RO101057B1 - Amorphous silicon and polysilicon thin layers coating method for electronic device production - Google Patents

Amorphous silicon and polysilicon thin layers coating method for electronic device production

Info

Publication number
RO101057B1
RO101057B1 RO13324688A RO13324688A RO101057B1 RO 101057 B1 RO101057 B1 RO 101057B1 RO 13324688 A RO13324688 A RO 13324688A RO 13324688 A RO13324688 A RO 13324688A RO 101057 B1 RO101057 B1 RO 101057B1
Authority
RO
Romania
Prior art keywords
electronic device
coating method
amorphous silicon
thin layers
polysilicon thin
Prior art date
Application number
RO13324688A
Other languages
Romanian (ro)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to RO13324688A priority Critical patent/RO101057B1/en
Publication of RO101057B1 publication Critical patent/RO101057B1/en

Links

RO13324688A 1988-04-27 1988-04-27 Amorphous silicon and polysilicon thin layers coating method for electronic device production RO101057B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RO13324688A RO101057B1 (en) 1988-04-27 1988-04-27 Amorphous silicon and polysilicon thin layers coating method for electronic device production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RO13324688A RO101057B1 (en) 1988-04-27 1988-04-27 Amorphous silicon and polysilicon thin layers coating method for electronic device production

Publications (1)

Publication Number Publication Date
RO101057B1 true RO101057B1 (en) 1992-11-23

Family

ID=20121557

Family Applications (1)

Application Number Title Priority Date Filing Date
RO13324688A RO101057B1 (en) 1988-04-27 1988-04-27 Amorphous silicon and polysilicon thin layers coating method for electronic device production

Country Status (1)

Country Link
RO (1) RO101057B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1182275A3 (en) * 1996-08-29 2002-04-24 Matsushita Electric Industrial Co., Ltd. Method of forming an interlayer insulating film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1182275A3 (en) * 1996-08-29 2002-04-24 Matsushita Electric Industrial Co., Ltd. Method of forming an interlayer insulating film

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