NL6610937A - - Google Patents

Info

Publication number
NL6610937A
NL6610937A NL6610937A NL6610937A NL6610937A NL 6610937 A NL6610937 A NL 6610937A NL 6610937 A NL6610937 A NL 6610937A NL 6610937 A NL6610937 A NL 6610937A NL 6610937 A NL6610937 A NL 6610937A
Authority
NL
Netherlands
Application number
NL6610937A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6610937A publication Critical patent/NL6610937A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/243Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
NL6610937A 1965-08-24 1966-08-03 NL6610937A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US48219365A 1965-08-24 1965-08-24

Publications (1)

Publication Number Publication Date
NL6610937A true NL6610937A (en) 1967-02-27

Family

ID=23915090

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6610937A NL6610937A (en) 1965-08-24 1966-08-03

Country Status (4)

Country Link
BE (1) BE685577A (en)
DE (1) DE1521571A1 (en)
GB (1) GB1106576A (en)
NL (1) NL6610937A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3590269C2 (en) * 1984-06-12 1988-01-14 Ki Politekhn I Im 50 Letijavel Evaporator for vacuum deposition of films - has means for forming directed flow of deposition material vapour from crucible up to substrate
SE502727C2 (en) * 1991-10-29 1995-12-18 Applied Vacuum Tech Metal melt crucible and method for its use in vacuum evaporation

Also Published As

Publication number Publication date
GB1106576A (en) 1968-03-20
BE685577A (en) 1967-02-16
DE1521571A1 (en) 1969-09-11

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