NL6808359A - - Google Patents
Info
- Publication number
- NL6808359A NL6808359A NL6808359A NL6808359A NL6808359A NL 6808359 A NL6808359 A NL 6808359A NL 6808359 A NL6808359 A NL 6808359A NL 6808359 A NL6808359 A NL 6808359A NL 6808359 A NL6808359 A NL 6808359A
- Authority
- NL
- Netherlands
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PL121133A PL57197B1 (cg-RX-API-DMAC7.html) | 1967-06-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6808359A true NL6808359A (cg-RX-API-DMAC7.html) | 1968-12-16 |
Family
ID=19949682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6808359A NL6808359A (cg-RX-API-DMAC7.html) | 1967-06-14 | 1968-06-14 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3569699A (cg-RX-API-DMAC7.html) |
| DE (1) | DE1772636A1 (cg-RX-API-DMAC7.html) |
| FR (1) | FR1579614A (cg-RX-API-DMAC7.html) |
| GB (1) | GB1198871A (cg-RX-API-DMAC7.html) |
| NL (1) | NL6808359A (cg-RX-API-DMAC7.html) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2713125A (en) * | 1952-11-22 | 1955-07-12 | Gen Electric | Integrating X-ray goniometer |
| US2907883A (en) * | 1955-04-05 | 1959-10-06 | Gen Electric | Translation system |
| US3434332A (en) * | 1965-07-26 | 1969-03-25 | Automation Ind Inc | Nondestructive tester |
-
1968
- 1968-06-12 GB GB27865/68A patent/GB1198871A/en not_active Expired
- 1968-06-14 US US737203A patent/US3569699A/en not_active Expired - Lifetime
- 1968-06-14 NL NL6808359A patent/NL6808359A/xx unknown
- 1968-06-14 DE DE19681772636 patent/DE1772636A1/de active Pending
- 1968-06-14 FR FR1579614D patent/FR1579614A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1198871A (en) | 1970-07-15 |
| FR1579614A (cg-RX-API-DMAC7.html) | 1969-08-29 |
| US3569699A (en) | 1971-03-09 |
| DE1772636A1 (de) | 1971-07-22 |