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Publication of NL6600030ApublicationCriticalpatent/NL6600030A/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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Chemical & Material Sciences
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Analytical Chemistry
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Electron Sources, Ion Sources
(AREA)
Investigating Strength Of Materials By Application Of Mechanical Stress
(AREA)
