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Publication of NL302761ApublicationCriticalpatent/NL302761A/xx
C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
C30B31/10—Reaction chambers; Selection of materials therefor
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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Engineering & Computer Science
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Chemical & Material Sciences
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Manufacturing & Machinery
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Crystallography & Structural Chemistry
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Physics & Mathematics
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Computer Hardware Design
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Microelectronics & Electronic Packaging
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Power Engineering
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Condensed Matter Physics & Semiconductors
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General Physics & Mathematics
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Materials Engineering
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Metallurgy
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Organic Chemistry
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Crystals, And After-Treatments Of Crystals
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Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed
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