NL266898A - - Google Patents

Info

Publication number
NL266898A
NL266898A NL266898DA NL266898A NL 266898 A NL266898 A NL 266898A NL 266898D A NL266898D A NL 266898DA NL 266898 A NL266898 A NL 266898A
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL266898A publication Critical patent/NL266898A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
NL266898D 1961-07-10 NL266898A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL266898 1961-07-10

Publications (1)

Publication Number Publication Date
NL266898A true NL266898A (en)

Family

ID=19753149

Family Applications (1)

Application Number Title Priority Date Filing Date
NL266898D NL266898A (en) 1961-07-10

Country Status (4)

Country Link
US (1) US3197635A (en)
DE (1) DE1464282A1 (en)
GB (1) GB961089A (en)
NL (1) NL266898A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5041731A (en) * 1989-01-20 1991-08-20 Fujitsu Limited Deflection compensating device for converging lens
DE3901980C2 (en) * 1989-01-24 2001-06-28 Ceos Gmbh Multipole element and method for producing a multipole element
US4962309A (en) * 1989-08-21 1990-10-09 Rockwell International Corporation Magnetic optics adaptive technique
US5546319A (en) * 1994-01-28 1996-08-13 Fujitsu Limited Method of and system for charged particle beam exposure

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1826673A (en) * 1925-10-03 1931-10-06 Mcilvaine Patent Corp Resistance apparatus
US2432029A (en) * 1945-10-05 1947-12-02 Howe & Fant Inc Correction of selsyn transmitter errors
FR944238A (en) * 1947-03-13 1949-03-30 Csf Electronic optics correction method
BE481554A (en) * 1947-06-26
US2919381A (en) * 1956-07-25 1959-12-29 Farrand Optical Co Inc Electron lens

Also Published As

Publication number Publication date
US3197635A (en) 1965-07-27
DE1464282A1 (en) 1968-12-12
GB961089A (en) 1964-06-17

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