NL275192A - - Google Patents
Info
- Publication number
- NL275192A NL275192A NL275192DA NL275192A NL 275192 A NL275192 A NL 275192A NL 275192D A NL275192D A NL 275192DA NL 275192 A NL275192 A NL 275192A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H10P95/00—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/122—Incoherent waves
- B01J19/123—Ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/53—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone involving the removal of at least part of the materials of the treated article, e.g. etching, drying of hardened concrete
- C04B41/5338—Etching
- C04B41/5346—Dry etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/12—Gaseous compositions
-
- H10P50/242—
-
- H10P50/283—
-
- H10W74/43—
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Toxicology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Electromagnetism (AREA)
- Structural Engineering (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US121066A US3095332A (en) | 1961-06-30 | 1961-06-30 | Photosensitive gas phase etching of semiconductors by selective radiation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL275192A true NL275192A (enExample) |
Family
ID=22394283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL275192D NL275192A (enExample) | 1961-06-30 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3095332A (enExample) |
| NL (1) | NL275192A (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1052379A (enExample) * | 1963-03-28 | 1900-01-01 | ||
| US3255056A (en) * | 1963-05-20 | 1966-06-07 | Rca Corp | Method of forming semiconductor junction |
| US3408238A (en) * | 1965-06-02 | 1968-10-29 | Texas Instruments Inc | Use of both silicon oxide and phosphorus oxide to mask against diffusion of indium or gallium into germanium semiconductor device |
| US3351503A (en) * | 1965-09-10 | 1967-11-07 | Horizons Inc | Production of p-nu junctions by diffusion |
| BE687248A (enExample) * | 1966-09-22 | 1967-03-22 | ||
| US3494768A (en) * | 1967-05-29 | 1970-02-10 | Gen Electric | Condensed vapor phase photoetching of surfaces |
| US3520687A (en) * | 1967-05-29 | 1970-07-14 | Gen Electric | Etching of silicon dioxide by photosensitive solutions |
| US4183780A (en) * | 1978-08-21 | 1980-01-15 | International Business Machines Corporation | Photon enhanced reactive ion etching |
| US4226666A (en) * | 1978-08-21 | 1980-10-07 | International Business Machines Corporation | Etching method employing radiation and noble gas halide |
| US4498953A (en) * | 1983-07-27 | 1985-02-12 | At&T Bell Laboratories | Etching techniques |
| US9090499B2 (en) * | 2013-03-10 | 2015-07-28 | Qualcomm Incorporated | Method and apparatus for light induced etching of glass substrates in the fabrication of electronic circuits |
| EP4113582A4 (en) * | 2020-02-26 | 2023-10-11 | Resonac Corporation | DRY ETCHING PROCESS, PRODUCTION PROCESS FOR SEMICONDUCTOR ELEMENT AND CLEANING PROCESS |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL34436C (enExample) * | 1945-04-20 | |||
| US2841477A (en) * | 1957-03-04 | 1958-07-01 | Pacific Semiconductors Inc | Photochemically activated gaseous etching method |
-
0
- NL NL275192D patent/NL275192A/xx unknown
-
1961
- 1961-06-30 US US121066A patent/US3095332A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3095332A (en) | 1963-06-25 |