NL6603618A - - Google Patents
Info
- Publication number
- NL6603618A NL6603618A NL6603618A NL6603618A NL6603618A NL 6603618 A NL6603618 A NL 6603618A NL 6603618 A NL6603618 A NL 6603618A NL 6603618 A NL6603618 A NL 6603618A NL 6603618 A NL6603618 A NL 6603618A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
- H05H3/02—Molecular or atomic-beam generation, e.g. resonant beam generation
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH404965A CH451094A (fr) | 1965-03-23 | 1965-03-23 | Procédé et appareil pour produire des particules d'un fluide dans un état métastable |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6603618A true NL6603618A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1966-09-26 |
Family
ID=4268854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6603618A NL6603618A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1965-03-23 | 1966-03-18 |
Country Status (6)
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4240007A (en) * | 1979-06-29 | 1980-12-16 | International Business Machines Corporation | Microchannel ion gun |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2992980A (en) * | 1957-05-16 | 1961-07-18 | Exxon Research Engineering Co | Apparatus for radiation promoted processes |
| US3325641A (en) * | 1964-02-17 | 1967-06-13 | George W Jones | Apparatus for treating a thin film of liquid by exposure to radiant energy |
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1965
- 1965-03-23 CH CH404965A patent/CH451094A/fr unknown
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1966
- 1966-03-18 NL NL6603618A patent/NL6603618A/xx unknown
- 1966-03-22 US US536441A patent/US3446959A/en not_active Expired - Lifetime
- 1966-03-23 BE BE678317D patent/BE678317A/xx unknown
- 1966-03-23 DE DE19661539678 patent/DE1539678A1/de active Pending
- 1966-03-23 GB GB12920/66A patent/GB1149021A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CH451094A (fr) | 1968-05-15 |
| GB1149021A (en) | 1969-04-16 |
| US3446959A (en) | 1969-05-27 |
| BE678317A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1966-09-23 |
| DE1539678A1 (de) | 1969-06-26 |