NL59600C - - Google Patents
Info
- Publication number
- NL59600C NL59600C NL59600DA NL59600C NL 59600 C NL59600 C NL 59600C NL 59600D A NL59600D A NL 59600DA NL 59600 C NL59600 C NL 59600C
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/82—Mounting, supporting, spacing, or insulating electron-optical or ion-optical arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2359290X | 1939-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL59600C true NL59600C (mo) |
Family
ID=7995474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL59600D NL59600C (mo) | 1939-08-05 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US2359290A (mo) |
| NL (1) | NL59600C (mo) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2916621A (en) * | 1958-04-24 | 1959-12-08 | California Inst Res Found | Electron probe microanalyzer |
| US8987679B2 (en) | 2009-10-09 | 2015-03-24 | Mapper Lithography Ip B.V. | Enhanced integrity projection lens assembly |
| US8362441B2 (en) | 2009-10-09 | 2013-01-29 | Mapper Lithography Ip B.V. | Enhanced integrity projection lens assembly |
-
0
- NL NL59600D patent/NL59600C/xx active
-
1940
- 1940-09-11 US US356260A patent/US2359290A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US2359290A (en) | 1944-10-03 |