PL257717A2 - Method of measuring relative efficiency of ion sputtering - Google Patents

Method of measuring relative efficiency of ion sputtering

Info

Publication number
PL257717A2
PL257717A2 PL25771786A PL25771786A PL257717A2 PL 257717 A2 PL257717 A2 PL 257717A2 PL 25771786 A PL25771786 A PL 25771786A PL 25771786 A PL25771786 A PL 25771786A PL 257717 A2 PL257717 A2 PL 257717A2
Authority
PL
Poland
Prior art keywords
ion sputtering
measuring relative
relative efficiency
measuring
efficiency
Prior art date
Application number
PL25771786A
Other versions
PL149767B2 (en
Inventor
Zbigniew Kowalski
Original Assignee
Politechnika Wroclawska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Wroclawska filed Critical Politechnika Wroclawska
Priority to PL25771786A priority Critical patent/PL149767B2/en
Publication of PL257717A2 publication Critical patent/PL257717A2/en
Publication of PL149767B2 publication Critical patent/PL149767B2/en

Links

PL25771786A 1986-01-29 1986-01-29 Method of measuring relative ion sputtering efficiency characteristic PL149767B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL25771786A PL149767B2 (en) 1986-01-29 1986-01-29 Method of measuring relative ion sputtering efficiency characteristic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL25771786A PL149767B2 (en) 1986-01-29 1986-01-29 Method of measuring relative ion sputtering efficiency characteristic

Publications (2)

Publication Number Publication Date
PL257717A2 true PL257717A2 (en) 1986-11-18
PL149767B2 PL149767B2 (en) 1990-03-31

Family

ID=20030266

Family Applications (1)

Application Number Title Priority Date Filing Date
PL25771786A PL149767B2 (en) 1986-01-29 1986-01-29 Method of measuring relative ion sputtering efficiency characteristic

Country Status (1)

Country Link
PL (1) PL149767B2 (en)

Also Published As

Publication number Publication date
PL149767B2 (en) 1990-03-31

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