PL4457484T3 - Urządzenie czujnika optycznego - Google Patents

Urządzenie czujnika optycznego

Info

Publication number
PL4457484T3
PL4457484T3 PL23714075.1T PL23714075T PL4457484T3 PL 4457484 T3 PL4457484 T3 PL 4457484T3 PL 23714075 T PL23714075 T PL 23714075T PL 4457484 T3 PL4457484 T3 PL 4457484T3
Authority
PL
Poland
Prior art keywords
optical sensor
sensor apparatus
optical
sensor
Prior art date
Application number
PL23714075.1T
Other languages
English (en)
Inventor
Heimo KERÄNEN
Original Assignee
Lmi Technologies Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lmi Technologies Inc. filed Critical Lmi Technologies Inc.
Publication of PL4457484T3 publication Critical patent/PL4457484T3/pl

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608Height gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50Using chromatic effects to achieve wavelength-dependent depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
PL23714075.1T 2023-03-09 2023-03-09 Urządzenie czujnika optycznego PL4457484T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/FI2023/050130 WO2024184576A1 (en) 2023-03-09 2023-03-09 An optical sensor apparatus

Publications (1)

Publication Number Publication Date
PL4457484T3 true PL4457484T3 (pl) 2026-04-20

Family

ID=85781660

Family Applications (1)

Application Number Title Priority Date Filing Date
PL23714075.1T PL4457484T3 (pl) 2023-03-09 2023-03-09 Urządzenie czujnika optycznego

Country Status (10)

Country Link
US (1) US12607457B2 (pl)
EP (1) EP4457484B1 (pl)
JP (1) JP2026509164A (pl)
KR (1) KR20250155522A (pl)
CN (1) CN120787305A (pl)
CA (1) CA3232851A1 (pl)
ES (1) ES3058191T3 (pl)
PL (1) PL4457484T3 (pl)
TW (1) TW202500948A (pl)
WO (1) WO2024184576A1 (pl)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19713362A1 (de) * 1997-03-29 1998-10-01 Zeiss Carl Jena Gmbh Konfokale mikroskopische Anordnung
DE102006036504A1 (de) 2006-08-04 2008-02-07 Vistec Semiconductor Systems Gmbh Vorrichtung und Verfahren zur Messung des Höhenprofils eines strukturierten Substrats
DE102007019267A1 (de) * 2007-04-24 2008-10-30 Degudent Gmbh Messanordnung sowie Verfahren zum dreidimensionalen Messen eines Objekts
DE102010036447A1 (de) * 2010-03-26 2011-09-29 Degudent Gmbh Verfahren zur Ermittlung von Materialcharakteristika
DE102018130901A1 (de) * 2018-12-04 2020-06-04 Precitec Optronik Gmbh Optische Messeinrichtung

Also Published As

Publication number Publication date
WO2024184576A1 (en) 2024-09-12
ES3058191T3 (en) 2026-03-09
TW202500948A (zh) 2025-01-01
EP4457484A1 (en) 2024-11-06
CA3232851A1 (en) 2025-01-24
US20260009635A1 (en) 2026-01-08
CN120787305A (zh) 2025-10-14
US12607457B2 (en) 2026-04-21
EP4457484C0 (en) 2025-12-17
JP2026509164A (ja) 2026-03-17
EP4457484B1 (en) 2025-12-17
KR20250155522A (ko) 2025-10-30

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