NL294272A - - Google Patents

Info

Publication number
NL294272A
NL294272A NL294272DA NL294272A NL 294272 A NL294272 A NL 294272A NL 294272D A NL294272D A NL 294272DA NL 294272 A NL294272 A NL 294272A
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL294272A publication Critical patent/NL294272A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/58Arrangements for focusing or reflecting ray or beam
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/58Arrangements for focusing or reflecting ray or beam
    • H01J29/64Magnetic lenses
    • H01J29/66Magnetic lenses using electromagnetic means only
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
NL294272D 1963-06-19 NL294272A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL294272 1963-06-19

Publications (1)

Publication Number Publication Date
NL294272A true NL294272A (en)

Family

ID=19754796

Family Applications (1)

Application Number Title Priority Date Filing Date
NL294272D NL294272A (en) 1963-06-19

Country Status (4)

Country Link
BE (1) BE649408A (en)
DE (1) DE1489163A1 (en)
GB (1) GB1006389A (en)
NL (1) NL294272A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842935B2 (en) * 1978-04-07 1983-09-22 日本電子株式会社 Objective lenses for scanning electron microscopes, etc.
GB2140196A (en) * 1983-05-05 1984-11-21 Cambridge Instr Ltd Particle beam lenses

Also Published As

Publication number Publication date
DE1489163A1 (en) 1969-03-13
GB1006389A (en) 1965-09-29
BE649408A (en) 1964-12-17

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