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Publication of NL6600428ApublicationCriticalpatent/NL6600428A/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
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Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Adornments
(AREA)
Sampling And Sample Adjustment
(AREA)
Analysing Materials By The Use Of Radiation
(AREA)