PL375716A1 - Method for the integration of multi-structure micro-systems - Google Patents

Method for the integration of multi-structure micro-systems

Info

Publication number
PL375716A1
PL375716A1 PL375716A PL37571605A PL375716A1 PL 375716 A1 PL375716 A1 PL 375716A1 PL 375716 A PL375716 A PL 375716A PL 37571605 A PL37571605 A PL 37571605A PL 375716 A1 PL375716 A1 PL 375716A1
Authority
PL
Poland
Prior art keywords
integration
systems
structure micro
micro
Prior art date
Application number
PL375716A
Other languages
Polish (pl)
Other versions
PL212025B1 (en
Inventor
Piotr Grabiec
Pawel Janus
Krzysztof Domanski
Waldemar Milczarek
Original Assignee
Instytut Technologii Elektronowej
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Instytut Technologii Elektronowej filed Critical Instytut Technologii Elektronowej
Priority to PL375716A priority Critical patent/PL212025B1/en
Publication of PL375716A1 publication Critical patent/PL375716A1/en
Publication of PL212025B1 publication Critical patent/PL212025B1/en

Links

PL375716A 2005-06-15 2005-06-15 Method for the integration of multi-structure micro-systems PL212025B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL375716A PL212025B1 (en) 2005-06-15 2005-06-15 Method for the integration of multi-structure micro-systems

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL375716A PL212025B1 (en) 2005-06-15 2005-06-15 Method for the integration of multi-structure micro-systems

Publications (2)

Publication Number Publication Date
PL375716A1 true PL375716A1 (en) 2006-12-27
PL212025B1 PL212025B1 (en) 2012-07-31

Family

ID=40561502

Family Applications (1)

Application Number Title Priority Date Filing Date
PL375716A PL212025B1 (en) 2005-06-15 2005-06-15 Method for the integration of multi-structure micro-systems

Country Status (1)

Country Link
PL (1) PL212025B1 (en)

Also Published As

Publication number Publication date
PL212025B1 (en) 2012-07-31

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Effective date: 20120316