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Priority to NL6516537ApriorityCriticalpatent/NL6516537A/xx
Publication of NL6516537ApublicationCriticalpatent/NL6516537A/xx
H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J27/00—Ion beam tubes
H01J27/02—Ion sources; Ion guns
H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources
H—ELECTRICITY
H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams