NO20063222L - Skivemagasin for halvlederskiver eller skiveliknende gjenstander - Google Patents

Skivemagasin for halvlederskiver eller skiveliknende gjenstander

Info

Publication number
NO20063222L
NO20063222L NO20063222A NO20063222A NO20063222L NO 20063222 L NO20063222 L NO 20063222L NO 20063222 A NO20063222 A NO 20063222A NO 20063222 A NO20063222 A NO 20063222A NO 20063222 L NO20063222 L NO 20063222L
Authority
NO
Norway
Prior art keywords
base plate
disc
guide means
base
disc tray
Prior art date
Application number
NO20063222A
Other languages
English (en)
Inventor
Heiko Killer
Original Assignee
Q Cells Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Q Cells Ag filed Critical Q Cells Ag
Publication of NO20063222L publication Critical patent/NO20063222L/no

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Packaging For Recording Disks (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

Oppfinnelsen angår et skivemagasin for halvlederskiver eller skivelignende gjenstander. Skivemagasinet omfatter et grunnlegeme (1) som hviler på en grunnflate, mange begrensningsstrukturer (10) som er fastlagt på grunnlegemet (1) og forløper på tvers av grunnflaten, og en grunnplate (2) som hviler på grunnplaten (1) mellom begrensningsstrukturene (10) og som lar seg bevege langs begrensningsstrukturene (10) i en fremføringsretning (V) orientert i det vesentlige vinkelrett på grunnflaten. Ifølge oppfinnelsen er det sørget for at flere begrensningsstrukturer (10) omfatter en innerside (11) som vender mot grunnflaten (2) og en føringsinnretning (100) med et føringsmiddel (101) som i det minste strekker seg på innersiden (11) av begrensningsstrukturen, idet føringsmidlet (101) er utformet fleksibelt på tvers av fremføringsretningen (V). En andre variant forutser at føringsmidlet (101) og grunnplaten (2) virker slik sammen at bevegelsen av grunnplaten langs fremføringsretningen (V) bevirker en i det vesentlige like rask bevegelse av føringsmidlet (101) og i det vesentlige orientert langs fremføringsretningen (V). På denne måten kan den mekaniske belastningen på kantområdene til skivene i skivemagasinet ved en bevegelse av grunnplaten bli betydelig redusert hhv. bli helt unngått.
NO20063222A 2005-07-12 2006-07-11 Skivemagasin for halvlederskiver eller skiveliknende gjenstander NO20063222L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200510033859 DE102005033859B3 (de) 2005-07-12 2005-07-12 Wafermagazin für Halbleiterwafer oder waferartige Gegenstände

Publications (1)

Publication Number Publication Date
NO20063222L true NO20063222L (no) 2007-01-15

Family

ID=37401026

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20063222A NO20063222L (no) 2005-07-12 2006-07-11 Skivemagasin for halvlederskiver eller skiveliknende gjenstander

Country Status (3)

Country Link
EP (1) EP1744355B1 (no)
DE (1) DE102005033859B3 (no)
NO (1) NO20063222L (no)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008030629A1 (de) 2008-06-20 2009-12-24 Aci-Ecotec Gmbh & Co. Kg Wafermagazin
DE202009014371U1 (de) 2009-10-23 2011-02-24 Aleo Solar Ag Bauelemente-Magazin und Solarzellen-Positioniervorrichtung
DE102010005202B4 (de) 2010-01-21 2020-04-09 Q-Cells Se Magazin für einen photovoltaischen Wafer- und/oder Zellstapel mit einem Magazineinsatz zur Aufnahme desselben
DE102011013511B4 (de) 2011-03-10 2017-01-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Plattenmagazin und Vorrichtung zum Abseparieren von plattenförmigen Gegenständen
CN116198822A (zh) * 2022-12-27 2023-06-02 沈阳农业大学 一种生物实验室用培养皿批量放置转移装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3915317A (en) * 1974-09-17 1975-10-28 Eastman Kodak Co Apparatus for collecting articles in separate stacks
JPH03106721A (ja) * 1989-09-21 1991-05-07 Mitsubishi Electric Corp 縦型ウエーハ搬送装置
JPH05116832A (ja) 1991-10-25 1993-05-14 Hitachi Electron Eng Co Ltd フレキシブルデイスクスタツク機構
JP3163884B2 (ja) * 1994-02-18 2001-05-08 株式会社ダイフク 荷保管設備
US5950643A (en) * 1995-09-06 1999-09-14 Miyazaki; Takeshiro Wafer processing system
US6427096B1 (en) * 1999-02-12 2002-07-30 Honeywell International Inc. Processing tool interface apparatus for use in manufacturing environment
KR100672634B1 (ko) * 2001-12-19 2007-02-09 엘지.필립스 엘시디 주식회사 액정표시소자의 기판 반송 장치 및 방법
US6886696B2 (en) * 2003-01-15 2005-05-03 Taiwan Semiconductor Manufacturing Co., Ltd Wafer container with removable sidewalls

Also Published As

Publication number Publication date
EP1744355A3 (de) 2008-08-06
EP1744355B1 (de) 2019-08-07
EP1744355A2 (de) 2007-01-17
DE102005033859B3 (de) 2006-12-14

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Legal Events

Date Code Title Description
FC2A Withdrawal, rejection or dismissal of laid open patent application