PT3431968T - System and method for inspecting a wafer - Google Patents

System and method for inspecting a wafer

Info

Publication number
PT3431968T
PT3431968T PT181896168T PT18189616T PT3431968T PT 3431968 T PT3431968 T PT 3431968T PT 181896168 T PT181896168 T PT 181896168T PT 18189616 T PT18189616 T PT 18189616T PT 3431968 T PT3431968 T PT 3431968T
Authority
PT
Portugal
Prior art keywords
inspecting
wafer
Prior art date
Application number
PT181896168T
Other languages
Portuguese (pt)
Original Assignee
Semiconductor Tech & Instruments Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Tech & Instruments Pte Ltd filed Critical Semiconductor Tech & Instruments Pte Ltd
Publication of PT3431968T publication Critical patent/PT3431968T/en

Links

PT181896168T 2009-01-13 2010-01-13 System and method for inspecting a wafer PT3431968T (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG2009000229 2009-01-13
SG2009001109 2009-02-16

Publications (1)

Publication Number Publication Date
PT3431968T true PT3431968T (en) 2020-09-24

Family

ID=73153767

Family Applications (1)

Application Number Title Priority Date Filing Date
PT181896168T PT3431968T (en) 2009-01-13 2010-01-13 System and method for inspecting a wafer

Country Status (1)

Country Link
PT (1) PT3431968T (en)

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