RO134261A2

RO134261A2 - Chemiresistive humidity sensor based on composite matrices containing hydrophilic carbon nanohorns

Info

Publication number: RO134261A2
Application number: ROA201801006A
Authority: RO
Inventors: Bogdan Cătălin Şerban; Octavian Buiu; Cornel Cobianu; Viorel Marian Avramescu; Ionela Cristina Pachiu; Octavian Narcis Ionescu; Maria Roxana Marinescu
Original assignee: Institutul Naţional De Cercetare-Dezvoltare Pentru Microtehnologie-Imt Bucureşti
Priority date: 2018-11-29
Filing date: 2018-11-29
Publication date: 2020-06-30

Abstract

The invention relates to a humidity sensor based on hydrophilic carbonic nanohorns meant to be used for air humidity control in closed spaces, in paper and textile industry, in medical or pharmaceutical field, in wood processing industry, as well as in agriculture, meteorology and the like. According to the invention, the sensor consists of a dielectric substrate made of Lexan, having a thickness in the range of 40 μm...4 mm, on which electrodes are made by direct printing, cathode sputtering or evaporation, where the electrodes may be made of the same material, such as aluminium, chrome, copper or gold or of different materials, and they may have a linear shape or interdigitated configuration, after which, over the Lexan substrate with the electrodes, a binary composition consisting of agarose and hydrophilic carbon nanohorns is deposited from aqueous solution, using spin coating or drop casting methods, the mass percentage thereof in the sensitive layer varying between 0.1...1%

Description

Senzor de umiditate pe baza de nanohornuri carbonice hidrofileHumidity sensor based on hydrophilic carbon nanowires

DescriereDescription

Monitorizarea umidității relative reprezintă un proces important, adesea critic. în diverse domenii de activitate casnică și industrială, precum controlul calității aerului în spatii închise, industria textilă și a hârtiei, domeniul medical (aparate de respirat, incubatoare, incinte de sterilizare), industria farmaceutică (controlul calității si depozitarea medicamentelor), industria prelucrării lemnului, transport (alimente, medicamente), agricultură (silozuri, controlul umidității solului), meteorologie, etc. [1-3]. Astfel, piața senzorilor de umiditate este in expansiune, fabricarea și comercializarea senzorilor de umiditate devenind o prioritate în ultimele decade.Relative humidity monitoring is an important, often critical, process. in various fields of domestic and industrial activity, such as indoor air quality control, textile and paper industry, medical field (respirators, incubators, sterilization premises), pharmaceutical industry (quality control and drug storage), wood processing industry , transport (food, medicine), agriculture (silos, soil moisture control), meteorology, etc. [1-3]. Thus, the market of humidity sensors is expanding, the manufacture and sale of humidity sensors becoming a priority in recent decades.

Alături de oxizi metalici semiconductori (SnCȚ, ZnO, etc.) materiale ceramice (AI2O3), polimeri, (poli(3,4-etilendioxitiofen, poli(3,4- etilendioxitiofen -polistiren sulfonat), perovskiti (BaTiOa) electroliti (LiCl), materialele nanocarbonice sunt utilizate în mod intensiv ca elemente de sensing în designul senzorilor de umiditate [4],Along with semiconductor metal oxides (SnCȚ, ZnO, etc.) ceramic materials (AI2O3), polymers, poly (3,4-ethylenedioxythiophene, poly (3,4-ethylenedioxythiophene-polystyrene sulfonate), perovskite (BaTiOa) electrolytes (LiCl) , nanocarbon materials are used extensively as sensing elements in the design of humidity sensors [4],

Brevetul de invenție US9976975B2 cu titlul “Method of making thin film humidity sensors” (Abdullah Mohamed Asiri, Muhammad Tariq Saeed Chani, Sher Bahadar Khan) se referă la un senzor chemirezistiv de umiditate utilizând ca strat senzitiv un compus de tipul ftalocianină, de nichel- fulerena (NiPc-C60). Substratul folosit este constituit din sticlă, electrozii fiind din aluminiu.U.S. Pat. No. 7,997,675B2 to the title "Method of making thin film humidity sensors" (Abdullah Mohamed Asiri, Muhammad Tariq Saeed Chani, Sher Bahadar Khan) relates to a chemoresistive humidity sensor using a phthalocyanine-type compound as a sensitive layer. fullerene (NiPc-C60). The substrate used is made of glass, the electrodes being made of aluminum.

Stratul senzitiv (obținut din amestecarea în cantități echimasice a NiPc Și fiilerenă) se amestecă folosind mortar Și pistil, iar amestecul este presat sub formă de peletă utilizând o presă hidraulică.The sensitive layer (obtained by mixing in equimantic amounts of NiPc and filament) is mixed using mortar and pestle, and the mixture is pressed into a pellet using a hydraulic press.

Peleta obținută se plasează într-o nacelă de molibden a evaporatorului termic de vid, realizându-se filme cu grosimi care variază între 50 Și 200 nm. în timpul depunerii, vidul este menținut la l,6xl0'⁵ mbar și viteza de depunere este 0,1-0,2 nm / sec, în timp ce substraturile sunt menținute la temperatura camerei. Rezistența senzorului descrește considerabil și este proporțională cu creșterea valorii umidității. Senzorul prezintă un histerezis neglijabil.The obtained pellet is placed in a molybdenum platform of the vacuum thermal evaporator, making films with thicknesses varying between 50 and 200 nm. during the deposition, the vacuum is maintained at l, 6xl0 ^'5 mbar and the deposition rate is 0.1-0.2 nm / sec, while the substrates are maintained at room temperature. The resistance of the sensor decreases considerably and is proportional to the increase in humidity. The sensor has negligible hysteresis.

Cererea de brevet de invenție CN102253091A cu titlul “Capacitive relative humidity sensor based on graphene oxide” (F'^îS MlX^) se referă la un senzor capacitiv de umiditate utilizând ca strat senzitiv oxidul de grafenă. Senzorul brevetat prezintă sensibilitate ridicată, viteză de răspuns rapid Și histerezis scăzut.Patent application CN102253091A entitled "Capacitive relative humidity sensor based on graphene oxide" (F '^ îS MlX ^) relates to a capacitive humidity sensor using graphene oxide as a sensitive layer. The patented sensor has high sensitivity, fast response speed and low hysteresis.

Brevetul de invenție US8479560B2 cu titlul ”Differential resonant sensor apparatus and method for detecting relative humidity” (Cornel Cobianu, Bogdan Serban, Mihai N. Mihailă) se referă la un senzor rezonant diferențial pentru măsurarea umidității relative. Senzorul brevetat include un strat sensibil hidrofil constituit din nanotuburi de carbon sulfonate precum și un strat de referință, hidrofob (nanotuburi de carbon) ce posedă proprietăți vâsco-elașțfc|xSÎ®^^ cu a 2018 01006The patent US8479560B2 entitled “Differential resonant sensor apparatus and method for detecting relative humidity” (Cornel Cobianu, Bogdan Serban, Mihai N. Mihailă) refers to a differential resonant sensor for measuring relative humidity. The patented sensor includes a hydrophilic sensitive layer consisting of sulfonated carbon nanotubes as well as a reference layer, hydrophobic (carbon nanotubes) which possesses viscoelastic properties | xSÎ® ^^ with a 2018 01006

29/11/2018 stratul senzitiv hidrofil, fără a manifesta, însă, proprietăți de absorbție a apei. Un circuit electronic de citire diferențială este interconectat cu fiecare fascicul rezonant pentru prelucrarea semnalului. Umiditatea absorbită în raport cu fasciculul rezonant de detectare modifică frecvența de rezonanță mecanică, care poate fi identificata si corelata cu o modificare a frecvenței de rezonanță electrică a circuitului electronic asociat.29/11/2018 the hydrophilic sensitive layer, without showing, however, water absorption properties. An electronic differential reading circuit is interconnected with each resonant beam for signal processing. The moisture absorbed relative to the sensing resonant beam changes the mechanical resonant frequency, which can be identified and correlated with a change in the electrical resonant frequency of the associated electronic circuit.

Nanohornurile carbonice (Fig. 1) sunt materiale cu o structură tubulară, înrudite cu nanotuburile de carbon [5], Ele se pot sintetiza prin ablația laser a grafitului. Merita menționat faptul ca. in comparație cu obținerea nanotuburilor de carbon, această sinteză nu necesită un catalizator metalic. Nanohornurile carbonice oxidate au un caracter hidrofil, sunt ușor dispersabile în apă și solvenți organici precum etanol, alcool izopropilic, au o suprafață specifică mare (1300-1400 m²/g) [6],Carbon nanohorns (Fig. 1) are materials with a tubular structure, related to carbon nanotubes [5]. They can be synthesized by laser ablation of graphite. It is worth mentioning that. Compared to obtaining carbon nanotubes, this synthesis does not require a metal catalyst. Oxidized carbon nanohorns have a hydrophilic character, are easily dispersible in water and organic solvents such as ethanol, isopropyl alcohol, have a large specific surface area (1300-1400 m ² / g) [6],

Agaroza (Fig. 2) polizaharidă extrasă din anumite alge roșii, este constituită din unități alternante de D-galactoză și 3,6-anhidro-L-galactoză alternante [7],Agarose (Fig. 2) polysaccharide extracted from certain red algae, consists of alternating units of alternating D-galactose and 3,6-anhydro-L-galactose [7],

Mathew et al au realizat un senzor miniaturizat de umiditate relativă (RH), bazat pe un interferometru cu fibră de cristal fotonic, utilizând agaroza drept strat senzitiv. Senzorul prezintă o sensibilitate ridicată la variațiile RH, cu o schimbare a puterii reflectate de aproximativ 12 dB pentru o schimbare de umiditate de 84% RH [8].Mathew et al developed a miniaturized relative humidity (RH) sensor, based on a photonic crystal fiber interferometer, using agarose as a sensitive layer. The sensor has a high sensitivity to RH variations, with a change in reflected power of about 12 dB for a change in humidity of 84% RH [8].

Carboximetilceluloză (de obicei utilizată sub formă de sare de sodiu) ( Fig. 3) este un biopolimer care se sintetizează din celuloză alcalină Și acid monocloracetic. Datorită proprietăților sale atractive (biodegradabilitatea, biocompatibilitatea, proprietatea de a forma filme, etc.) carboximetilceluloză are multiple utilizări in industria alimentară (aditiv alimentar codificat ca E 466), medicină, industria farmaceutică, etc. [9].Carboxymethylcellulose (usually used as a sodium salt) (Fig. 3) is a biopolymer that is synthesized from alkaline cellulose and monochloroacetic acid. Due to its attractive properties (biodegradability, biocompatibility, property to form films, etc.) carboxymethylcellulose has multiple uses in the food industry (food additive coded as E 466), medicine, pharmaceutical industry, etc. [9].

Recent, Kotresh et al au utilizat o matrice nanocompozită polianilină - carboximetilceluloză pentru proiectarea unui senzor de umiditate relativă. Răspunsul compozitului la umiditate a fost testat la o frecvență selectată de 100 Hz, utilizând filme din materialele respective depuse pe un substrat de sticlă. Schimbarea umidității relative (RH) de la 25 la 75% a condus la schimbarea impedanței sale cu aproximativ trei ordine de mărime. Histerezisul maxim de umiditate al compozitului a fost de aproximativ 5% la 65% RH [10],Recently, Kotresh et al used a polyaniline-carboxymethylcellulose nanocomposite matrix to design a relative humidity sensor. The composite's response to humidity was tested at a selected frequency of 100 Hz, using films of the respective materials deposited on a glass substrate. The change in relative humidity (RH) from 25 to 75% led to a change in its impedance by about three orders of magnitude. The maximum moisture hysteresis of the composite was about 5% to 65% RH [10],

Problema tehnică pe care o rezolvă invenția prezentă constă în obținerea de noi straturi sensibile la variația valorii umidității relative. Straturile senzitive descrise în această invenție, utilizate pentru obținerea unor senzori chemorezistivi de umiditate relativă, sunt nanocompozite constituite din nanohornuri carbonice hidrofile /polimer hidrofil.The technical problem solved by the present invention consists in obtaining new layers sensitive to the variation of the relative humidity value. The sensitive layers described in this invention, used to obtain chemoresistive sensors of relative humidity, are nanocomposites consisting of hydrophilic carbon nanowires / hydrophilic polymer.

Polimerii hidrofili selectati sunt agaroza (Fig. 2) și carboximetilceluloză sodică (Fig. 3).The hydrophilic polymers selected are agarose (Fig. 2) and sodium carboxymethylcellulose (Fig. 3).

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Sinteza nanohornurilor carbonice hidrofile se realizează prin două metode diferite, utilizând tratamentul în plasma de apă, respectiv tratamentul în plasmă de oxigen. Ambele tratamente în plasmă asigură hidrofilizarea nanohornurilor carbonice prin grefarea de grupări de tip carboxil, carbonil, hidroxil și epoxi. In plus, gradul optim de hidrofilizare al nanohornurilor carbonice, în vederea minimizării histerezisului și a obținerii unei sensibilități adecvate poate fi controlat prin schimbarea puterii plasmei precum și a timpului de expunere.The synthesis of hydrophilic carbon nanohorns is performed by two different methods, using water plasma treatment, respectively oxygen plasma treatment. Both plasma treatments ensure the hydrophilization of carbon nanowires by grafting carboxyl, carbonyl, hydroxyl and epoxy groups. In addition, the optimal degree of hydrophilization of carbon nanowires, in order to minimize hysteresis and obtain adequate sensitivity can be controlled by changing the plasma power as well as the exposure time.

Utilizarea sincronă a nanohornurilor carbonice oxidate alături de polimeri hidrofili de tip agaroză sau carboximetilceluloză, depuse prin metodele ‘’spin coating” sau ‘’drop casting” pe un substrat dielectric, conferă senzorului câteva avantaje semnificative:The synchronous use of oxidized carbon nanowires together with hydrophilic polymers such as agarose or carboxymethylcellulose, deposited by spin spin or drop casting methods on a dielectric substrate, gives the sensor several significant advantages:

• îmbunătățirea proprietăților mecanice și procesabilitatea stratului senzitiv;• improving the mechanical properties and processability of the sensitive layer;

• prezența nanohornurilor carbonice hidrofile conferă un raport mare suprafață specifică / volum precum și o afinitate considerabilă pentru moleculele de apă ;• the presence of hydrophilic carbon nanohorns gives a high specific area / volume ratio as well as a considerable affinity for water molecules;

• răspunsul rapid al senzorului ca urmare a modificării rezistentei filmului compozit odată cu modificarea valorii umidității relative;• the rapid response of the sensor due to the change of the resistance of the composite film with the change of the relative humidity value;

• răspunsul senzorului chemirezistiv de umiditate la temperatura camerei.• the response of the humidity sensor to room temperature.

Substratul dielectric este din Lexan și poate avea o grosime între 40 microni și 4 milimetri. Electrozii se pot depune pe suprafața substratului dielectric prin printare directă, pulverizare catodică sau evaporare. Electrozii pot fi constituiți din același material (aluminiu, crom, cupru, aur) sau din materiale diferite. Ei pot fi liniari (Fig. 4) sau pot avea o configurație interdigitată (Fig. 5).The dielectric substrate is made of Lexan and can be between 40 microns and 4 millimeters thick. Electrodes can be deposited on the surface of the dielectric substrate by direct printing, sputtering or evaporation. Electrodes can be made of the same material (aluminum, chrome, copper, gold) or different materials. They can be linear (Fig. 4) or have an interdigitated configuration (Fig. 5).

în cele ce urmează se prezintă etapele necesare pentru obținerea straturilor senzitive la umiditate relativă precum Și pentru obținerea senzorilor chemirezistivi de umiditate relativă.The following are the steps required to obtain the layers sensitive to relative humidity as well as to obtain the chemirresistive sensors of relative humidity.

Exemplul 1Example 1

A. Materiile prime necesare sintezei stratului senzitiv sunt, în primul caz, agaroza și nanohomurile carbonice hidrofîlizate în plasmă de apă.A. The raw materials required for the synthesis of the sensitive layer are, in the first case, agarose and hydrophilicized carbon nanohumans in water plasma.

Soluția de agaroza în apă se prepară prin dizolvarea a 0,5 g polimer în 100 ml apă deionizată, sub agitare magnetică (2 h, la temperatura de 95°C). Ulterior se adaugă soluției preparate anterior 0,01 g nanohornuri carbonice oxidate și se continuă agitarea magnetică timp de 2 ore, la temperatura de 95°C.The solution of agarose in water is prepared by dissolving 0.5 g of polymer in 100 ml of deionized water, under magnetic stirring (2 h, at a temperature of 95 ° C). Subsequently, 0.01 g of oxidized carbon nanohorns are added to the previously prepared solution and the magnetic stirring is continued for 2 hours at 95 ° C.

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B. Soluția obținută se depune prin metoda picăturii (drop casting) utilizând un substrat de Lexan cu electrozi liniari sau cu electrozi interdigitați (după ce în prealabil s-a realizat mascarea zonei de contacte).B. The solution obtained is deposited by the drop casting method using a Lexan substrate with linear electrodes or interdigitated electrodes (after previously masking the contact area).

C. Stratul senzitiv obținut din agaroza si nanohornuri carbonice hidrofilizate în plasmă de apă, depus pe substrat, se usucă în etuvă, la 80°C, timp de 60 minute.C. The sensitive layer obtained from agarose and hydrophilized carbon nanohorns in water plasma, deposited on the substrate, is dried in an oven at 80 ° C for 60 minutes.

Exemplul 2Example 2

A. Materiile prime necesare sintezei stratului senzitiv sunt carboximetilceluloza sodică și nanohomurile carbonice hidrofilizate în plasmă de oxigen.A. The raw materials required for the synthesis of the sensitive layer are sodium carboxymethylcellulose and hydrophilicized carbon nanotubes in oxygen plasma.

Soluția de carboximetilceluloza sodică în apă se prepară prin dizolvarea a 1 g polimer în 100 ml apă deionizată, sub agitare magnetică (1 h, la temperatura de 90°C). Ulterior se adaugă soluției preparate anterior 0,01 g nanohornuri carbonice hidrofilizate în plasmă de oxigen și se continuă agitarea magnetică timp de 3 ore, la temperatura de 90°C.The solution of sodium carboxymethylcellulose in water is prepared by dissolving 1 g of polymer in 100 ml of deionized water, under magnetic stirring (1 h, at 90 ° C). Subsequently, 0.01 g of hydrophilized carbon nanowires in oxygen plasma are added to the previously prepared solution and the magnetic stirring is continued for 3 hours at 90 ° C.

B. Soluția obținută se depune, utilizând metoda picăturii (drop casting), pe un substrat de Lexan cu electrozi liniari sau cu electrozi interdigitați (după ce în prealabil s-a realizat mascarea zonei de contacte).B. The solution obtained is deposited, using the drop casting method, on a Lexan substrate with linear electrodes or interdigitated electrodes (after previously masking the contact area).

C. Stratul senzitiv obținut din alcool polivinilic și nanohornuri carbonice oxidate, depus pe substrat, se usucă în etuvă, la 80°C, timp de 60 minute.C. The sensitive layer obtained from polyvinyl alcohol and oxidized carbon nanowires, deposited on the substrate, is dried in an oven at 80 ° C for 60 minutes.

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Referințe bibliograficeBibliographical references

1. Rittersina, Z. M. (2002). Recent achievements in 1 iniaturized humidity sensors............a review of transduction techniques. Sensors and Actuators A: Physical. 96(2-3), 196-210.1. Rittersina, Z. M. (2002). Recent achievements in 1 iniaturized humidity sensors ............ a review of transduction techniques. Sensors and Actuators A: Physical. 96 (2-3), 196-210.

2. Chen. Z.,Lu, C. (2005). Humidity sensors: a review of materials and mechanisms. Sensor letters. 3(4), 274-295.2. Dogs. Z., Lu, C. (2005). Humidity sensors: a review of materials and mechanisms. Sensor letters. 3 (4), 274-295.

3. Lee. C. Y., Lee, G. B. Humidity sensors: a review. Sensor Letters, 2005. 3(1-1). 1 - 15.3. Lee. C. Y., Lee, G. B. Humidity sensors: a review. Sensor Letters, 2005. 3 (1-1). 1 - 15.

4. Farahani. H., Wagiran, R., & Hamidon, M. (2014). Humidity sensors principie, mechanism, and fabrication technologies: a comprehensive review. Sensors. 14(5). 7881-7939.4. Farahani. H., Wagiran, R., & Hamidon, M. (2014). Humidity sensors principie, mechanism, and fabrication technologies: a comprehensive review. Sensors. 14 (5). 7881-7939.

5. S. lijima et al. Nano-aggregates of single-walled graphitic carbon nano-horns, Chemical Physics Letters. 309 3-4. 165-170, (1999).5. S. lijima et al. Nano-aggregates of single-walled graphitic carbon nano-horns, Chemical Physics Letters. 309 3-4. 165-170, (1999).

6. S.Zhu and G. Xu. Single-walled carbon nanohorns and their applications. Nanoscale, 2 (12),2538-2549. (2010).6. S.Zhu and G. Xu. Single-walled carbon nanohorns and their applications. Nanoscale, 2 (12), 2538-2549. (2010).

7. Porath. L, Axen. R., & Ernback, S. (1967). Chemical coupling of proteins to agarose. Nalure, 2/5(5109), 1491.7. Porath. L, Axen. R., & Ernback, S. (1967). Chemical coupling of proteins to agarose. Nalure, 2/5 (5109), 1491.

8. Mathew, L. Semenova, Y., & Farrell, G. (2012). Relative humidity sensor based on an agarose-infiltrated photonic crystal fiber interferometer. IEEE Journal of Selected Topics in Quantum Electronics, 18(5), 1553-1559.8. Mathew, L. Semenova, Y., & Farrell, G. (2012). Relative humidity sensor based on an agarose-infiltrated photonic crystal fiber interferometer. IEEE Journal of Selected Topics in Quantum Electronics, 18 (5), 1553-1559.

9. Dumond, P.. Franck, P., Morisset, M., Sainte Laudy, J., Kanny. G., & Monerei-Vautrin. D. A. (2009). Pre-lethal anaphylaxis to carboxymethylcellulose confirmed by Identification of specific IgE—review of the literature. European annals of allergy and clinica! immunology. 41(6), 171.9. Dumond, P .. Franck, P., Morisset, M., Sainte Laudy, J., Kanny. G., & Monerei-Vautrin. D. A. (2009). Pre-lethal anaphylaxis to carboxymethylcellulose confirmed by Identification of specific IgE — review of the literature. European annals of allergy and clinic! immunology. 41 (6), 171.

10. Kotresh, S., Ravikiran, Y. T., Prakash, H. R., Ramana. C. V., Vijayakumari. S. C., & Thomas, S. (2016). Humidity sensing performance of spin coated polyanilinecarboxymethyl cellulose composite at room temperature. Celhilose, 23(5), 3177-318610. Kotresh, S., Ravikiran, Y. T., Prakash, H. R., Ramana. C. V., Vijayakumari. S. C., & Thomas, S. (2016). Humidity sensing performance of spin coated polyanilinecarboxymethyl cellulose composite at room temperature. Celhilose, 23 (5), 3177-3186

Claims

claims

1. Process for the preparation of a new binary composition agarose / hydrophilic carbon nanocorns characterized in that the hydrophilic carbon nanocorns are synthesized by treating simple carbon nanoparticles in water plasma and that their mass percentage in the sensitive layer varies between 0, 1 and 1% .

2. Process for the preparation of a new binary composition agarose / hydrophilic carbon nanocorns characterized in that the hydrophilic carbon nanocorns are synthesized by treating simple carbon nanoparticles in oxygen plasma and that their mass percentage in the sensitive layer varies between 0, 1 and 1% .

3. Process for the preparation of a new binary composition sodium carboxymethylcellulose / hydrophilic carbon nanocorns characterized in that the hydrophilic carbon nanocorns are synthesized by treating simple carbon nanoparticles in water plasma and that their mass percentage in the sensitive layer varies between 0, 1 and 1 %.

4. Process for the preparation of a new binary composition sodium carboxymethylcellulose / hydrophilic carbon nanowires characterized in that the hydrophilic carbon nanowires are synthesized by treating simple carbon nanowires in oxygen plasma and that their mass percentage in the sensitive layer varies between 0, 1 and 1 %.

5. The dielectric substrate is characterized in that it can be constructed of Lexan and can have a thickness between 40 microns and 4 millimeters.

6. Electrodes are characterized in that they are deposited on the surface of the dielectric substrate by direct printing, cathodic spraying, or evaporation.

7. Electrodes are characterized in that they can be made of the same material (aluminum, chromium, copper, gold) or of different materials.

8. The electrodes used are characterized in that they can be linear or have an interdigitated configuration.

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The composition of the composition obtained under the conditions of claim 1 is made of aqueous solution and is characterized in that it is made by the “spin coating” method on the Lexan substrate with linear electrodes.

The composition of the composition obtained under the conditions of claim 1 is made of aqueous solution and is characterized in that it is made by the “spin coating” method on the Lexan substrate with interdigitated electrodes.

11. The deposition of the composition obtained under the conditions of claim 1 is made of aqueous solution and is characterized in that it is made by the "drop casting" method on the Lexan substrate with linear electrodes.

The deposition of the composition obtained under the conditions of claim 1 is carried out from aqueous solution and is characterized in that it is carried out by the “drop casting” method on the Lexan substrate with interdigitated electrodes.

The composition of the composition obtained under the conditions of claim 2 is made of aqueous solution and is characterized in that it is made by the “spin coating” method on the Lexan substrate with linear electrodes.

The composition of the composition obtained under the conditions of claim 2 is made of aqueous solution and is characterized in that it is made by the “spin coating” method on the Lexan substrate with interdigitated electrodes.

The composition of the composition obtained under the conditions of claim 2 is made of aqueous solution and is characterized in that it is made by the "drop casting" method on the Lexan substrate with linear electrodes.

The composition of the composition obtained under the conditions of claim 2 is made of aqueous solution and is characterized in that it is made by the “drop casting” method on the Lexan substrate with interdigitated electrodes.

The composition of the composition obtained under the conditions of claim 3 is made of aqueous solution and is characterized in that it is made by the “spin coating” method on the Lexan substrate with linear electrodes.

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The deposition of the composition obtained under the conditions of claim 3 is made of aqueous solution and is characterized in that it is made by the “spin coating” method on the Lexan substrate with interdigitated electrodes.

The deposition of the composition obtained under the conditions of claim 3 is made of aqueous solution and is characterized in that it is performed by the “drop casting” method on the Lexan substrate with linear electrodes.

The deposition of the composition obtained under the conditions of claim 3 is performed from aqueous solution and is characterized in that it is performed by the “drop casting” method on the Lexan substrate with interdigitated electrodes.

The composition of the composition obtained under the conditions of claim 4 is made of aqueous solution and is characterized in that it is made by the “spin coating” method on the Lexan substrate with linear electrodes.

The composition of the composition obtained under the conditions of claim 4 is made of aqueous solution and is characterized in that it is made by the “spin coating” method on the Lexan substrate with interdigitated electrodes.

The composition of the composition obtained under the conditions of claim 4 is made of aqueous solution and is characterized in that it is made by the “drop casting” method on the Lexan substrate with linear electrodes.

The composition of the composition obtained under the conditions of claim 4 is made of aqueous solution and is characterized in that it is made by the “drop casting” method on the Lexan substrate with interdigitated electrodes.

The use of chemoresistive sensors obtained under the conditions of claims 9 - 24 in monitoring humidity is characterized in that a voltage is applied between two electrodes and the electric current passing through the sensitive layer at various humidity values is measured.