NL6410713A - - Google Patents
Info
- Publication number
- NL6410713A NL6410713A NL6410713A NL6410713A NL6410713A NL 6410713 A NL6410713 A NL 6410713A NL 6410713 A NL6410713 A NL 6410713A NL 6410713 A NL6410713 A NL 6410713A NL 6410713 A NL6410713 A NL 6410713A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/15—External mechanical adjustment of electron or ion optical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/285—Emission microscopes, e.g. field-emission microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/295—Electron or ion diffraction tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1148963A CH409167A (de) | 1963-09-18 | 1963-09-18 | Vorrichtung zur elektronenoptischen Untersuchung von Objektoberflächen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6410713A true NL6410713A (de) | 1965-03-19 |
Family
ID=4373983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6410713A NL6410713A (de) | 1963-09-18 | 1964-09-15 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3363098A (de) |
| CH (1) | CH409167A (de) |
| DE (1) | DE1439723C3 (de) |
| GB (1) | GB1031028A (de) |
| NL (1) | NL6410713A (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH455959A (de) * | 1965-11-25 | 1968-05-15 | Balzers Patent Beteilig Ag | Elektronenemissionsmikroskop |
| DE2514266C2 (de) * | 1975-03-27 | 1977-04-28 | Siemens Ag | Korpuskularstrahloptisches geraet mit zwei in strahlrichtung aufeinanderfolgenden teilraeumen unterschiedlicher druecke |
| JPH01110204A (ja) * | 1987-10-23 | 1989-04-26 | Jeol Ltd | 電子顕微鏡用走査トンネル顕微鏡 |
| JP4262158B2 (ja) * | 2004-07-13 | 2009-05-13 | 株式会社日立ハイテクサイエンスシステムズ | 低真空走査電子顕微鏡 |
| CN107481914B (zh) * | 2016-06-08 | 2023-06-06 | 清华大学 | 一种透射型低能量电子显微系统 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2281325A (en) * | 1941-08-20 | 1942-04-28 | Gen Electric | Electron microscope |
| CH394629A (de) * | 1961-03-20 | 1965-06-30 | Trueb Taeuber & Co Ag | Verfahren und Vorrichtung zur Aufnahme und Eichung von Elektronenbeugungsdiagrammen |
-
1963
- 1963-09-18 CH CH1148963A patent/CH409167A/de unknown
-
1964
- 1964-09-08 GB GB36713/64A patent/GB1031028A/en not_active Expired
- 1964-09-09 US US395222A patent/US3363098A/en not_active Expired - Lifetime
- 1964-09-09 DE DE1439723A patent/DE1439723C3/de not_active Expired
- 1964-09-15 NL NL6410713A patent/NL6410713A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB1031028A (en) | 1966-05-25 |
| US3363098A (en) | 1968-01-09 |
| DE1439723A1 (de) | 1969-03-20 |
| DE1439723C3 (de) | 1973-10-04 |
| DE1439723B2 (de) | 1973-03-15 |
| CH409167A (de) | 1966-03-15 |