PL353123A1 - Sposób trawienia półprzewodników z użyciem mikrofal - Google Patents

Sposób trawienia półprzewodników z użyciem mikrofal

Info

Publication number
PL353123A1
PL353123A1 PL02353123A PL35312302A PL353123A1 PL 353123 A1 PL353123 A1 PL 353123A1 PL 02353123 A PL02353123 A PL 02353123A PL 35312302 A PL35312302 A PL 35312302A PL 353123 A1 PL353123 A1 PL 353123A1
Authority
PL
Poland
Prior art keywords
etching semiconductors
employing microwaves
semiconductors employing
microwaves
etching
Prior art date
Application number
PL02353123A
Other languages
English (en)
Other versions
PL203081B1 (pl
Inventor
Jan Dziuban
Rafał Walczak
Original Assignee
Politechnika Wrocławska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Wrocławska filed Critical Politechnika Wrocławska
Priority to PL353123A priority Critical patent/PL203081B1/pl
Priority to PCT/PL2003/000030 priority patent/WO2003083926A2/en
Publication of PL353123A1 publication Critical patent/PL353123A1/pl
Publication of PL203081B1 publication Critical patent/PL203081B1/pl

Links

PL353123A 2002-04-02 2002-04-02 Sposób trawienia półprzewodników z użyciem mikrofal PL203081B1 (pl)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PL353123A PL203081B1 (pl) 2002-04-02 2002-04-02 Sposób trawienia półprzewodników z użyciem mikrofal
PCT/PL2003/000030 WO2003083926A2 (en) 2002-04-02 2003-03-28 The microwave enhanced method of silicon etching and the system for microwave enhanced semiconductors etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL353123A PL203081B1 (pl) 2002-04-02 2002-04-02 Sposób trawienia półprzewodników z użyciem mikrofal

Publications (2)

Publication Number Publication Date
PL353123A1 true PL353123A1 (pl) 2003-10-06
PL203081B1 PL203081B1 (pl) 2009-08-31

Family

ID=29776145

Family Applications (1)

Application Number Title Priority Date Filing Date
PL353123A PL203081B1 (pl) 2002-04-02 2002-04-02 Sposób trawienia półprzewodników z użyciem mikrofal

Country Status (1)

Country Link
PL (1) PL203081B1 (pl)

Also Published As

Publication number Publication date
PL203081B1 (pl) 2009-08-31

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