NL280940A - - Google Patents

Info

Publication number
NL280940A
NL280940A NL280940DA NL280940A NL 280940 A NL280940 A NL 280940A NL 280940D A NL280940D A NL 280940DA NL 280940 A NL280940 A NL 280940A
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL280940A publication Critical patent/NL280940A/xx

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
    • G02B27/4216—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant correcting geometrical aberrations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0037—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration with diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Geometry (AREA)
  • Electron Beam Exposure (AREA)
NL280940D 1961-07-15 NL280940A (OSRAM)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEH43137A DE1222603B (de) 1961-07-15 1961-07-15 Anordnung zur Verhinderung des nachteiligen Einflusses von durch Fehler eines elektronen-optischen Linsensystems hervorgerufenen Beeinflussungen eines Elektronenstrahls auf ein elektronenoptisches Bild

Publications (1)

Publication Number Publication Date
NL280940A true NL280940A (OSRAM)

Family

ID=7155100

Family Applications (2)

Application Number Title Priority Date Filing Date
NL280940D NL280940A (OSRAM) 1961-07-15
NL62280940A NL141025B (nl) 1961-07-15 1962-07-13 Elektronen-optische inrichting, waarin althans ten dele fouten van een daartoe behorend elektronen-optisch lenzenstelsel worden geelimineerd.

Family Applications After (1)

Application Number Title Priority Date Filing Date
NL62280940A NL141025B (nl) 1961-07-15 1962-07-13 Elektronen-optische inrichting, waarin althans ten dele fouten van een daartoe behorend elektronen-optisch lenzenstelsel worden geelimineerd.

Country Status (3)

Country Link
US (1) US3213277A (OSRAM)
DE (1) DE1222603B (OSRAM)
NL (2) NL141025B (OSRAM)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3311772A (en) * 1964-05-18 1967-03-28 Robert C Speiser Focussing system for an ion source having apertured electrodes
DE1489980B2 (de) * 1965-11-19 1970-06-04 Hanßen, Karl-Josef, Dr.rer.nat., 33OO Braunschweig Korpuskularstrahlgerät für Phasenoder Amplitudenobjekte mit einer phasenschiebenden Folie
DE1564075B1 (de) * 1966-05-13 1970-04-30 Karl-Josef Dr Rer Nat Hanssen Verfahren zur kontrastreichen Abbildung von Phasen- oder Amplitudenobjekten in einem Korpuskularstrahlgeraet,insbesondere einem Elektronenmikroskop
DE1564658B2 (de) * 1966-07-13 1971-04-29 Siemens AG, 1000 Berlin u 8000 München Verfahren zur fokussierung der objektivlinse eines korpus kularstrahlmikroskops insbesondere eines elektronenmikros kops
DE1807277A1 (de) * 1968-06-28 1970-01-08 Siemens Ag Korpuskularstrahlgeraet zur Untersuchung eines Praeparates mit einer phasendrehenden Folie
US3728009A (en) * 1971-11-02 1973-04-17 Inventors & Investors Inc Phase filter combination with lens optics
US3996468A (en) * 1972-01-28 1976-12-07 Nasa Electron microscope aperture system
GB1559531A (en) * 1976-01-20 1980-01-23 Nordic Finance & Trade Ltd Inc Electrical switches
US5153778A (en) * 1991-06-19 1992-10-06 At&T Bell Laboratories Powerless field-corrective lens

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2735018A (en) * 1956-02-14 Mclachlan
US1368608A (en) * 1919-07-05 1921-02-15 Richard L Curran Photographic diaphragm
GB646019A (en) * 1946-01-05 1950-11-15 Philips Nv Improvements in or relating to electron microscopes
US2740919A (en) * 1953-06-25 1956-04-03 Farrand Optical Co Inc Electron lens
FR1088578A (fr) * 1953-07-15 1955-03-08 Centre Nat Rech Scient Dispositif permettant d'améliorer les images fournies par les systèmes optiques
FR1208411A (fr) * 1957-10-18 1960-02-23 Agency Ind Science Techn Filtre pour la compensation de l'aberration et son application
US3045530A (en) * 1960-07-14 1962-07-24 Agency Ind Science Techn Optical system having aberration correcting plate member with ring shaped phase retarding layers

Also Published As

Publication number Publication date
US3213277A (en) 1965-10-19
NL141025B (nl) 1974-01-15
DE1222603B (de) 1966-08-11

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