PL3088561T3 - Piec próżniowy hybrydowy - Google Patents

Piec próżniowy hybrydowy

Info

Publication number
PL3088561T3
PL3088561T3 PL16163235T PL16163235T PL3088561T3 PL 3088561 T3 PL3088561 T3 PL 3088561T3 PL 16163235 T PL16163235 T PL 16163235T PL 16163235 T PL16163235 T PL 16163235T PL 3088561 T3 PL3088561 T3 PL 3088561T3
Authority
PL
Poland
Prior art keywords
vacuum furnace
hybrid vacuum
hybrid
furnace
vacuum
Prior art date
Application number
PL16163235T
Other languages
English (en)
Inventor
Bogdan Flisiewicz
Maciej Cygański
Witold Gulbiński
Jan Walkowicz
Original Assignee
Amp Sp Z O O
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amp Sp Z O O filed Critical Amp Sp Z O O
Publication of PL3088561T3 publication Critical patent/PL3088561T3/pl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/586—Nitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Furnace Details (AREA)
  • Physical Vapour Deposition (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
PL16163235T 2015-04-29 2016-03-31 Piec próżniowy hybrydowy PL3088561T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PL412157A PL230547B1 (pl) 2015-04-29 2015-04-29 Piec prozniowy hybrydowy
EP16163235.1A EP3088561B1 (en) 2015-04-29 2016-03-31 Hybrid vacuum furnace

Publications (1)

Publication Number Publication Date
PL3088561T3 true PL3088561T3 (pl) 2019-10-31

Family

ID=56408962

Family Applications (2)

Application Number Title Priority Date Filing Date
PL412157A PL230547B1 (pl) 2015-04-29 2015-04-29 Piec prozniowy hybrydowy
PL16163235T PL3088561T3 (pl) 2015-04-29 2016-03-31 Piec próżniowy hybrydowy

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PL412157A PL230547B1 (pl) 2015-04-29 2015-04-29 Piec prozniowy hybrydowy

Country Status (2)

Country Link
EP (1) EP3088561B1 (pl)
PL (2) PL230547B1 (pl)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2670218B1 (fr) 1990-12-06 1993-02-05 Innovatique Sa Procede de traitement de metaux par depot de matiere, et pour la mise en óoeuvre dudit procede.
DE4443740B4 (de) * 1994-12-08 2005-09-15 W. Blösch AG Vorrichtung zum Beschichten von Substraten
JP4396885B2 (ja) * 2004-01-28 2010-01-13 株式会社不二越 マグネトロンスパッタ装置

Also Published As

Publication number Publication date
EP3088561B1 (en) 2019-05-01
EP3088561A1 (en) 2016-11-02
PL412157A1 (pl) 2016-11-07
PL230547B1 (pl) 2018-11-30

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