PL256145A1 - Magnetron sputtering device - Google Patents

Magnetron sputtering device

Info

Publication number
PL256145A1
PL256145A1 PL25614585A PL25614585A PL256145A1 PL 256145 A1 PL256145 A1 PL 256145A1 PL 25614585 A PL25614585 A PL 25614585A PL 25614585 A PL25614585 A PL 25614585A PL 256145 A1 PL256145 A1 PL 256145A1
Authority
PL
Poland
Prior art keywords
magnetron sputtering
sputtering device
magnetron
sputtering
Prior art date
Application number
PL25614585A
Inventor
Wojciech Telinski
Original Assignee
Zaklad Techniki Prozniowej
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zaklad Techniki Prozniowej filed Critical Zaklad Techniki Prozniowej
Priority to PL25614585A priority Critical patent/PL256145A1/en
Publication of PL256145A1 publication Critical patent/PL256145A1/en

Links

PL25614585A 1985-11-05 1985-11-05 Magnetron sputtering device PL256145A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL25614585A PL256145A1 (en) 1985-11-05 1985-11-05 Magnetron sputtering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL25614585A PL256145A1 (en) 1985-11-05 1985-11-05 Magnetron sputtering device

Publications (1)

Publication Number Publication Date
PL256145A1 true PL256145A1 (en) 1986-05-20

Family

ID=20028923

Family Applications (1)

Application Number Title Priority Date Filing Date
PL25614585A PL256145A1 (en) 1985-11-05 1985-11-05 Magnetron sputtering device

Country Status (1)

Country Link
PL (1) PL256145A1 (en)

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