NZ744149B2 - Liquid material ejection device - Google Patents
Liquid material ejection device Download PDFInfo
- Publication number
- NZ744149B2 NZ744149B2 NZ744149A NZ74414917A NZ744149B2 NZ 744149 B2 NZ744149 B2 NZ 744149B2 NZ 744149 A NZ744149 A NZ 744149A NZ 74414917 A NZ74414917 A NZ 74414917A NZ 744149 B2 NZ744149 B2 NZ 744149B2
- Authority
- NZ
- New Zealand
- Prior art keywords
- arm
- liquid material
- ejection device
- material ejection
- plunger
- Prior art date
Links
- 239000011344 liquid material Substances 0.000 title claims abstract description 136
- 238000003825 pressing Methods 0.000 claims abstract description 62
- 239000007788 liquid Substances 0.000 claims abstract description 40
- 230000005484 gravity Effects 0.000 abstract description 7
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- 238000006073 displacement reaction Methods 0.000 description 16
- 230000000694 effects Effects 0.000 description 5
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 230000007935 neutral effect Effects 0.000 description 5
- 238000010926 purge Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000008602 contraction Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0653—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1034—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves specially designed for conducting intermittent application of small quantities, e.g. drops, of coating material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
- B05C5/0237—Fluid actuated valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0291—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work the material being discharged on the work through discrete orifices as discrete droplets, beads or strips that coalesce on the work or are spread on the work so as to form a continuous coating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F04B17/003—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
- F04B9/02—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being mechanical
- F04B9/04—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being mechanical the means being cams, eccentrics or pin-and-slot mechanisms
Abstract
Problem: To provide a liquid material ejection device in which a plunger can be efficiently accelerated, the device having a low center of gravity and satisfactory maintainability, and a coating device in which the liquid material ejection device is mounted. Solution: The liquid material ejection device is provided with: a liquid chamber which communicates with an ejection opening and to which liquid material is supplied; a plunger of which a tip-end portion having a diameter smaller than the liquid chamber is moved back and forth in the liquid chamber; an elastic member which urges the plunger upward; an arm disposed so as to extend in a substantially horizontal direction; an arm drive device providing a driving source for operating the arm; and a base member on which the arm drive device is disposed. The liquid material ejection device is further provided with a pivotal mechanism unit which is connected to the arm drive device and which pivotally supports the arm drive device and the arm. The arm drive device is provided with a plurality of actuators disposed in a longitudinal direction of the arm. The arm is provided with a pressing portion which presses the plunger downward. The plunger is provided with an abutment portion pressed by the pressing portion. The plunger executes a linear reciprocating motion as the arm is pivotally moved. The coating device incorporates the liquid material ejection device. evice is provided with: a liquid chamber which communicates with an ejection opening and to which liquid material is supplied; a plunger of which a tip-end portion having a diameter smaller than the liquid chamber is moved back and forth in the liquid chamber; an elastic member which urges the plunger upward; an arm disposed so as to extend in a substantially horizontal direction; an arm drive device providing a driving source for operating the arm; and a base member on which the arm drive device is disposed. The liquid material ejection device is further provided with a pivotal mechanism unit which is connected to the arm drive device and which pivotally supports the arm drive device and the arm. The arm drive device is provided with a plurality of actuators disposed in a longitudinal direction of the arm. The arm is provided with a pressing portion which presses the plunger downward. The plunger is provided with an abutment portion pressed by the pressing portion. The plunger executes a linear reciprocating motion as the arm is pivotally moved. The coating device incorporates the liquid material ejection device.
Description
- -
DESCRIPTION
Title of Invention: LIQUID MATERIAL EJECTION DEVICE
Technical Field
The present invention relates to a liquid material ejection device
including a plunger reciprocated in a liquid chamber that is in
communication with a nozzle, actuators, and a displacement magnifying
mechanism, and further relates to an application apparatus incorporating
the liquid material ejection device. The term “plunger ” used in this
Description includes bar-shaped members called a needle, a rod, and a
piston, for example.
Background Art
Until now, various techniques have been proposed to eject a small
amount of liquid material in the form of a droplet by using a plunger
reciprocated in a liquid chamber that is in communication with a nozzle.
In many cases, an actuator utilizing a motor, air, or a piezoelectric element,
for example, is used as a driving source to move the plunger. As an
example of ejection devices utilizing air pressure as the driving source,
Patent Document 1 applied by the present applicant discloses an ejection
device in which an ejection port is opened by operating a plunger rod to
move backward with the air pressure, and a liquid droplet is ejected from
the ejection port by operating the plunger rod to move forward with elastic
force of a spring.
In the ejection device in which the plunger is reciprocated using
the spring and the air pressure, a sufficient movement distance of the
plunger can be easily obtained. However, because air has compressive
properties, it is difficult to increase a reciprocating speed of the plunger to
a certain level or higher. On the other hand, in the case of using the
- -
piezoelectric actuator, because operation of the piezoelectric element can
be controlled in accordance with an electrical pulse signal, the plunger has
high stroke reproducibility, and the operation of the piezoelectric element
is easy to control.
As an example of ejection devices in which a needle is
reciprocated using the piezoelectric actuator as the driving source, Patent
Document 2 discloses a liquid material ejection device including a liquid
chamber communicating with an ejection port and being supplied with a
liquid material, the needle having a tip portion that is moved back and
forth in the liquid chamber, a driver operating the needle back and forth,
and a displacement magnifying mechanism, the liquid material ejection
device ejecting a flying droplet from the ejection port. The driver is
constituted by an even number of driving units arranged in a bilaterally
symmetric relation, and the displacement magnifying mechanism includes
an elastically movable U-shaped member having a lower portion to which
the needle is coupled. The needle is moved backward by the driving units
applying force to move both ends of the U-shaped member away from each
other, and the needle is moved forward by the driving units applying force
to move both the ends of the U-shaped member closer to each other.
With the liquid material ejection device using the needle
(plunger), because large ejection force can be given by the plunger moving
forward at a high speed, it is possible to eject, as a droplet, a liquid
material having high viscosity, which cannot be ejected using an ink jet
device that pushes and ejects ink in an ink chamber with the aid of the
piezoelectric element (piezo element).
Patent Document 3 discloses a droplet ejection device including a
casing that has an ejection hole formed at its tip end and has a cylinder
- -
bore, a multilayered piezoelectric element disposed within the casing, and
a plunger that is driven by the piezoelectric element serving as a driving
source, and that is accommodated in the cylinder bore to be finely
extendable and contractible, wherein the piezoelectric element is integrally
fitted to an element holder and has a rectangular parallelepiped shape, a
thin-wall elastic portion is formed in part of the element holder to give the
piezoelectric element restoration force on the contraction side, an upper
end portion of the element holder is fixed to the casing, and the plunger is
formed at a lower end of the element holder.
The device disclosed in Patent Document 3 is a device including
the plunger with the same diameter as the cylinder bore and operating
based on the ejection principle of ejecting a liquid material in the same
amount as a volume of the cylinder bore, which has reduced with forward
movement of the plunger. However, the device operating based on that
ejection principle is not suitable for high-speed continuous ejection of
several hundred shots per second because sliding friction generates
between a lateral peripheral surface of the plunger and an inner peripheral
surface of the cylinder bore.
Citation List
Patent Documents
Patent Document 1: Japanese Patent Laid-Open Publication No.
2002-282740
Patent Document 2: Japanese Patent Laid-Open Publication No.
2015-51399
Patent Document 3: Japanese Patent No. 4786326
Summary of Invention
Technical Problem
- -
Recently, in an ejection device (dispenser) in which a plunger is
reciprocated, it has been demanded to eject a smaller flying droplet than
in the past. In the device disclosed in Patent Document 2, for example,
the needle having a relatively small diameter is reciprocated within the
liquid chamber having a relatively large diameter, and the liquid material
can be ejected in a smaller amount than a volume of the liquid chamber,
which has reduced with forward movement of the needle. In order to
eject a very small flying droplet with the above-mentioned ejection method,
the plunger has to be accelerated at speed of a certain level or higher.
In the ejection device in which the plunger is reciprocated by the
piezoelectric actuator, a displacement magnifying mechanism for
magnifying a displacement of the piezoelectric actuator is needed to obtain
the movement distance necessary for accelerating the plunger. However,
when the center of gravity of the ejection device is positioned at a higher
level with the provision of the displacement magnifying mechanism,
problems arise in that wobbling and vibration increase which are
generated at the times of not only starting and stopping movement of an
application head to which the ejection device is mounted, but also
changing a moving speed and a moving direction of the application head.
On the other hand, it is also conceivable to increase a displacement
of the piezoelectric element with intent to increase the displacement of the
piezoelectric actuator itself. However, using the piezoelectric element of
a multilayered structure or using many piezoelectric elements leads to the
problem that the size of the ejection device is increased and the
manufacturing cost is pushed up.
Furthermore, it is demanded in the ejection device that an
ejection portion has satisfactory maintainability. For instance, the
ejection device including the ejection portion, which has a structure easy to
wash the ejection port clogged with the solidified liquid material and to
replace the worn plunger, is demanded.
Accordingly, an object of the present invention is to provide a
liquid material ejection device in which a plunger can be efficiently
accelerated, the center of gravity of the device can be positioned at a lower
level, and satisfactory maintainability can be obtained, and an application
apparatus incorporating the liquid material ejection device.
Solution to Problems
The liquid material ejection device according to the present
invention comprises a liquid chamber communicating with an ejection port
and being supplied with a liquid material, a plunger including a tip portion
that has a smaller diameter than the liquid chamber and is moved back and
forth in the liquid chamber, an elastic member urging the plunger upward,
an arm disposed in a state extending in a substantially horizontal direction,
an arm driver serving as a driving source to operate the arm, and a base
member on which the arm driver is disposed, wherein the liquid material
ejection device further comprises a rocking mechanism unit connected to
the arm driver and rockingly supporting the arm, the arm driver includes a
plurality of actuators disposed in a juxtaposed relation in a longitudinal
direction of the arm, each of the actuators being extended and contracted
in a direction perpendicular to the longitudinal direction of the arm, the
arm includes a pressing portion pressing the plunger downward, the
plunger includes a contact portion pressed by the pressing portion, and the
plunger is linearly reciprocated with rocking motion of the arm.
In the above liquid material ejection device, the plurality of
actuators may be each constituted by a multilayered piezoelectric element,
the arm may be moved upward when the actuator disposed on the side
1003446732
nearer to the pressing portion is brought into an extended state and the
actuator disposed on the side farther away from the pressing portion is
kept in a non-extended state or brought into a contracted state, and the
arm may be moved downward when the actuator disposed on the side
nearer to the pressing portion is kept in the non-extended state or brought
into the contracted state and the actuator disposed on the side farther
away from the pressing portion is brought into the extended state.
In the above liquid material ejection device, the plurality of
actuators may be constituted by an even number of actuators. Preferably,
the even number of actuators may be constituted by a first piezoelectric
actuator and a second piezoelectric actuator.
In the above liquid material ejection device, the pressing portion
or the contact portion may have a curved surface allowing a contact state
between the pressing portion and the contact portion to be maintained
following the rocking motion of the arm.
The above liquid material ejection device may further comprise a
fastener detachably supporting the arm to the base member. Preferably,
the fastener is disposed between the plurality of actuators, and the
plurality of actuators are tightly sandwiched between the arm and the base
member by the fastener.
The above liquid material ejection device may further comprise a
guide supporting the plunger movably in a vertical direction, the elastic
member may be a compressed coil spring urging the plunger upward at all
times, and the plunger may be detachably inserted through the elastic
member and the guide.
In the above liquid material ejection device, the rocking mechanism
unit may be connected to a lower end of the arm driver, or may be
connected to an upper end of the arm driver.
1003446732
In the above liquid material ejection device, the rocking mechanism
unit may include a first rocking mechanism unit connected to a lower end
of the arm driver and a second rocking mechanism unit connected to an
upper end of the arm driver.
In the above liquid material ejection device, the rocking mechanism
unit may include a connection portion connected to one end of the arm
driver, and a support portion rockingly supporting the connection portion.
Preferably, the support portion has a convex or concave support surface
that is formed by a smooth curved surface, and the connection portion has
a concave or convex sliding surface that slides along the support surface of
the support portion.
In the above liquid material ejection device, the pressing portion
may be constituted by a pressing member detachably attached to the arm.
The application apparatus according to the present invention
comprises the above-described liquid material ejection device, a worktable
on which an application target is placed, a relatively moving device that
moves the liquid material ejection device and the application target
relatively to each other, and a liquid material supply source that supplies a
liquid material to the liquid material ejection device.
In the above application apparatus, the liquid material ejection
device may be constituted by a plurality of liquid material ejection devices.
Advantageous Effect of Invention
According to the present invention, the liquid material ejection
device can be obtained in which the plunger can be efficiently accelerated,
the center of gravity of the device can be set at a lower level, and
satisfactory maintainability can be obtained. The application apparatus
incorporating the liquid material ejection device can also be obtained.
1003446732
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Brief Description of the Drawings
[Fig. 1] Fig. 1 is a side sectional view of a liquid material
ejection device according to Example 1.
[Fig. 2] Fig. 2 is a schematic perspective view of a rocking
mechanism unit according to Example 1.
[Fig. 3] Fig. 3 is a side sectional view of the liquid material
ejection device (in an ascended position) according to Example 1.
[Fig. 4] Fig. 4 is a side sectional view of the liquid material
ejection device (in a descended position) according to Example 1.
[Fig. 5] Fig. 5 is a perspective view of an application apparatus
incorporating the liquid material ejection device according to Example 1.
[Fig. 6] Fig. 6 is a side sectional view of a liquid material ejection
device according to Example 2.
[Fig. 7] Fig. 7 is a side sectional view of a liquid material ejection
device according to Example 3.
[Fig. 8] Fig. 8 is a side sectional view of a liquid material ejection
device according to Example 4.
[Fig. 9] Fig. 9 is a schematic perspective view of a rocking
mechanism unit according to Example 5.
Description of Embodiments
The present invention is concerned with a liquid material ejection
device for accurately ejecting a minute amount of liquid material ranging
from the type having low viscosity, such as water, a solvent, or a reagent,
to the type having high viscosity, such as a solder paste, a silver paste, or
an adhesive. Exemplary embodiments of the present invention will be
described below.
Example 1
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<Constitution>
Fig. 1 is a side sectional view of a liquid material ejection device 1
according to Example 1.
The liquid material ejection device 1 according to Example 1
represents a jet-type ejection device including, as main components, a
base member 10, an arm driver 20, an arm 30, a plunger 50, a liquid feed
member 60, and a nozzle unit 70, and ejecting a liquid material in the form
of a flying droplet.
For convenience of explanation, the side closer to the nozzle unit 70
is called the “lower side ”, the side closer to the arm 30 is called the “upper
side ”, the side closer to the nozzle unit 70 (right side in Fig. 1) is called the
“front side ”, and the side closer to the arm driver 20 (left side in Fig. 1) is
called the “rear side ” in some cases.
The base member 10 is a block-like member having an upper
surface 11 where the rocking mechanism unit 25 is disposed, and a bottom
surface 12 to which the nozzle unit 70 is mounted.
A most part of the upper surface 11 is a horizontal flat surface. A
recess 13 in which the rocking mechanism unit 25 is disposed, and an
upper opening of a plunger insertion hole 14 are formed in the upper
surface 11. A pair of support portions 27 constituting the rocking
mechanism unit 25 is disposed in the recess 13. Details of the rocking
mechanism unit 25 will be described in detail later.
It is to be noted that the recess 13 and the plunger insertion hole 14
are not always required to be formed in the same member. Thus, the
base member 10 may be constituted by a plurality of members.
The arm driver 20 is constituted by a first actuator 21 and a
second actuator 22, which are disposed side by side in a longitudinal
- -
direction of the arm 30. The first actuator 21 and the second actuator 22
are formed of two piezoelectric elements (piezo elements) that have the
same specifications, and that are extended and contracted in a lamination
direction (up-down direction in Fig. 1) upon application of voltage. The
actuators (21, 22) in this Example are each a bar-shaped multilayered
element that is constituted, for example, by laminating a piezoelectric
ceramic material having a high distortion rate, an inner electrode, an outer
electrode, and an insulator. Each actuator has a thickness of about 5 to
100 mm, for example, and a displacement amount of about 5 to 100 m,
for example, in a thickness direction. Although two actuators are used in
this Example, the number of actuators is not limited to two, and three or
more (preferably, even number) of actuators may be arranged in an
opposing relation. A displacement of the actuator (21, 22) is transmitted
to the plunger 50 after being magnified 3 to 100 times (preferably 5 to 50
times), for example, through the arm 30.
Fig. 2 is a schematic perspective view of the rocking mechanism
unit 25 according to Example 1.
The rocking mechanism unit 25 includes connection portions (26,
26) joined to lower ends of the actuators (21, 22) in a one-to-one relation,
and the support portions (27, 27) disposed in the recess 13 of the base
member 10.
The two connection portions 26 are members each having, in its
lower surface, a recess defined by a smooth curved surface (i.e., a
semispherical dent), and are disposed side by side in a longitudinal
direction of the base member 10.
Each support portion 27 in this Example is constituted by a
pillar-like member that is fixedly supported in a state inserted into a
- -
through-hole formed to extend from one lateral surface to the other lateral
surface of the base member 10. An upper surface of the support portion
27 is formed by a smooth curved surface (i.e., a semispherical projection)
having a curvature equal to or smaller than that of the recess of the
connection portion 26. Unlike this Example, the connection portion 26
may include the projection, and the support portion 27 may include the
recess.
In the rocking mechanism unit 25, the connection portions 26 are
caused to slide and move in the longitudinal direction of the arm 30,
whereby the arm driver 20 and the arm 30 can be inclined relative to the
base member 10. Furthermore, because shearing deformations of the
actuators (21, 22) can be absorbed by the rocking mechanism unit 25, it is
possible to stabilize rocking motion of the arm 30, and to increase ejection
accuracy.
The arm 30 is an elongate member extending in a substantially
horizontal direction (including the case in which an angle relative to a
horizontal plane is not more than 30 degrees). The arm 30 is tightly
supported to the base member 10 directly or indirectly using fasteners (not
illustrated) such that a flat bottom surface 32 is parallel to the upper
surface 11 of the base member 10. The arm 30 is made of a less-flexible
hard material, such as a metal, and it serves to transmit driving force of
the arm driver 20 to the plunger 50 directly. Because the arm 30 is apart
from the base member 10 only by a distance corresponding to the height
of the arm driver 20, the center of gravity of the ejection device 1 can be
positioned at a lower level.
The arm 30 has a length larger than at least a distance by which the
arm driver 20 is caused to extend, and functions as a displacement
- -
magnifying mechanism for magnifying displacement amounts of the
actuators (21, 22). A stroke can also be dynamically adjusted by
controlling the displacement amounts of the actuators (21, 22) and making
the arm 30 inclined at a desired angle relative to the base member 10.
A through-hole is formed in a front portion of the arm 30, and an
arm rod 33 constituting a pressing member is inserted into the
through-hole to be tightly supported there. A pressing portion 34 having
a projected shape is formed at a lower end of the arm rod 33. The arm
rod 33 is detachably fixed to the arm 30, and can be easily replaced with
another one. A contact position and a contact angle of the pressing
portion 34 relative to a rear end portion 53 of the plunger vary depending
on a vertical position of the pressing portion 34. Therefore, the pressing
portion 34 is preferably constituted such that a surface of the pressing
portion 34 opposing to the rear end portion 53 has a shape (such as a
semispherical or semi-ellipsoidal shape) providing a curved surface. The
pressing member is not always required to be a rod-like member, and it
may be, for example, a block-like member including a projected portion
that is formed at its lower end and is detachably fixed to the arm 30.
The arm 30 performs rocking motion with a point near the arm
driver 20 serving as a fulcrum, and the pressing portion 34 comes into
contact with the rear end portion 53 of the plunger, thereby causing the
plunger 50 to move forward at high speed. Because the arm rod 33 and
the plunger 50 are constituted by separable different members as
described above, the number of components of the displacement
magnifying mechanism can be reduced, and the center of gravity of the
ejection device 1 can be positioned at a lower level.
The plunger 50 includes a rod portion 51 that is constituted by a
- -
rod-like member extending straightforward in the vertical direction, a tip
portion 52 having a semi-ellipsoidal shape, and a rear end portion 53 that
is constituted by a disk-shaped member having a larger diameter than the
rod portion 51. The plunger 50 is made of, for example, a metal material,
a ceramic material, or a resin material having high corrosion resistance.
The rod portion 51 of the plunger is inserted through not only an
elastic member 54 constituted by a compressed coil spring, but also a
ring-shaped guide 41 and a ring-shaped sealing member 42 both disposed
in the plunger insertion hole 14. Although the arm 30 is rockingly moved
along an arc-shaped locus and comes into contact with the rear end
portion 53 of the plunger, an operation direction of the plunger 50 is
restricted to become linear with the aid of the guide 41. The guide 41
may be constituted by a plurality of members arranged in the form of a
ring.
The tip portion 52 of the plunger is arranged in a liquid chamber
74 having a larger diameter than the rod portion 51, and is reciprocated
without contacting an inner peripheral surface of the liquid chamber 74.
Thus, the tip portion 52 of the plunger can be moved at high speed
because it is reciprocated without causing sliding friction. The tip portion
52 of the plunger may have any suitable shape. For example, a flat shape,
a spherical shape, or a shape having a boss formed at a tip end is disclosed
herein as the shape of the tip portion 52.
The rear end portion 53 of the plunger has a larger diameter than
the elastic member 54 and is always urged upward by the elastic member
54. The rear end portion 53 of the plunger is positioned to face the
pressing portion 34 of the arm, and it constitutes a contact portion that is
held in contact with the pressing portion 34. When the pressing portion
- -
34 of the arm pushes the rear end portion 53 downward by pressure in
excess of urging force of the elastic member 54, inertial force is applied to
the liquid material positioned forward of the tip portion 52 of the plunger
50, and a smaller amount of the liquid material than a volume displaced by
the tip portion 52 is ejected in the form of a droplet. When the pressing
portion 34 of the arm is ascended, the plunger 50 is also ascended by the
urging force of the elastic member 54, and a maximum ascended position
(i.e., a stroke) is specified by the pressing portion 34 of the arm.
Since the rear end portion 53 of the plunger is not coupled to the
pressing portion 34, the plunger 50 can be easily removed from the
plunger insertion hole 14. In other words, it is possible to easily perform
an operation of replacing the plunger 50 that is a consumable component.
While, in this Example, the forward movement of the plunger 50 is
stopped by seating the tip portion 52 of the plunger against a valve seat 72
that is constituted by an inner bottom surface of the liquid chamber 74,
another example in which the tip portion 52 is not seated against the valve
seat is also included in the technical concept of the present invention.
The liquid feed member 60 is a member extending in the
horizontal direction along the base member 10, and is detachably attached
to the lower surface 12 of the base member. A supply passage 61 is
formed inside the liquid feed member 60. One end of the supply passage
61 is communicated with the liquid chamber 74, and the other end of the
supply passage 61 is communicated with a supply port 62. Since the
liquid chamber 74 is arranged near a front end of the ejection device 1, a
length of the supply passage 61 is shorter than those in other known
ejection devices, and a wasted amount of the liquid material is relatively
small.
- -
A reservoir is connected to the supply port 62 via a liquid feed pipe
(including a tube-like member). The liquid material in the reservoir is
pressurized by compressed gas, and is supplied to the liquid chamber 74
via the supply passage 61. When the liquid material has high fluidity, the
inside of the reservoir is not needed to be pressurized.
The nozzle unit 70 includes a nozzle member 71, the valve seat 72,
and a cap 73.
The nozzle member 71 is a cylindrical member in which the liquid
chamber 74 is formed. The valve seat 72 and the cap 73 are disposed in
a tip portion of the nozzle member 71.
The valve seat 72 is a disk-shaped member having an ejection port
75 that is formed at a center of the valve seat 72 to be opened downward,
and the valve seat 72 is fixed in place by screwing the cap 73 over a tip
portion of the nozzle member 71. Respective center lines of the liquid
chamber 74, the ejection port 75, and the plunger 50 are arranged to lie on
one straight line. With the plunger 50 seating against and departing
away from the valve seat 72, the discharge port 75 is closed and opened,
whereby the liquid material is ejected. The liquid chamber 74 is filled
with the liquid material up to a level near the sealing member 42, and the
liquid material is prevented from coming into the guide 41 with the
presence of the sealing member 42.
The nozzle unit 70 may be provided with a temperature control
mechanism for heating the liquid material in the liquid chamber 74 to a
predetermined temperature.
<Operation>
(1) Neutral Position
Fig. 1 represents a state in which the actuators (21, 22) are in an
- -
inoperative mode and the arm 30 is in a neutral position. In this state,
the tip portion 52 of the plunger rod is in a state not contacting the valve
seat 72, and the ejection port 75 is opened. The rear end portion 53 of
the plunger rod is in a state contacting the pressing portion 34 of the arm
rod by the urging action of the elastic member 54.
In the neutral position, the tip portion 52 and the valve seat 72 may
be contacted with each other unlike the example illustrated in Fig. 1. In
the case of holding the tip portion 52 and the valve seat 72 in the contact
state, the liquid material can be prevented from leaking through the
ejection port.
(2) Ascended Position
Fig. 3 represents a state in which the first actuator 21 is operated
and the arm 30 is in an ascended position.
When the first actuator 21 is supplied with electric power to be
displaced forward (namely, to increase its overall length), the arm rod 33 is
moved upward on the basis of the principle of leverage. The second
actuator 22 is not supplied with electric power and is maintained at the
same position as that in the neutral position. At that time, the connection
portions 26 and 26 of both the actuators are moved over and around the
support portions 27 and 27, respectively, and the first actuator 21 and the
second actuator 22 are inclined rearward (leftward in Fig. 3). Unlike the
above operation, a contraction signal may be applied to the second
actuator 22 such that the second actuator 22 is displaced to contract and a
greater displacement is given to the pressing portion 34 and the plunger
When the arm rod 33 is moved upward, the plunger 50 is also
moved upward by the urging action of the elastic member 54, whereby the
- -
pressing portion 34 of the arm rod and the rear end portion 53 of the
plunger are kept in the contact state. While the arm rod 33 is moving
upward, the pressing portion 34 and the rear end portion 53 of the plunger
are not necessarily kept in the contact state at all times, and they may
come into the contact state after being temporarily brought into a
non-contact state.
When the arm rod 33 is moved upward, the pressing portion 34 is
moved upward along an arc-shaped locus about a center positioned on the
side including the actuators (21, 22). On the other hand, the plunger 50
is moved upward linearly by the action of the guide 41. Thus, when the
arm rod 33 is moved upward, discrepancy occurs in positional relation
between the pressing portion 34 and the rear end portion 53 of the plunger.
To cope with such discrepancy, in this Example, a lower surface of the
pressing portion 34 is constituted by a curved surface, such as a spherical
surface, to ensure the appropriate contact state between the pressing
portion 34 and the rear end portion 53 of the plunger. Unlike the
illustrated example, an upper surface of the rear end portion 53 of the
plunger may be constituted by a curved surface, such as a spherical
surface, and the lower surface of the pressing portion 34 may be
constituted by a flat surface (or a curved surface).
It is also important that the rear end portion 53 of the plunger may
be formed in such a size as allowing the rear end portion 53 to follow the
locus of the pressing portion 34.
(3) Descended Position
Fig. 4 represents a state in which the first actuator 21 is returned to
the neutral position, the second actuator 22 is operated, and the arm 30 is
in a descended position.
- -
When the supply of electric power to the first actuator 21 is stopped
and the second actuator 22 is supplied with electric power to be displaced
forward (namely, to increase its overall length), the arm rod 33 is moved
downward on the basis of the principle of leverage. At that time, the
connection portions 26 and 26 of both the actuators are moved over and
around the support portions 27 and 27, respectively, and the first actuator
21 and the second actuator 22 are inclined forward (rightward in Fig. 4).
Unlike the above operation, a contraction signal may be applied to the first
actuator 21 such that the first actuator 21 is displaced to contract and a
greater displacement is given to the pressing portion 34 and the plunger
When the arm rod 33 is moved downward, the pressing portion 34
of the arm presses the rear end portion 53 of the plunger by force in
excess of the urging force of the elastic member 54. Accordingly, the
plunger 50 is moved downward and the tip portion 52 is seated against the
valve seat 72, thereby causing the liquid material to be ejected in the form
of a droplet through the ejection port 75. While the arm rod 33 is moving
downward, the pressing portion 34 and the rear end portion 53 of the
plunger are not necessarily kept in the contact state at all times, and they
may come into the contact state after being temporarily brought into a
non-contact state.
As in the case of above (2), the arm rod 33 is moved downward
along an arc-shaped locus, and the plunger 50 is moved downward linearly
by the action of the guide 41.
By repeating the above-described operations, the actuators (21,
22) are rockingly moved to the right and the left in a continuous way, and
the plunger 50 is reciprocated at a frequency of, for example, 100 to 500
- -
times or more per second. From the viewpoint of increasing ejection
accuracy, the oscillation frequency of a pulse signal applied to the
actuators (21, 22) is preferably kept constant.
<Application Apparatus>
As illustrated in Fig. 5, the liquid material ejection device 1
accommodated in a casing and connected to a reservoir (syringe) is
mounted to an application head of an application apparatus 100, and is
used in work for applying the liquid material onto a workpiece while the
application head (ejection device 1) and a worktable 103 are moved
relatively to each other using XYZ-axis drivers (111, 112, 113). The
illustrated application apparatus 100 includes a bench 101, the worktable
103 on which a workpiece 102, i.e., an application target, is placed, an
X-axis driver 111 for relatively moving the liquid material ejection device 1
and the worktable 103 in an X direction 121, a Y-axis driver 112 for
relatively moving the liquid material ejection device 1 and the worktable
103 in a Y direction 122, a Z-axis driver 113 for relatively moving the liquid
material ejection device 1 and the worktable 103 in a Z direction 123, a
not-illustrated dispense controller (ejection control unit) for supplying
compressed gas from a compressed gas source (not illustrated) to the
reservoir under desired conditions, and an application operation control
unit 104 for controlling operations of the XYZ-axis drivers (111, 112, 113).
In the application apparatus 100, as denoted by dotted lines, a space
above the bench is preferably covered with a cover to prevent particles and
dust from reaching the workpiece 102.
The XYZ-axis drivers (111, 112, 113) include, for example, known
XYZ-axis servo motors and ball screws, and are able to move the ejection
port of the liquid material ejection device 1 to an any desired position of
- -
the workpiece at any desired speed. While Fig. 5 illustrates the case in
which the three liquid material ejection devices 1 are incorporated in the
application apparatus, the number of liquid material ejection devices to be
incorporated is not limited to three, the liquid material ejection device 1
may be incorporated singularly or in another plural number such as 2, 4 or
more. Furthermore, while Fig. 5 illustrates the case in which the three
liquid material ejection devices 1 are mounted to one Z-axis driver 113, the
Z-axis driver may be disposed in the same number (three in the example
illustrated in Fig. 5) such that the individual liquid material ejection devices
1 can be moved in the Z direction (and the X direction) independently of
one another.
With the liquid material ejection device 1 according to Example 1
described above, since the center of gravity of the ejection device 1 is
positioned at a lower level to be able to suppress wobbling and vibration of
the application head, the application head can be moved at higher speed.
Moreover, since the driving force generated by the arm driver 20 is directly
transmitted to the plunger 50 through the arm 30 made of a hard material,
stroke reproducibility is high, and the liquid material having high viscosity
can also be ejected.
Example 2
A liquid material ejection device 1 according to Example 2 is a
jet-type ejection device for ejecting the liquid material in the form of a
flying droplet as in Example 1. In the following, different points from
Example 1 will be primarily described, and description of the same
constitution is omitted.
Fig. 6 is a side sectional view of the liquid material ejection device
1 according to Example 2.
- -
In this Example, the arm 30 is tightly supported to the base member
by inserting a fastener 35, which includes a disk-like member formed at
its back end, into a through-hole (not illustrated) formed in a rear portion
of the arm 30. The fastener 35 has a length set to support the arm 30 in
a state appropriately pressing the arm driver 20. In other words, the first
actuator 21 and the second actuator 22 are tightly sandwiched between
the arm 30 and the base member 10.
A pair of support portions 27 is formed on a bottom surface of the
recess 13 in the base member. Thus, in this Example, the pair of support
portions 27 is formed integrally with the base member 10. A threaded
hole (not illustrated) used for fixing the fastener 35 is formed between the
pair of support portions 27. The fastener 35 having a rod-like shape is
provided with a threaded groove formed in its tip portion, and is fixedly
screwed into the threaded hole in the recess 13. The fastener 35 is
detachably fixed to the threaded hole in the recess 13 such that it can be
easily replaced when the lifetime of the arm driver 20 has expired.
The liquid feed member 60 is a member having a substantially
L-like shape when viewed from side, and includes a joint 65 having a
supply port 62 formed at its upper end. A reservoir (syringe) storing the
liquid material is connected to the joint 65 directly or via a liquid feed pipe
(including a tube-like member).
A supply passage 61, an inflow passage 63, and an air purging
passage 64 are formed in the liquid feed member 60. When the liquid
material is initially supplied through the joint 65, air remaining in the
individual passages is discharged from an opening formed at an end of the
air purging passage 64. After the remaining air has been discharged, the
liquid feed member 60 is used in a state in which the air purging passage
- -
61 is closed by a closing plug 66. Since the individual components (61 to
65) of the liquid feed member 60 are arranged to lie on a straight line, the
ejection device 1 can be constituted in a slim width (in a direction
perpendicular to the drawing sheet of Fig. 6).
The operation of the liquid material ejection device 1 according to
this Example is similar to that in Example 1.
Similar operational effects to those in Example 1 can also be
realized with the above-described liquid material ejection device 1
according to Example 2.
Example 3
A liquid material ejection device 1 according to Example 3 is a
jet-type ejection device for ejecting the liquid material in the form of a
flying droplet as in Example 1. In the following, different points from
Example 1 will be primarily described, and description of the same
constitution is omitted.
Fig. 7 is a side sectional view of the liquid material ejection device
1 according to Example 3.
The liquid material ejection device 1 according to Example 3 is
different from Example 1 in that a rocking mechanism unit 125 is disposed
at upper ends of the actuators (21, 22). In other words, the rocking
mechanism unit 125 is arranged between the actuators (21, 22) and the
arm 30.
Connection portions 126 and 126 and support portions 127 and 127
constituting the rocking mechanism unit 125 are similar to the connection
portions 26 and the support portions 27 in Example 1 except for positions
where those portions are arranged. As in Example 1, each connection
portion 126 is a member including a recess formed in its upper surface and
- -
defined by a curved surface, and is reciprocated while sliding along a lower
surface of the support portion 127 opposing to the relevant connection
portion 126.
While, in this Example, the rocking mechanism unit 125 is
disposed only at the upper ends of the actuators (21, 22), the rocking
mechanism unit 25 in Example 1 may be additionally disposed at the lower
ends of the actuators (21, 22). In other words, the rocking mechanism
unit may be disposed at each of the upper and lower ends of the actuators
(21, 22). With such a constitution, shearing deformations of the
actuators (21, 22) can be more reliably absorbed by the two rocking
mechanism units.
The operation of the liquid material ejection device 1 according to
this Example is similar to that in Example 1.
Similar operational effects to those in Example 1 can also be
realized with the above-described liquid material ejection device 1
according to Example 3.
Example 4
A liquid material ejection device 1 according to Example 4 is a
jet-type ejection device for ejecting the liquid material in the form of a
flying droplet as in Example 2 (Fig. 6). In the following, different points
from Example 2 will be primarily described, and description of the same
constitution is omitted.
Fig. 8 is a side sectional view of the liquid material ejection device
1 according to Example 4.
The liquid material ejection device 1 according to Example 4 is
different from Example 2 in that the arm rod 33 is provided. The other
constitution is similar to that in Example 2.
- -
Similar operational effects to those in Example 2 can also be
realized with the above-described liquid material ejection device 1
according to Example 4.
Example 5
A liquid material ejection device 1 according to Example 5 is a
jet-type ejection device for ejecting the liquid material in the form of a
flying droplet as in Example 1. In the following, different points from
Example 1 will be primarily described, and description of the same
constitution is omitted.
Fig. 9 is a schematic perspective view of a rocking mechanism
unit 225 according to Example 5.
The liquid material ejection device 1 according to Example 5 is
different from Example 1 in that the rocking mechanism unit 225 is
constituted by four connection portions 226 and four support portions 227.
The other constitution is similar to that in Example 1.
The four connection portions 226 are each a member including a
recess (i.e., a semispherical dent) formed in its lower surface and defined
by a smooth curved surface, and are arranged in a matrix pattern of 2 2.
The actuators (21, 22) are each arranged in a state straddling the two
connection portions 226 that are arranged side by side in a direction
perpendicular to the longitudinal direction of the arm 30. Unlike the
above arrangement, four actuators may be disposed in a one-to-one
relation to the four connection portions 226. Alternatively, one among
the three actuators may be disposed in a state straddling the two
connection portions 226, and the other two actuators may be disposed in a
one-to-one relation to the two connection portions 226.
An upper surface of each support portion 227 is formed by a smooth
- -
curved surface (e.g., a surface of a semispherical boss) having the same
curvature as that of the recess in the connection portion 226.
With the rocking mechanism unit 225, the connection portions
226 are caused to slide and move in the longitudinal direction of the arm
, thus enabling the arm driver 20 and the arm 30 to be inclined relative
to the base member 10 (i.e., to be moved in directions denoted by two
arrows in Fig. 9). Furthermore, since an upper surface of the connection
portion 226 has a larger area, an actuator having a larger size than that in
Example 1 can be mounted.
Similar operational effects to those in Example 1 can also be
realized with the above-described liquid material ejection device 1
according to Example 5.
List of Reference Signs
1: liquid material ejection device, 10: base member, 11: upper
surface (of base member), 12: bottom surface (of base member), 13:
recess, 14: plunger insertion hole, 20: arm driver, 21: first actuator, 22:
second actuator, 25: rocking mechanism unit, 26: connection portion, 27:
support portion, 30: arm, 31: upper surface (of arm), 32: bottom surface
(of arm), 33: arm rod (pressing member), 34: pressing portion, 35:
fastener, 41: guide, 42: sealing member, 50: plunger, 51: rod portion (of
plunger), 52: tip portion (of plunger), 53: rear end (contact portion) (of
plunger), 54: elastic member, 60: liquid feed member, 61: supply passage,
62: supply port, 63: inflow passage, 64: air purging passage, 65: joint, 66:
closing plug, 70: nozzle unit, 71: nozzle member, 72: valve seat, 73: cap,
74: liquid chamber 75: ejection port, 100: application apparatus, 101:
bench, 102: workpiece, 103: worktable, 104: application operation control
unit, 111: X-axis driver, 112: Y-axis driver, 113: Z-axis driver, 121: X
- -
direction, 122: Y direction, 123: Z direction, 125: rocking mechanism unit,
126: connection portion, 127: support portion, 225: rocking mechanism
unit, 226: connection portion, 227: support portion
Claims (25)
- [Claim 1] A liquid material ejection device comprising: a liquid chamber communicating with an ejection port and being supplied with a liquid material; a plunger including a tip portion that has a smaller diameter than the liquid chamber and is moved back and forth in the liquid chamber; an elastic member urging the plunger upward; an arm disposed in a state extending in a substantially horizontal direction; an arm driver serving as a driving source to operate the arm; and a base member on which the arm driver is disposed, wherein the liquid material ejection device further comprises a rocking mechanism unit connected to the arm driver and rockingly supporting the arm, the arm driver includes a plurality of actuators disposed in a juxtaposed relation in a longitudinal direction of the arm, each of the actuators being extended and contracted in a direction perpendicular to the longitudinal direction of the arm, the arm includes a pressing portion pressing the plunger downward, the plunger includes a contact portion pressed by the pressing portion, and the plunger is linearly reciprocated with rocking motion of the arm.
- [Claim 2] The liquid material ejection device according to claim 1, wherein the plurality of actuators are each constituted by a multilayered piezoelectric element, the arm is moved upward when the actuator disposed on the side 1003446732 nearer to the pressing portion is brought into an extended state and the actuator disposed on the side farther away from the pressing portion is kept in a non-extended state or brought into a contracted state, and the arm is moved downward when the actuator disposed on the side nearer to the pressing portion is kept in the non-extended state or brought into the contracted state and the actuator disposed on the side farther away from the pressing portion is brought into the extended state.
- [Claim 3] The liquid material ejection device according to claim 2, wherein the plurality of actuators are constituted by an even number of actuators.
- [Claim 4] The liquid material ejection device according to claim 3, wherein the even number of actuators are constituted by a first piezoelectric actuator and a second piezoelectric actuator.
- [Claim 5] The liquid material ejection device according to any one of claims 1 to 4, wherein the pressing portion or the contact portion has a curved surface allowing a contact state between the pressing portion and the contact portion to be maintained following the rocking motion of the arm.
- [Claim 6] The liquid material ejection device according to any one of claims 1 to 5, further comprising a fastener detachably supporting the arm to the base member.
- [Claim 7] The liquid material ejection device according to claim 6, wherein the fastener is disposed between the plurality of actuators, and the plurality of actuators are tightly sandwiched between the arm and the base member by the fastener.
- [Claim 8] The liquid material ejection device according to any one of claims 1 to 7, further comprising a guide supporting the plunger movably 1003446732 in a vertical direction, wherein the elastic member is a compressed coil spring urging the plunger upward at all times, and the plunger is detachably inserted through the elastic member and the guide.
- [Claim 9] The liquid material ejection device according to any one of claims 1 to 8, wherein the rocking mechanism unit is connected to a lower end of the arm driver, or connected to an upper end of the arm driver.
- [Claim 10] The liquid material ejection device according to any one of claims 1 to 8, wherein the rocking mechanism unit includes a first rocking mechanism unit connected to a lower end of the arm driver and a second rocking mechanism unit connected to an upper end of the arm driver.
- [Claim 11] The liquid material ejection device according to claim 9 or 10, wherein the rocking mechanism unit includes a connection portion connected to one end of the arm driver, and a support portion rockingly supporting the connection portion.
- [Claim 12] The liquid material ejection device according to claim 11, wherein the support portion has a convex or concave support surface that is formed by a smooth curved surface, and the connection portion has a concave or convex sliding surface that slides along the support surface of the support portion.
- [Claim 13] The liquid material ejection device according to any one of claims 1 to 12, wherein the pressing portion is constituted by a pressing member detachably attached to the arm.
- [Claim 14] The liquid material ejection device according to any one of claims 1 to 13, wherein the plurality of actuators are all arranged under 1003446732 the arm.
- [Claim 15] The liquid material ejection device according to any one of claims 1 to 14, wherein the plunger and the pressing portion are not coupled to each other.
- [Claim 16] The liquid material ejection device according to any one of claims 1 to 15, wherein the contact portion is not coupled to the pressing portion.
- [Claim 17] The liquid material ejection device according to any one of claims 1 to 15, wherein the contact portion of the plunger and the pressing portion are not interlocked with each other.
- [Claim 18] The liquid material ejection device according to claim 17, wherein the pressing portion or the contact portion has a protruding curved surface which faces and contacts an end surface of the contact portion or the pressing portion to allow a contact state between the pressing portion and the contact portion to be maintained following the rocking motion of the arm.
- [Claim 19] The liquid material ejection device according to any one of claims 16 to 18, wherein the plunger and the arm are constituted by separable different members.
- [Claim 20] The liquid material ejection device according to any one of claims 1 to 8, wherein the arm driver is disposed between the arm and the base member, and the rocking mechanism unit is disposed between the arm driver and the base member.
- [Claim 21] The liquid material ejection device according to any one of claims 1 to 3, further comprising a fastener rockingly supporting the arm to the base member, wherein the plurality of actuators comprises first and second actuators, and 1003446732 wherein the rocking mechanism unit includes a first connection portion connected to one end of the first actuator, a second connection portion connected to one end of the second actuator, a first support portion rockingly supporting the first connection portion and a second support portion rockingly supporting the second connection portion.
- [Claim 22] The liquid material ejection device according to claim 21, wherein the fastener is a rod-like shaped and disposed in a state extending in a longitudinal direction of the first and second actuators.
- [Claim 23] The liquid material ejection device according to any one of claims 1 to 22, wherein the arm presses the plunger downward but does not press the plunger upward.
- [Claim 24] An application apparatus comprising the liquid material ejection device according to any one of claims 1 to 23, a worktable on which an application target is placed, a relatively moving device that moves the liquid material ejection device and the application target relatively to each other; and a liquid material supply source that supplies a liquid material to the liquid material ejection device.
- [Claim 25] The application apparatus according to claim 24, wherein the liquid material ejection device is constituted by a plurality of liquid material ejection devices. 1003446732 - -
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016-006701 | 2016-01-16 | ||
JP2016006701 | 2016-01-16 | ||
PCT/JP2017/000639 WO2017122683A1 (en) | 2016-01-16 | 2017-01-11 | Liquid material ejection device |
Publications (2)
Publication Number | Publication Date |
---|---|
NZ744149A NZ744149A (en) | 2021-04-30 |
NZ744149B2 true NZ744149B2 (en) | 2021-08-03 |
Family
ID=
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