NL263646A - - Google Patents

Info

Publication number
NL263646A
NL263646A NL263646DA NL263646A NL 263646 A NL263646 A NL 263646A NL 263646D A NL263646D A NL 263646DA NL 263646 A NL263646 A NL 263646A
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL263646A publication Critical patent/NL263646A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/073Electron guns using field emission, photo emission, or secondary emission electron sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • H01J3/025Electron guns using a discharge in a gas or a vapour as electron source
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00Discharge tubes and lamps
    • H01J2893/0061Tubes with discharge used as electron source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Electron Beam Exposure (AREA)
NL263646D 1960-04-16 NL263646A (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEZ7940A DE1117781B (de) 1960-04-16 1960-04-16 Elektronenstrahlerzeugungssystem und Verfahren zur Herstellung der Blendenoeffnung des Elektronenstrahlerzeugungssystems

Publications (1)

Publication Number Publication Date
NL263646A true NL263646A (https=)

Family

ID=7620324

Family Applications (1)

Application Number Title Priority Date Filing Date
NL263646D NL263646A (https=) 1960-04-16

Country Status (5)

Country Link
US (1) US3138736A (https=)
CH (1) CH400384A (https=)
DE (1) DE1117781B (https=)
GB (1) GB979622A (https=)
NL (1) NL263646A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3389240A (en) * 1964-09-25 1968-06-18 Welding Research Inc Electron beam welding apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE438468A (https=) * 1939-05-08
US2721972A (en) * 1952-08-04 1955-10-25 Rothstein Jerome High sensitivity ionization gauge
US2847597A (en) * 1955-11-25 1958-08-12 Sylvania Electric Prod Electron discharge device
US2887599A (en) * 1957-06-17 1959-05-19 High Voltage Engineering Corp Electron acceleration tube
NL242517A (https=) * 1958-08-26

Also Published As

Publication number Publication date
DE1117781B (de) 1961-11-23
GB979622A (en) 1965-01-06
US3138736A (en) 1964-06-23
CH400384A (de) 1965-10-15

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