PT3420386T - Revestimento ótico e processo para fabrico de um revestimento ótico com dispersão de luz reduzida - Google Patents

Revestimento ótico e processo para fabrico de um revestimento ótico com dispersão de luz reduzida

Info

Publication number
PT3420386T
PT3420386T PT177078086T PT17707808T PT3420386T PT 3420386 T PT3420386 T PT 3420386T PT 177078086 T PT177078086 T PT 177078086T PT 17707808 T PT17707808 T PT 17707808T PT 3420386 T PT3420386 T PT 3420386T
Authority
PT
Portugal
Prior art keywords
optical coating
producing
light scattering
reduced light
coating
Prior art date
Application number
PT177078086T
Other languages
English (en)
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Publication of PT3420386T publication Critical patent/PT3420386T/pt

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0018—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for preventing ghost images
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
    • G02B5/0858—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
PT177078086T 2016-02-25 2017-02-24 Revestimento ótico e processo para fabrico de um revestimento ótico com dispersão de luz reduzida PT3420386T (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102016103339.1A DE102016103339A1 (de) 2016-02-25 2016-02-25 Optische Beschichtung und Verfahren zur Herstellung einer optischen Beschichtung mit verminderter Lichtstreuung

Publications (1)

Publication Number Publication Date
PT3420386T true PT3420386T (pt) 2023-03-17

Family

ID=58191417

Family Applications (1)

Application Number Title Priority Date Filing Date
PT177078086T PT3420386T (pt) 2016-02-25 2017-02-24 Revestimento ótico e processo para fabrico de um revestimento ótico com dispersão de luz reduzida

Country Status (5)

Country Link
US (1) US20190086580A1 (pt)
EP (1) EP3420386B1 (pt)
DE (1) DE102016103339A1 (pt)
PT (1) PT3420386T (pt)
WO (1) WO2017144684A1 (pt)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018211499A1 (de) 2018-07-11 2020-01-16 Carl Zeiss Smt Gmbh Reflektives optisches Element und Verfahren zum Herstellen eines reflektiven optischen Elements

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9619781D0 (en) * 1996-09-23 1996-11-06 Secr Defence Multi layer interference coatings
DE10309084A1 (de) * 2003-03-03 2004-09-16 Carl Zeiss Smt Ag Reflektives optisches Element und EUV-Lithographiegerät
TWI329208B (en) * 2003-06-03 2010-08-21 Oerlikon Trading Ag Optical substrate for enhanced detectability of fluorescence
DE102005016591B4 (de) * 2005-04-11 2009-11-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Transmissionsfilter für den EUV-Spektralbereich
US20100301437A1 (en) * 2009-06-01 2010-12-02 Kla-Tencor Corporation Anti-Reflective Coating For Sensors Suitable For High Throughput Inspection Systems
JP5586687B2 (ja) * 2010-03-17 2014-09-10 株式会社東芝 ミラー
WO2013152031A1 (en) * 2012-04-04 2013-10-10 Kla-Tencor Corporation Protective fluorine-doped silicon oxide film for optical components

Also Published As

Publication number Publication date
DE102016103339A1 (de) 2017-08-31
US20190086580A1 (en) 2019-03-21
EP3420386B1 (de) 2023-01-04
EP3420386A1 (de) 2019-01-02
WO2017144684A1 (de) 2017-08-31

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