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Publication of NL6615531ApublicationCriticalpatent/NL6615531A/xx
H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
H05H1/00—Generating plasma; Handling plasma
H05H1/24—Generating plasma
H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy