant amounts of formaldehyde [3,4]. The release of this volatile organic compound into buildings is a major component of the phenomenon called “indoor pollution”. Formaldehyde is associated with many health risks (watery eyes, burning sensations in the eyes and throat, nausea and difficulty breathing) and has been identified as a major cause of sick building syndrome (SBS) [5]. It is worth noting that the International Agency for Research on Cancer (IARC) classifies formaldehyde as a human carcinogen. Thus, the National Institute for Occupational Safety and Health (NIOSH) in the USA has established a maximum long-term exposure limit of 0.016 ppm (TWA) [6,7].
Având în vedere multitudinea de surse de formaldehidă, precum și gradul ridicat de toxicitate, interesul pentru fabricarea senzorilor de formaldehidă a cunoscut în ultimele decade o dezvoltare remarcabilă [8].Given the multitude of formaldehyde sources, as well as its high toxicity, interest in the manufacture of formaldehyde sensors has experienced remarkable development in recent decades [8].
Diferite materiale precum oxizii semiconductori de metale [9-18] și materialele nanocarbonice [19-24] au fost utilizate ca straturi senzitive în designul senzorilor rezistivi de formaldehidă datorită sensibilității lor ridicate, selectivității bune, costului redus.Various materials such as semiconducting metal oxides [9-18] and nanocarbon materials [19-24] have been used as sensing layers in the design of resistive formaldehyde sensors due to their high sensitivity, good selectivity, low cost.
Brevetul de invenție _JP6774127B2 cu titlul „Formaldehyde detection and system using it”( 77 77 7 7 , fpjife ΦΜ, ) 43¾) se referă la un senzor pentru detecția și monitorizarea formaldehidei, având la bază modificarea rezistenței electrice a unui material nanocarbonic. Procesul care conduce la schimbarea de conducție constă în reacția sărurilor de hidroxilamină cu formaldehida. Acidul generat în această reacție reprezintă elementul cheie în variația rezistenței electrice. Materialele nanocarbonice selectate pot fi nanotuburile de carbon, nanohomurile carbonice, grafena, fulerenele, etc. Materialul carbonic poate fi amestecat cu un dispersant care poate fi agent tensioactiv, polimer, polimer supramolecular. Filmul sensibil constituit poate detecta 0,05 ppm de formaldehidă în aer, la temperatura camerei. Senzorul din invenția descrisă poate fi utilizat în mod repetat prin simpla înd^pa?tariM(«^ adsorbit pe materialul de carbon prin purigț^^^flux de gaz. // /$The patent _JP6774127B2 entitled "Formaldehyde detection and system using it" (77 77 7 7 , fpjife ΦΜ, ) 4 3 ¾) refers to a sensor for the detection and monitoring of formaldehyde, based on the modification of the electrical resistance of a nanocarbon material. The process leading to the change in conductivity consists of the reaction of hydroxylamine salts with formaldehyde. The acid generated in this reaction represents the key element in the variation of the electrical resistance. The selected nanocarbon materials can be carbon nanotubes, carbon nanohemes, graphene, fullerenes, etc. The carbon material can be mixed with a dispersant which can be a surfactant, polymer, supramolecular polymer. The formed sensitive film can detect 0.05 ppm of formaldehyde in air, at room temperature. The sensor of the described invention can be used repeatedly by simply removing the adsorbed on the carbon material by purging it with a gas flow. // /$
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Brevetul de invenție CN106290488B „Amino-functionalized carbon nanotube resistance type formaldehyde gas sensor and preparation method thereof’ ( se referă la detecția rezistivă a formaldehidei utilizând nanotuburi de carbon funcționalizate cu acid tanic și polietilenimină. Senzorul de formaldehidă cuprinde un substrat flexibil, electrozi interdigitați, precum și filmul sensibil. Substratul flexibil este constituit din polietilentereftalat (PET), în timp ce electrozii interdigitați pot fi constituiti din aur, argint, cupru sau grafenă. Senzorul de gaz poate detecta formaldehidă la temperatură normală, este insensibil la umiditate, are o puternică capacitate anti-interferență, sensibilitate mare și răspuns rapid. Metoda de manufacturare a senzorului de gaz este simplă, ușor de controlat și potrivită pentru producția în serie.The patent CN106290488B “Amino-functionalized carbon nanotube resistance type formaldehyde gas sensor and preparation method thereof” (refers to the resistive detection of formaldehyde using carbon nanotubes functionalized with tannic acid and polyethyleneimine. The formaldehyde sensor comprises a flexible substrate, interdigitated electrodes, and a sensitive film. The flexible substrate is made of polyethylene terephthalate (PET), while the interdigitated electrodes can be made of gold, silver, copper, or graphene. The gas sensor can detect formaldehyde at normal temperature, is insensitive to humidity, has strong anti-interference ability, high sensitivity, and fast response. The manufacturing method of the gas sensor is simple, easy to control, and suitable for mass production.
Brevetul de invenție CN 104 198321B cu titlul “QCM (quartz crystal microbalance) formaldehyde sensor with Chemical and physical adsorption effects and preparation method thereof’ ( ^-¾¾¾^¾) se referă la un senzor gravimetric de formaldehidă. Stratul sensibil este constituit din nanocompozite polimer organic (PVP, PMMA, P3HT) - grafenă sau polimer - nanotuburi de carbon. Senzorul revendicat are avantajele unei manufacturări simple, cost redus, sensibilitate ridicată, capacitatea de a funcționa la temperatura camerei.The patent CN 104 198321B entitled “QCM (quartz crystal microbalance) formaldehyde sensor with Chemical and physical adsorption effects and preparation method thereof’ ( ^-¾¾¾^¾) refers to a gravimetric formaldehyde sensor. The sensitive layer is made of organic polymer nanocomposites (PVP, PMMA, P3HT) - graphene or polymer - carbon nanotubes. The claimed sensor has the advantages of simple manufacturing, low cost, high sensitivity, the ability to operate at room temperature.
Pe de altă parte, nanohomurile carbonice sunt materiale cu o structură tubulară, înrudite cu nanotuburile de carbon [25], Ele se pot sintetiza prin ablația laser a grafitului. Avantajul sintezei nanohomurilor carbonice, în comparație cu obținerea nanotuburilor de carbon, constă în faptul că procesul tehnologic nu necesită prezența unui catalizator metalic. Nanohomurile carbonice oxidate au un caracter hidrofil, sunt ușor dispersabile în apă și solvenți organici (etanol, alcool izopropilic) și prezintă o suprafață specifică mare (1300-1400 m2/g) [26].On the other hand, carbon nanotubes are materials with a tubular structure, related to carbon nanotubes [25]. They can be synthesized by laser ablation of graphite. The advantage of the synthesis of carbon nanotubes, compared to obtaining carbon nanotubes, is that the technological process does not require the presence of a metal catalyst. Oxidized carbon nanotubes have a hydrophilic character, are easily dispersible in water and organic solvents (ethanol, isopropyl alcohol) and have a large specific surface area (1300-1400 m 2 /g) [26].
în pofida paletei largi de aplicații, există un număr relativ mic de studii privind utilizările nanohomurilor carbonice (simple și oxidate) ca straturi senzitive pentru diverse tipuri de gaze [27]. în ultimii ani, s-a realizat detecția chemirezistivă a etanolului utilizând nanohibride ternare și cuatemare de tipul nanohomuri carbonice oxidate / oxid de metal semiconductor / polimer [2829],Despite the wide range of applications, there are relatively few studies on the use of carbon nanotubes (simple and oxidized) as sensing layers for various types of gases [27]. In recent years, chemiresistive detection of ethanol has been achieved using ternary and quaternary nanohybrids of the oxidized carbon nanotubes/semiconductor metal oxide/polymer type [2829],
Cererea de brevet de invenție RO133637A2 cu titlul Senzor de etanol și procedeu de obținere a acestuia (Bogdan Cătălin Șerban, Octavian Buiu, Comei Cobianu, Octavian Narcis lonescu, Dragoș-Alexandru-Cristian Varsescu, Maria Roxana Marinescu, Niculae Dumbrăvescu) se referă la un senzor rezistiv pentru monitorizarea concentrației de etanol utilizând ca straturi senzitive matrice nanocompozite Sm2O3 / nanohomuri carbonice oxidate, InjOa / nanohomuri carbonice oxidate, Gd20a / nanohomuri carbonice oxidate, rezistența senzorului variază proporțional cu concentrația etanolului în gazul analizat.The patent application RO133637A2 entitled Ethanol sensor and method of obtaining it (Bogdan Cătălin Șerban, Octavian Buiu, Comei Cobianu, Octavian Narcis lonescu, Dragoș-Alexandru-Cristian Varsescu, Maria Roxana Marinescu, Niculae Dumbrăvescu) refers to a resistive sensor for monitoring ethanol concentration using as sensitive layers nanocomposite matrices Sm2O3 / oxidized carbon nanocomposites, InjOa / oxidized carbon nanocomposites, Gd20a / oxidized carbon nanocomposites, the sensor resistance varies proportionally to the ethanol concentration in the analyzed gas.
Cererea de brevet de invenție A/00477,31 cu titlul „ Strat senzitiv tem eseu,Patent application A/00477.31 entitled "Essay sensitive layer,
^(%inescu) se referă la un sen: r^i dc brevet de invenție, se ffrșalizat din Si/SiO2, pol^(%inescu) refers to a sen: r^i dc patent, it is derived from Si/SiO2, pol
Marian Av concentrați^] dintr-un sMarian Av concentrate^] from a s
on nzor rezistiv de seu, Viorel itorizarea constituit ftalat sauon resistant nzor of tallow, Viorel itorization constituted phthalate or
Kapton. Electrozii metalici (liniari sau cu configurație interdigitată) sunt realizați din același material (Al, Cr, Cu sau Au), sau din materiale diferite și sunt depuși pe substrat prin printare directă. Stratul senzitiv este constituit dintr-un film subțire de nanocompozit ternar de tipul nanohomuri carbonice oxidate / SnO2 / polivinilpirolidonă, polivinilpirolidona având masa moleculară cuprinsă între 10000 ... 40000 Da.Kapton. The metal electrodes (linear or with interdigitated configuration) are made of the same material (Al, Cr, Cu or Au), or of different materials and are deposited on the substrate by direct printing. The sensitive layer is made of a thin film of ternary nanocomposite of the type oxidized carbon nanotubes / SnO2 / polyvinylpyrrolidone, polyvinylpyrrolidone having a molecular mass between 10000 ... 40000 Da.
Problema tehnică pe care o rezolvă invenția prezentă constă în obținerea de noi straturi senzitive la variația concentrației de formaldehidă, utilizate în designul unor senzori de tip rezistiv. Filmul sensibil descris în această invenție, care este utilizat pentru obținerea unor senzori reziști vi de formaldehidă, este un nanohibrid binar de tipul nanohomuri carbonice dopate cu azot (NCNHs) - oxid de cupru (CuO). Procentul masic al materialului nanocarbonic în stratul sensibil variază între 70 și 90%. Din punct de vedere al principiului de detecție, rezistența stratului senzitiv crește cu nivelul concentrației de formaldehidă. Scăderea de conducție se explică prin faptul că formaldehidă donează electroni în stratul senzitiv, micșorând concentrația de goluri.The technical problem solved by the present invention consists in obtaining new layers sensitive to the variation of formaldehyde concentration, used in the design of resistive sensors. The sensitive film described in this invention, which is used to obtain resistive formaldehyde sensors, is a binary nanohybrid of the nitrogen-doped carbon nanohomes (NCNHs) - copper oxide (CuO) type. The mass percentage of the nanocarbon material in the sensitive layer varies between 70 and 90%. From the point of view of the detection principle, the resistance of the sensitive layer increases with the level of formaldehyde concentration. The decrease in conductivity is explained by the fact that formaldehyde donates electrons to the sensitive layer, decreasing the concentration of holes.
Utilizarea ca strat sensibil a nanohibridului binar nanohomuri carbonice dopate cu azot - oxid de cupru prezintă câteva avantaje incontestabile:The use of the binary nanohybrid nitrogen-doped carbon nanotubes - copper oxide as a sensitive layer presents several undeniable advantages:
nanohomurile carbonice dopate cu azot conferă im raport mare suprafață specifică / volum, afinitate pentru moleculele de formaldehidă precum și o variație a rezistenței stratului senzitiv la contactul cu acestea;nitrogen-doped carbon nanotubes provide a high specific surface area/volume ratio, affinity for formaldehyde molecules, as well as a variation in the resistance of the sensitive layer upon contact with them;
oxidul de cupru este un semiconductor de tip p și prezintă efect sinergie cu nanohomurile carbonice dopate cu azot, de asemenea semiconductori de tip p, la contactul cu moleculele de formaldehidă;copper oxide is a p-type semiconductor and exhibits a synergistic effect with nitrogen-doped carbon nanotubes, also p-type semiconductors, upon contact with formaldehyde molecules;
CuO schimbă distribuția porilor la interfața cu nanohomurile carbonice dopate cu azot, crescând suprafața specifică a acestora;CuO changes the pore distribution at the interface with nitrogen-doped carbon nanotubes, increasing their specific surface area;
detecție la temperatura camerei;room temperature detection;
stabilitate chimică și termică;chemical and thermal stability;
proprietăți mecanice superioare.superior mechanical properties.
Nanohomurile carbonice dopate cu azot se sintetizează prin fhiorurare inițială în plasmă de tip F2Ar și apoi defluorurare în atmosferă de NH3 la 500 °C (Fig.l)Nitrogen-doped carbon nanotubes are synthesized by initial fluorination in F2Ar plasma and then defluorination in NH3 atmosphere at 500 °C (Fig.l)
Substratul senzorului este realizat din Si/SiO2 și are o dimensiune de 5 mm, electrozii fiind constituiți din aur. Lățimea electrozilor este de aproximativ 200 microni, cu o separare de 6 mm între ei. Electrozii pot fi liniari (Fig.2) sau pot avea o configurație interdigitată (Fig.3). Capacitatea de monitorizare a formaldehidei este investigată prin aplicarea unui curent constant între cei doi electrozi și măsurarea tensiunii la diferite valori ale concentrației de formaldehidă la care este expus stratul senzitiv de tipul nanohibrid binar nanohomuri carbonice dopate cu azot - oxid de cupru.The sensor substrate is made of Si/SiO2 and has a size of 5 mm, the electrodes being made of gold. The width of the electrodes is approximately 200 microns, with a separation of 6 mm between them. The electrodes can be linear (Fig.2) or can have an interdigitated configuration (Fig.3). The formaldehyde monitoring capacity is investigated by applying a constant current between the two electrodes and measuring the voltage at different values of the formaldehyde concentration to which the sensitive layer of the binary nanohybrid type carbon nanohombres doped with nitrogen - copper oxide is exposed.
Etapele necesare obținerii N-CNHs sunt următoarele:The steps required to obtain N-CNHs are as follows:
1) Sinteza nanohomurilor c<Kh^nÎfciUflî^^ se realizează pri și Ar (amestec vo^micȚ^Tă^ 0,4 bari, în re camerei. Timpul deljîft^ timpul de exp1) The synthesis of nanohoms of <Kh^nÎfciUflî^^ is carried out in and Ar (mixture volume^Tă^ 0.4 bar, in the chamber. The time of deljîft^ the time of exp
1.1 mă de F2 peratura pire 2^i ^minute.1.1 m of F2 temperature for 2^i ^minutes.
2) încălzirea la 500 °C în atmosferă de NH3 a nanohomurilor carbonice fluorurate conduce la defluorurarea acestora cu formarea unor vacanțe în structura materialului nanocarbonic. Atomii de azot ocupă aceste vacanțe cu formarea N-CNHs.2) Heating the fluorinated carbon nanohomes to 500 °C in an NH3 atmosphere leads to their defluorination with the formation of vacancies in the structure of the nanocarbon material. Nitrogen atoms occupy these vacancies with the formation of N-CNHs.
Procentul masic de azot din compoziția nanohomurilor carbonice dopate cu azot variază între 5 și 10%.The mass percentage of nitrogen in the composition of nitrogen-doped carbon nanotubes varies between 5 and 10%.
Materiile prime necesare sintezei filmului sensibil CuO / N-CNHs sunt: Cu (CH3COO)2 · 2H2O, amestec de izopropanol (solvent) și dietanolamina (stabilizator), și nanohomurile carbonice dopate cu azot N-CNHs. Raportul molar Cu (CH3COO)2 2H2O - izopropanol este 1: 3, în timp ce raportul masic acetat/ stabilizator este de 1/1.The raw materials required for the synthesis of the CuO/N-CNHs sensitive film are: Cu(CH3COO)2 2H2O, mixture of isopropanol (solvent) and diethanolamine (stabilizer), and nitrogen-doped carbon nanotubes N-CNHs. The molar ratio of Cu(CH3COO)2 2H2O - isopropanol is 1:3, while the mass ratio of acetate/stabilizer is 1/1.
Materiile prime se amestecă prin agitare magnetică ce se realizează secvențial, în două etape:The raw materials are mixed by magnetic stirring, which is carried out sequentially, in two stages:
- prima etapă - la temperatura de 60 °C, timp de lh;- first stage - at a temperature of 60 °C, for 1h;
- a doua etapă - la temperatura de 70 °C, timp de 2h.- second stage - at a temperature of 70 °C, for 2 hours.
Nanohomurile carbonice dopate cu azot N-CNHs se adaugă în a doua etapă a agitării magnetice.Nitrogen-doped carbon nanotubes N-CNHs are added in the second stage of magnetic stirring.
Dispersia obținută se supune agitării magnetice timp de trei ore, la temperatura camerei.The obtained dispersion is subjected to magnetic stirring for three hours at room temperature.
Dispersia obținută se depune prin metoda picurării (drop casting) utilizând un substrat de Si/SiO2 cu electrozi liniari sau cu electrozi interdigitați (după ce în prealabil s-a realizat mascarea zonei de contacte).The obtained dispersion is deposited by drop casting using a Si/SiO2 substrate with linear electrodes or interdigitated electrodes (after previously masking the contact area).
Densificarea stratului senzitiv se realizează secvențial, în două etape, prin tratament termic, după cum urmează:Densification of the sensitive layer is achieved sequentially, in two stages, by thermal treatment, as follows:
1) în atmosfera de azot, timp de 10 de minute, la temperatura de 300 °C;1) in a nitrogen atmosphere, for 10 minutes, at a temperature of 300 °C;
2) în atmosfera de azot, timp de 1 h, la temperatura de 400 °C.2) in a nitrogen atmosphere, for 1 h, at a temperature of 400 °C.
Referințereference
Titlu:Title:
Senzor rezistiv de formaldehidăResistive formaldehyde sensor
Inventatori:Inventors:
Bogdan-Cătălin Șerban, Octavian Buiu, Marius Bumbac, Cristina Mihaela NicolescuBogdan-Cătălin Șerban, Octavian Buiu, Marius Bumbac, Cristina Mihaela Nicolescu
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