PL410160A1 - Modular system of the devices for magnetron vacuum sublimation and the device for magnetron vacuum sublimation - Google Patents

Modular system of the devices for magnetron vacuum sublimation and the device for magnetron vacuum sublimation

Info

Publication number
PL410160A1
PL410160A1 PL410160A PL41016014A PL410160A1 PL 410160 A1 PL410160 A1 PL 410160A1 PL 410160 A PL410160 A PL 410160A PL 41016014 A PL41016014 A PL 41016014A PL 410160 A1 PL410160 A1 PL 410160A1
Authority
PL
Poland
Prior art keywords
module
power supply
magnetron
vacuum
vacuum chamber
Prior art date
Application number
PL410160A
Other languages
Polish (pl)
Inventor
Jarosław Zenon Halarewicz
Piotr Andrzej Domanowski
Original Assignee
Bohamet Spółka Akcyjna
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bohamet Spółka Akcyjna filed Critical Bohamet Spółka Akcyjna
Priority to PL410160A priority Critical patent/PL410160A1/en
Publication of PL410160A1 publication Critical patent/PL410160A1/en

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

Wynalazek ujawnia układ modułowy urządzeń do magnetronowego napylania próżniowego i urządzenie modułowe do magnetronowego napylania próżniowego, przeznaczone do napylania cienkich powłok przeciwzużyciowych na powierzchniach metali. Układ modułowy urządzeń do magnetronowego napylania próżniowego, składający się z modułu komory próżniowej, modułu zasilacza magnetronu, modułu zasilacza gazów technologicznych, modułu pompy próżniowej, modułu chłodzenia wody, modułu sterowania, charakteryzuje się tym, że moduł komory próżniowej (MKP) stanowi jeden z wielu wymiennych modułów, z których każdy dostosowany jest do określonego zakresu gabarytów napylanego elementu i/lub technologii napylania. Urządzenie modułowe do magnetronowego napylania próżniowego, składające się z modułu komory próżniowej, zasilacza magnetronu, zasilacza gazów technologicznych, pompy próżniowej, modułu chłodzenia wody, zasilacza czyszczenia jarzeniowego, zasilacza prądu podkładu, zasilacza grzałek oraz sterownika, charakteryzuje się tym, że stanowi je blok urządzeń (1), moduł chłodzenia wody (2) oraz wymienny moduł komory próżniowej (4) wybrany spośród wielu będących na wyposażeniu urządzenia modułów komór próżniowych (4, 5, 6), z których każdy dostosowany jest do określonego zakresu gabarytów napylanego elementu i/lub technologii napylania.The invention discloses a modular arrangement of magnetron vacuum sputtering devices and a modular device for magnetron vacuum sputtering intended for spraying thin anti-wear coatings on metal surfaces. The modular system of magnetron vacuum sputtering devices, consisting of a vacuum chamber module, magnetron power supply module, process gas power supply module, vacuum pump module, water cooling module, control module, characterized by the fact that the vacuum chamber module (MKP) is one of many exchangeable modules, each of which is adapted to a specific range of dimensions of the sprayed element and / or spraying technology. A modular device for magnetron vacuum sputtering, consisting of a vacuum chamber module, magnetron power supply, process gas power supply, vacuum pump, water cooling module, glow cleaning power supply, primer power supply, heater power supply and controller, characterized by their block of devices (1), a water cooling module (2) and a replaceable vacuum chamber module (4) selected from many of the vacuum chamber modules (4, 5, 6) that are equipped, each of which is adapted to a specific range of dimensions of the sprayed element and / or sputtering technology.

PL410160A 2014-11-17 2014-11-17 Modular system of the devices for magnetron vacuum sublimation and the device for magnetron vacuum sublimation PL410160A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL410160A PL410160A1 (en) 2014-11-17 2014-11-17 Modular system of the devices for magnetron vacuum sublimation and the device for magnetron vacuum sublimation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL410160A PL410160A1 (en) 2014-11-17 2014-11-17 Modular system of the devices for magnetron vacuum sublimation and the device for magnetron vacuum sublimation

Publications (1)

Publication Number Publication Date
PL410160A1 true PL410160A1 (en) 2016-05-23

Family

ID=55970658

Family Applications (1)

Application Number Title Priority Date Filing Date
PL410160A PL410160A1 (en) 2014-11-17 2014-11-17 Modular system of the devices for magnetron vacuum sublimation and the device for magnetron vacuum sublimation

Country Status (1)

Country Link
PL (1) PL410160A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108992962A (en) * 2018-09-30 2018-12-14 深圳普瑞材料技术有限公司 A kind of modularization sublimation purification system
CN108992962B (en) * 2018-09-30 2024-05-31 深圳普瑞材料技术有限公司 Modularized sublimation purification system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108992962A (en) * 2018-09-30 2018-12-14 深圳普瑞材料技术有限公司 A kind of modularization sublimation purification system
CN108992962B (en) * 2018-09-30 2024-05-31 深圳普瑞材料技术有限公司 Modularized sublimation purification system

Similar Documents

Publication Publication Date Title
MX2018000112A (en) System for reducing inlet air temperature of a device.
MX2018006079A (en) Ice making device, moving body, flake ice production device, and flake ice production method.
MY190619A (en) Treatment installation and method for treating workpieces
EP3650403A3 (en) Modular beverage cooling system
WO2016087920A3 (en) Cooling water supply system and method
MX2015009065A (en) Process for obtaining a substrate equipped with a coating.
MY193979A (en) Deposition apparatus and physical vapor deposition chamber
PL3599025T3 (en) Coolant spray module system for heat treated metal product
MX2018016407A (en) Method for controlling heat transfer between a local cooling system and a local heating system.
WO2015173631A3 (en) Compositions and methods for micropatterning superhydrophobic surfaces
WO2017116087A3 (en) Battery managing device and battery energy storing system
EP3509762A4 (en) High velocity spray torch for spraying internal surfaces
DK3510612T3 (en) GAS SUPPLY REGULATION SYSTEM INCLUDING AN ELECTROMAGNETIC ACTUATOR
PL3421140T3 (en) Manually-operated paint spray gun
MY185549A (en) Sputtering target having increased power compatibility
IN2015DN01819A (en)
PL3578792T3 (en) Method for increasing the efficiency of continuous combustion systems
PL410160A1 (en) Modular system of the devices for magnetron vacuum sublimation and the device for magnetron vacuum sublimation
EP3853395A4 (en) Solution based corrosion inhibitors for aluminum alloy thermal spray coatings
FR3027034B1 (en) METHOD FOR CONTROLLING AN ELECTROLYSIS SYSTEM TAKING INTO ACCOUNT THE TEMPERATURE OF THE ELECTROLYSES MODULES OF THE ELECTROLYSIS SYSTEM
GB201908463D0 (en) Measuring spray deposits on plant surfaces
MX2017001321A (en) System and method for robotised heat treatment by induction heating.
HUE054154T2 (en) Plasma coating lance for internal coatings
CL2020002881A1 (en) Use of canakinumab
BR112018009585A2 (en) spray arrangement and spray method for optimized energy flow distribution