PL385484A1 - Method and system for heating of plasma - Google Patents
Method and system for heating of plasmaInfo
- Publication number
- PL385484A1 PL385484A1 PL385484A PL38548408A PL385484A1 PL 385484 A1 PL385484 A1 PL 385484A1 PL 385484 A PL385484 A PL 385484A PL 38548408 A PL38548408 A PL 38548408A PL 385484 A1 PL385484 A1 PL 385484A1
- Authority
- PL
- Poland
- Prior art keywords
- plasma
- heating
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL385484A PL221507B1 (en) | 2008-06-20 | 2008-06-20 | Method and system for heating of plasma |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL385484A PL221507B1 (en) | 2008-06-20 | 2008-06-20 | Method and system for heating of plasma |
Publications (2)
Publication Number | Publication Date |
---|---|
PL385484A1 true PL385484A1 (en) | 2009-12-21 |
PL221507B1 PL221507B1 (en) | 2016-04-29 |
Family
ID=42988686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL385484A PL221507B1 (en) | 2008-06-20 | 2008-06-20 | Method and system for heating of plasma |
Country Status (1)
Country | Link |
---|---|
PL (1) | PL221507B1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013055241A1 (en) | 2011-10-13 | 2013-04-18 | Instytut Optyki Stosowanej | Electrode cooling system in a multi-electrode microwave plasma excitation source |
EP3449699B1 (en) * | 2016-04-05 | 2021-12-15 | Apan Instruments Sp. z o.o. | Method of use of a microwave electromagnetic field shaping adapter, which heats a toroidal plasma discharge |
-
2008
- 2008-06-20 PL PL385484A patent/PL221507B1/en unknown
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013055241A1 (en) | 2011-10-13 | 2013-04-18 | Instytut Optyki Stosowanej | Electrode cooling system in a multi-electrode microwave plasma excitation source |
CN103891418A (en) * | 2011-10-13 | 2014-06-25 | 应用光学研究所 | Electrode cooling system in a multi-electrode microwave plasma excitation source |
US8829770B2 (en) | 2011-10-13 | 2014-09-09 | Instytut Optyki Stosowanej | Electrode cooling system in a multi-electrode microwave plasma excitation source |
CN103891418B (en) * | 2011-10-13 | 2015-12-09 | 应用光学研究所 | Electrode cooling system in the microwave plasma excitated source of multi-electrode |
EP3449699B1 (en) * | 2016-04-05 | 2021-12-15 | Apan Instruments Sp. z o.o. | Method of use of a microwave electromagnetic field shaping adapter, which heats a toroidal plasma discharge |
AU2017246939B2 (en) * | 2016-04-05 | 2022-05-12 | Apan Instruments SP. Z O.O. | An adapter shaping electromagnetic field, which heats toroidal plasma discharge at microwave frequency |
Also Published As
Publication number | Publication date |
---|---|
PL221507B1 (en) | 2016-04-29 |
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