NL7204543A - - Google Patents
Info
- Publication number
- NL7204543A NL7204543A NL7204543A NL7204543A NL7204543A NL 7204543 A NL7204543 A NL 7204543A NL 7204543 A NL7204543 A NL 7204543A NL 7204543 A NL7204543 A NL 7204543A NL 7204543 A NL7204543 A NL 7204543A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4966—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2
- H01L29/4975—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2 being a silicide layer, e.g. TiSi2
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13234071A | 1971-04-08 | 1971-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7204543A true NL7204543A (xx) | 1972-10-10 |
Family
ID=22453565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7204543A NL7204543A (xx) | 1971-04-08 | 1972-04-05 |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE2216338A1 (xx) |
| NL (1) | NL7204543A (xx) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7510903A (nl) * | 1975-09-17 | 1977-03-21 | Philips Nv | Werkwijze voor het vervaardigen van een halfgelei- derinrichting, en inrichting vervaardigd volgens de werkwijze. |
| US4128670A (en) * | 1977-11-11 | 1978-12-05 | International Business Machines Corporation | Fabrication method for integrated circuits with polysilicon lines having low sheet resistance |
| NL8002609A (nl) * | 1979-06-11 | 1980-12-15 | Gen Electric | Samengestelde geleidende structuur en werkwijze voor het vervaardigen daarvan. |
| JP3264264B2 (ja) * | 1999-03-01 | 2002-03-11 | 日本電気株式会社 | 相補型集積回路とその製造方法 |
| TW569447B (en) * | 2001-03-02 | 2004-01-01 | Nat Inst For Materials Science | Gate |
-
1972
- 1972-04-05 NL NL7204543A patent/NL7204543A/xx unknown
- 1972-04-05 DE DE19722216338 patent/DE2216338A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2216338A1 (de) | 1972-10-12 |