NL7308955A - - Google Patents

Info

Publication number
NL7308955A
NL7308955A NL7308955A NL7308955A NL7308955A NL 7308955 A NL7308955 A NL 7308955A NL 7308955 A NL7308955 A NL 7308955A NL 7308955 A NL7308955 A NL 7308955A NL 7308955 A NL7308955 A NL 7308955A
Authority
NL
Netherlands
Application number
NL7308955A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7308955A publication Critical patent/NL7308955A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • C23C14/0036Reactive sputtering
    • C23C14/0057Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006Thin film resistors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/43Electric condenser making
    • Y10T29/435Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
NL7308955A 1972-07-03 1973-06-27 NL7308955A (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US26858872A 1972-07-03 1972-07-03

Publications (1)

Publication Number Publication Date
NL7308955A true NL7308955A (it) 1974-01-07

Family

ID=23023639

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7308955A NL7308955A (it) 1972-07-03 1973-06-27

Country Status (5)

Country Link
US (1) US3786323A (it)
BE (1) BE801614A (it)
DE (1) DE2333167A1 (it)
FR (1) FR2191401A1 (it)
NL (1) NL7308955A (it)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2513859C2 (de) * 1975-03-27 1981-11-12 Siemens AG, 1000 Berlin und 8000 München Verfahren zum Herstellen eines Kondensator-Widerstands-Netzwerks
JPS59179152A (ja) * 1983-03-31 1984-10-11 Agency Of Ind Science & Technol アモルファスシリコン半導体薄膜の製造方法
US4464701A (en) * 1983-08-29 1984-08-07 International Business Machines Corporation Process for making high dielectric constant nitride based materials and devices using the same
US6454994B1 (en) 2000-08-28 2002-09-24 Honeywell International Inc. Solids comprising tantalum, strontium and silicon
EP2123789A1 (en) * 2008-05-15 2009-11-25 Eifeler Werkzeuge GmbH A method of producing hard coatings

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR96207E (fr) * 1968-02-08 1972-05-19 Western Electric Co Condensateur en couches minces.

Also Published As

Publication number Publication date
FR2191401A1 (it) 1974-02-01
DE2333167A1 (de) 1974-01-17
US3786323A (en) 1974-01-15
BE801614A (fr) 1973-10-15

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