NL6808359A - - Google Patents

Info

Publication number
NL6808359A
NL6808359A NL6808359A NL6808359A NL6808359A NL 6808359 A NL6808359 A NL 6808359A NL 6808359 A NL6808359 A NL 6808359A NL 6808359 A NL6808359 A NL 6808359A NL 6808359 A NL6808359 A NL 6808359A
Authority
NL
Netherlands
Application number
NL6808359A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PL121133A external-priority patent/PL57197B1/pl
Application filed filed Critical
Publication of NL6808359A publication Critical patent/NL6808359A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9505—Wafer internal defects, e.g. microcracks

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
NL6808359A 1967-06-14 1968-06-14 NL6808359A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL121133A PL57197B1 (enrdf_load_stackoverflow) 1967-06-14

Publications (1)

Publication Number Publication Date
NL6808359A true NL6808359A (enrdf_load_stackoverflow) 1968-12-16

Family

ID=19949682

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6808359A NL6808359A (enrdf_load_stackoverflow) 1967-06-14 1968-06-14

Country Status (5)

Country Link
US (1) US3569699A (enrdf_load_stackoverflow)
DE (1) DE1772636A1 (enrdf_load_stackoverflow)
FR (1) FR1579614A (enrdf_load_stackoverflow)
GB (1) GB1198871A (enrdf_load_stackoverflow)
NL (1) NL6808359A (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2713125A (en) * 1952-11-22 1955-07-12 Gen Electric Integrating X-ray goniometer
US2907883A (en) * 1955-04-05 1959-10-06 Gen Electric Translation system
US3434332A (en) * 1965-07-26 1969-03-25 Automation Ind Inc Nondestructive tester

Also Published As

Publication number Publication date
US3569699A (en) 1971-03-09
GB1198871A (en) 1970-07-15
DE1772636A1 (de) 1971-07-22
FR1579614A (enrdf_load_stackoverflow) 1969-08-29

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