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Priority to NL6503467ApriorityCriticalpatent/NL6503467A/xx
Publication of NL6503467ApublicationCriticalpatent/NL6503467A/xx
H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01C—RESISTORS
H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques