PL284591A1 - Method of etching indum phosphide by sputtering - Google Patents

Method of etching indum phosphide by sputtering

Info

Publication number
PL284591A1
PL284591A1 PL28459190A PL28459190A PL284591A1 PL 284591 A1 PL284591 A1 PL 284591A1 PL 28459190 A PL28459190 A PL 28459190A PL 28459190 A PL28459190 A PL 28459190A PL 284591 A1 PL284591 A1 PL 284591A1
Authority
PL
Poland
Prior art keywords
indum
phosphide
sputtering
etching
indum phosphide
Prior art date
Application number
PL28459190A
Other versions
PL162515B1 (en
Inventor
Ireneusz Wojcik
Original Assignee
Inst Tech Elektronowej
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inst Tech Elektronowej filed Critical Inst Tech Elektronowej
Priority to PL28459190A priority Critical patent/PL162515B1/en
Publication of PL284591A1 publication Critical patent/PL284591A1/en
Publication of PL162515B1 publication Critical patent/PL162515B1/en

Links

PL28459190A 1990-04-02 1990-04-02 Method of etching indum phosphide by sputtering PL162515B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL28459190A PL162515B1 (en) 1990-04-02 1990-04-02 Method of etching indum phosphide by sputtering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL28459190A PL162515B1 (en) 1990-04-02 1990-04-02 Method of etching indum phosphide by sputtering

Publications (2)

Publication Number Publication Date
PL284591A1 true PL284591A1 (en) 1991-10-07
PL162515B1 PL162515B1 (en) 1993-12-31

Family

ID=20050820

Family Applications (1)

Application Number Title Priority Date Filing Date
PL28459190A PL162515B1 (en) 1990-04-02 1990-04-02 Method of etching indum phosphide by sputtering

Country Status (1)

Country Link
PL (1) PL162515B1 (en)

Also Published As

Publication number Publication date
PL162515B1 (en) 1993-12-31

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