NL6516978A - - Google Patents
Info
- Publication number
- NL6516978A NL6516978A NL6516978A NL6516978A NL6516978A NL 6516978 A NL6516978 A NL 6516978A NL 6516978 A NL6516978 A NL 6516978A NL 6516978 A NL6516978 A NL 6516978A NL 6516978 A NL6516978 A NL 6516978A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES0095735 | 1965-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6516978A true NL6516978A (zh) | 1966-09-05 |
Family
ID=7519583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6516978A NL6516978A (zh) | 1965-03-02 | 1965-12-27 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3586855A (zh) |
| DE (1) | DE1514408B1 (zh) |
| GB (1) | GB1104614A (zh) |
| NL (1) | NL6516978A (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4024402A (en) * | 1970-09-18 | 1977-05-17 | Siemens Aktiengesellschaft | Specimen cartridge for a particle beam device |
| JPS595179B2 (ja) * | 1979-05-18 | 1984-02-03 | 富士通株式会社 | 真空機器の防振構造 |
| SG74599A1 (en) * | 1997-09-27 | 2000-08-22 | Inst Of Material Res & Enginee | Portable high resolution scanning electron microscope column using permanent magnet electron lenses |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL118005B (zh) * | 1939-01-17 |
-
1965
- 1965-03-02 DE DE19651514408 patent/DE1514408B1/de active Pending
- 1965-12-27 NL NL6516978A patent/NL6516978A/xx unknown
-
1966
- 1966-02-25 US US530055A patent/US3586855A/en not_active Expired - Lifetime
- 1966-03-01 GB GB8835/66A patent/GB1104614A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1104614A (en) | 1968-02-28 |
| US3586855A (en) | 1971-06-22 |
| DE1514408B1 (de) | 1970-01-29 |