PL397251A1 - Sposób kontroli periodycznsci w strukturach supersieci II rodzaju InAs(In)GaSb - Google Patents
Sposób kontroli periodycznsci w strukturach supersieci II rodzaju InAs(In)GaSbInfo
- Publication number
- PL397251A1 PL397251A1 PL397251A PL39725111A PL397251A1 PL 397251 A1 PL397251 A1 PL 397251A1 PL 397251 A PL397251 A PL 397251A PL 39725111 A PL39725111 A PL 39725111A PL 397251 A1 PL397251 A1 PL 397251A1
- Authority
- PL
- Poland
- Prior art keywords
- ray
- inas
- peaks
- periodicity
- gasb
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 5
- 229910005542 GaSb Inorganic materials 0.000 title abstract 3
- 229910000673 Indium arsenide Inorganic materials 0.000 title abstract 3
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 title abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 3
- 238000002441 X-ray diffraction Methods 0.000 abstract 2
- 238000000333 X-ray scattering Methods 0.000 abstract 1
- 230000001427 coherent effect Effects 0.000 abstract 1
- 238000002017 high-resolution X-ray diffraction Methods 0.000 abstract 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Przedmiotem wynalazku jest sposób kontroli periodycznosci w strukturach supersieci II rodzaju InAs/(In)GaSb. Sposób jest przeznaczony dla supersieci (superlattice-SL) wykonanych w stabilnych warunkach technologicznych, zoptymalizowanych dla danej pary materialowej tworzacej SL, o grubosci calkowitej powyzej 500 nm. W sposobie tym najpierw, korzystnie za pomoca wysokorozdzielczej dyfraktometrii rentgenowskiej sporzadza sie dyfraktogram struktury i sprawdza sie, obecnosci pików satelitarnych wysokich rzedów i pików interferencyjnych. Nastepnie po ich zlokalizowaniu sporzadza sie, korzystnie takze za pomoca wysokorozdzielczej dyfraktometrii rentgenowskiej co najmniej jedna mape sieci odwrotnej struktury zawierajaca co najmniej dwa piki satelitarne wysokich rzedów pochodzace od rozproszenia koherentnego promieniowania rentgenowskiego i sprawdza sie obecnosc obszarów rozpraszania dyfuzyjnego wokól tych pików oraz ich ksztalt geometryczny. Periodycznosc struktur InAs/GaSb identyfikuje sie na podstawie obszarów rozproszenia dyfuzyjnego o okreslonym ksztalcie geometrycznym.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PL397251A PL224283B1 (pl) | 2011-12-05 | 2011-12-05 | Sposób kontroli periodyczności w strukturach supersieci II rodzaju InAs/(In)GaSb |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PL397251A PL224283B1 (pl) | 2011-12-05 | 2011-12-05 | Sposób kontroli periodyczności w strukturach supersieci II rodzaju InAs/(In)GaSb |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| PL397251A1 true PL397251A1 (pl) | 2013-06-10 |
| PL224283B1 PL224283B1 (pl) | 2016-12-30 |
Family
ID=48539566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL397251A PL224283B1 (pl) | 2011-12-05 | 2011-12-05 | Sposób kontroli periodyczności w strukturach supersieci II rodzaju InAs/(In)GaSb |
Country Status (1)
| Country | Link |
|---|---|
| PL (1) | PL224283B1 (pl) |
-
2011
- 2011-12-05 PL PL397251A patent/PL224283B1/pl unknown
Also Published As
| Publication number | Publication date |
|---|---|
| PL224283B1 (pl) | 2016-12-30 |
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