NL7310178A - - Google Patents

Info

Publication number
NL7310178A
NL7310178A NL7310178A NL7310178A NL7310178A NL 7310178 A NL7310178 A NL 7310178A NL 7310178 A NL7310178 A NL 7310178A NL 7310178 A NL7310178 A NL 7310178A NL 7310178 A NL7310178 A NL 7310178A
Authority
NL
Netherlands
Application number
NL7310178A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7310178A publication Critical patent/NL7310178A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
NL7310178A 1972-07-21 1973-07-20 NL7310178A (ar)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2236529A DE2236529C3 (de) 1972-07-21 1972-07-21 Drehvorrichtung hoher Genauigkeit für optische Geräte, insbesondere Elektronenmikroskope

Publications (1)

Publication Number Publication Date
NL7310178A true NL7310178A (ar) 1974-01-23

Family

ID=5851663

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7310178A NL7310178A (ar) 1972-07-21 1973-07-20

Country Status (5)

Country Link
US (1) US3899728A (ar)
JP (1) JPS4992974A (ar)
DE (1) DE2236529C3 (ar)
GB (1) GB1445406A (ar)
NL (1) NL7310178A (ar)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4521114A (en) * 1979-05-11 1985-06-04 Tre Semiconductor Equipment Corporation Single lens repeater
JPS59129633A (ja) * 1983-01-08 1984-07-26 Canon Inc ステージ装置
US4983875A (en) * 1988-06-20 1991-01-08 Hitachi, Ltd. Actuator
US5051646A (en) * 1989-04-28 1991-09-24 Digital Instruments, Inc. Method of driving a piezoelectric scanner linearly with time
US5306919A (en) * 1992-09-21 1994-04-26 Digital Instruments, Inc. Positioning device for scanning probe microscopes
US5402049A (en) * 1992-12-18 1995-03-28 Georgia Tech Research Corporation System and method for controlling a variable reluctance spherical motor
US5410232A (en) * 1992-12-18 1995-04-25 Georgia Tech Research Corporation Spherical motor and method
US5481111A (en) * 1994-01-03 1996-01-02 Philips Electronics North America Corporation Electron microscope having a goniometer controlled from the image frame of reference
US5621294A (en) * 1995-11-21 1997-04-15 Universal Instruments Corporation Apparatus and method for force compensation in a variable reluctance motor
WO2016199738A1 (ja) * 2015-06-08 2016-12-15 株式会社ニコン 荷電粒子ビーム露光装置及びデバイス製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2866146A (en) * 1950-09-29 1958-12-23 Aerojet General Co Autopilot steering system
US3429155A (en) * 1966-01-12 1969-02-25 Hines & Ass E W Positioning control system
GB1193297A (en) * 1966-07-01 1970-05-28 Telefunken Patent Device for the Fine Adjustment of Photomasks with respect to Semiconductor Elements
US3501683A (en) * 1967-05-17 1970-03-17 Webb James E Incremental motion drive system
US3684904A (en) * 1969-04-24 1972-08-15 Gennady Vasilievich Galutva Device for precision displacement of a solid body

Also Published As

Publication number Publication date
GB1445406A (en) 1976-08-11
DE2236529B2 (de) 1975-05-22
DE2236529C3 (de) 1976-01-02
DE2236529A1 (de) 1974-01-31
JPS4992974A (ar) 1974-09-04
US3899728A (en) 1975-08-12

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
A85 Still pending on 85-01-01
BV The patent application has lapsed