Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
• • C—CHEMISTRY; METALLURGY
  • C01—INORGANIC CHEMISTRY
  • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
  • C01B32/00—Carbon; Compounds thereof
  • C01B32/90—Carbides
  • C01B32/914—Carbides of single elements
  • C01B32/956—Silicon carbide
• • C—CHEMISTRY; METALLURGY
  • C01—INORGANIC CHEMISTRY
  • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
  • C01B32/00—Carbon; Compounds thereof
  • C01B32/90—Carbides
  • C01B32/914—Carbides of single elements
  • C01B32/956—Silicon carbide
  • C01B32/963—Preparation from compounds containing silicon
  • C01B32/984—Preparation from elemental silicon

Applications Claiming Priority (1)

Publications (1)

Family

ID=19754735

Family Applications (1)

Country Status (3)

Family Cites Families (1)

• 0
  • NL NL293275D patent/NL293275A/xx unknown
• 1964
  • 1964-05-22 GB GB21232/64A patent/GB1071573A/en not_active Expired
  • 1964-05-23 DE DEN25016A patent/DE1261841B/en active Pending

Also Published As

Similar Documents