NL7700025A - PROCEDURE FOR CHECKING SUBSTRATE PLATES AND DEVICE FOR USING THIS PROCEDURE. - Google Patents

PROCEDURE FOR CHECKING SUBSTRATE PLATES AND DEVICE FOR USING THIS PROCEDURE.

Info

Publication number
NL7700025A
NL7700025A NL7700025A NL7700025A NL7700025A NL 7700025 A NL7700025 A NL 7700025A NL 7700025 A NL7700025 A NL 7700025A NL 7700025 A NL7700025 A NL 7700025A NL 7700025 A NL7700025 A NL 7700025A
Authority
NL
Netherlands
Prior art keywords
procedure
substrate plates
checking substrate
checking
plates
Prior art date
Application number
NL7700025A
Other languages
Dutch (nl)
Original Assignee
Alusuisse
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alusuisse filed Critical Alusuisse
Publication of NL7700025A publication Critical patent/NL7700025A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
NL7700025A 1976-01-20 1977-01-04 PROCEDURE FOR CHECKING SUBSTRATE PLATES AND DEVICE FOR USING THIS PROCEDURE. NL7700025A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH62576A CH593478A5 (en) 1976-01-20 1976-01-20

Publications (1)

Publication Number Publication Date
NL7700025A true NL7700025A (en) 1977-07-22

Family

ID=4191366

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7700025A NL7700025A (en) 1976-01-20 1977-01-04 PROCEDURE FOR CHECKING SUBSTRATE PLATES AND DEVICE FOR USING THIS PROCEDURE.

Country Status (5)

Country Link
JP (1) JPS5290266A (en)
CH (1) CH593478A5 (en)
DE (1) DE2606024A1 (en)
FR (1) FR2339167A1 (en)
NL (1) NL7700025A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4456374A (en) * 1981-12-11 1984-06-26 Johnson & Johnson Detecting the presence or absence of a coating on a substrate
DE3422143A1 (en) * 1984-06-14 1985-12-19 Josef Prof. Dr. Bille WAFER INSPECTION DEVICE
US5133019A (en) * 1987-12-03 1992-07-21 Identigrade Systems and methods for illuminating and evaluating surfaces

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1498814A1 (en) * 1963-09-16 1969-04-30 Halbleiterwerk Frankfurt Oder Method for determining the quality of the structure of single crystals by optical registration
US3558814A (en) * 1968-03-08 1971-01-26 Zeiss Stiftung Method and apparatus for plotting a specific area of an object under an observation instrument

Also Published As

Publication number Publication date
JPS5290266A (en) 1977-07-29
DE2606024A1 (en) 1977-07-21
FR2339167A1 (en) 1977-08-19
CH593478A5 (en) 1977-11-30

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Legal Events

Date Code Title Description
BV The patent application has lapsed