NL6605803A - - Google Patents
Info
- Publication number
- NL6605803A NL6605803A NL6605803A NL6605803A NL6605803A NL 6605803 A NL6605803 A NL 6605803A NL 6605803 A NL6605803 A NL 6605803A NL 6605803 A NL6605803 A NL 6605803A NL 6605803 A NL6605803 A NL 6605803A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2605365A JPS494571B1 (it) | 1965-04-30 | 1965-04-30 | |
| JP4472565 | 1965-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6605803A true NL6605803A (it) | 1966-10-31 |
Family
ID=26363790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6605803A NL6605803A (it) | 1965-04-30 | 1966-04-29 |
Country Status (2)
| Country | Link |
|---|---|
| GB (1) | GB1140694A (it) |
| NL (1) | NL6605803A (it) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4760567A (en) * | 1986-08-11 | 1988-07-26 | Electron Beam Memories | Electron beam memory system with ultra-compact, high current density electron gun |
| US6426507B1 (en) * | 1999-11-05 | 2002-07-30 | Energy Sciences, Inc. | Particle beam processing apparatus |
-
1966
- 1966-04-27 GB GB1850766A patent/GB1140694A/en not_active Expired
- 1966-04-29 NL NL6605803A patent/NL6605803A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB1140694A (en) | 1969-01-22 |