PL4229379T3 - Cela do pomiaru ciśnienia i sposób wytwarzania celi do pomiaru ciśnienia - Google Patents

Cela do pomiaru ciśnienia i sposób wytwarzania celi do pomiaru ciśnienia

Info

Publication number
PL4229379T3
PL4229379T3 PL20790296.6T PL20790296T PL4229379T3 PL 4229379 T3 PL4229379 T3 PL 4229379T3 PL 20790296 T PL20790296 T PL 20790296T PL 4229379 T3 PL4229379 T3 PL 4229379T3
Authority
PL
Poland
Prior art keywords
pressure measuring
measuring cell
manufacturing
cell
pressure
Prior art date
Application number
PL20790296.6T
Other languages
English (en)
Inventor
Jochen Huber
Valentin KOPP
Original Assignee
Vega Grieshaber Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vega Grieshaber Kg filed Critical Vega Grieshaber Kg
Publication of PL4229379T3 publication Critical patent/PL4229379T3/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0045—Diaphragm associated with a buried cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Child & Adolescent Psychology (AREA)
  • Measuring Fluid Pressure (AREA)
PL20790296.6T 2020-10-13 2020-10-13 Cela do pomiaru ciśnienia i sposób wytwarzania celi do pomiaru ciśnienia PL4229379T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/EP2020/078780 WO2022078578A1 (de) 2020-10-13 2020-10-13 Druckmesszelle und verfahren zur herstellung einer druckmesszelle
EP20790296.6A EP4229379B1 (de) 2020-10-13 2020-10-13 Druckmesszelle und verfahren zur herstellung einer druckmesszelle

Publications (1)

Publication Number Publication Date
PL4229379T3 true PL4229379T3 (pl) 2025-10-27

Family

ID=72852679

Family Applications (1)

Application Number Title Priority Date Filing Date
PL20790296.6T PL4229379T3 (pl) 2020-10-13 2020-10-13 Cela do pomiaru ciśnienia i sposób wytwarzania celi do pomiaru ciśnienia

Country Status (3)

Country Link
EP (1) EP4229379B1 (pl)
PL (1) PL4229379T3 (pl)
WO (1) WO2022078578A1 (pl)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003008921A1 (en) * 2001-07-17 2003-01-30 Measurement Specialties, Inc. Isolation technique for pressure sensing structure
DE102009045164A1 (de) * 2009-09-30 2011-03-31 Robert Bosch Gmbh Sensoranordnung und Verfahren zu deren Herstellung

Also Published As

Publication number Publication date
EP4229379C0 (de) 2025-08-20
WO2022078578A1 (de) 2022-04-21
EP4229379A1 (de) 2023-08-23
EP4229379B1 (de) 2025-08-20

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