PL410160A1 - Modular system of the devices for magnetron vacuum sublimation and the device for magnetron vacuum sublimation - Google Patents
Modular system of the devices for magnetron vacuum sublimation and the device for magnetron vacuum sublimationInfo
- Publication number
- PL410160A1 PL410160A1 PL410160A PL41016014A PL410160A1 PL 410160 A1 PL410160 A1 PL 410160A1 PL 410160 A PL410160 A PL 410160A PL 41016014 A PL41016014 A PL 41016014A PL 410160 A1 PL410160 A1 PL 410160A1
- Authority
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- Poland
- Prior art keywords
- module
- power supply
- magnetron
- vacuum
- vacuum chamber
- Prior art date
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Abstract
Wynalazek ujawnia układ modułowy urządzeń do magnetronowego napylania próżniowego i urządzenie modułowe do magnetronowego napylania próżniowego, przeznaczone do napylania cienkich powłok przeciwzużyciowych na powierzchniach metali. Układ modułowy urządzeń do magnetronowego napylania próżniowego, składający się z modułu komory próżniowej, modułu zasilacza magnetronu, modułu zasilacza gazów technologicznych, modułu pompy próżniowej, modułu chłodzenia wody, modułu sterowania, charakteryzuje się tym, że moduł komory próżniowej (MKP) stanowi jeden z wielu wymiennych modułów, z których każdy dostosowany jest do określonego zakresu gabarytów napylanego elementu i/lub technologii napylania. Urządzenie modułowe do magnetronowego napylania próżniowego, składające się z modułu komory próżniowej, zasilacza magnetronu, zasilacza gazów technologicznych, pompy próżniowej, modułu chłodzenia wody, zasilacza czyszczenia jarzeniowego, zasilacza prądu podkładu, zasilacza grzałek oraz sterownika, charakteryzuje się tym, że stanowi je blok urządzeń (1), moduł chłodzenia wody (2) oraz wymienny moduł komory próżniowej (4) wybrany spośród wielu będących na wyposażeniu urządzenia modułów komór próżniowych (4, 5, 6), z których każdy dostosowany jest do określonego zakresu gabarytów napylanego elementu i/lub technologii napylania.The invention discloses a modular arrangement of magnetron vacuum sputtering devices and a modular device for magnetron vacuum sputtering intended for spraying thin anti-wear coatings on metal surfaces. The modular system of magnetron vacuum sputtering devices, consisting of a vacuum chamber module, magnetron power supply module, process gas power supply module, vacuum pump module, water cooling module, control module, characterized by the fact that the vacuum chamber module (MKP) is one of many exchangeable modules, each of which is adapted to a specific range of dimensions of the sprayed element and / or spraying technology. A modular device for magnetron vacuum sputtering, consisting of a vacuum chamber module, magnetron power supply, process gas power supply, vacuum pump, water cooling module, glow cleaning power supply, primer power supply, heater power supply and controller, characterized by their block of devices (1), a water cooling module (2) and a replaceable vacuum chamber module (4) selected from many of the vacuum chamber modules (4, 5, 6) that are equipped, each of which is adapted to a specific range of dimensions of the sprayed element and / or sputtering technology.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL410160A PL410160A1 (en) | 2014-11-17 | 2014-11-17 | Modular system of the devices for magnetron vacuum sublimation and the device for magnetron vacuum sublimation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL410160A PL410160A1 (en) | 2014-11-17 | 2014-11-17 | Modular system of the devices for magnetron vacuum sublimation and the device for magnetron vacuum sublimation |
Publications (1)
Publication Number | Publication Date |
---|---|
PL410160A1 true PL410160A1 (en) | 2016-05-23 |
Family
ID=55970658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL410160A PL410160A1 (en) | 2014-11-17 | 2014-11-17 | Modular system of the devices for magnetron vacuum sublimation and the device for magnetron vacuum sublimation |
Country Status (1)
Country | Link |
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PL (1) | PL410160A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108992962A (en) * | 2018-09-30 | 2018-12-14 | 深圳普瑞材料技术有限公司 | A kind of modularization sublimation purification system |
CN108992962B (en) * | 2018-09-30 | 2024-05-31 | 深圳普瑞材料技术有限公司 | Modularized sublimation purification system |
-
2014
- 2014-11-17 PL PL410160A patent/PL410160A1/en unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108992962A (en) * | 2018-09-30 | 2018-12-14 | 深圳普瑞材料技术有限公司 | A kind of modularization sublimation purification system |
CN108992962B (en) * | 2018-09-30 | 2024-05-31 | 深圳普瑞材料技术有限公司 | Modularized sublimation purification system |
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