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US3868254A
(en)
*
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1972-11-29 |
1975-02-25 |
Gaf Corp |
Positive working quinone diazide lithographic plate compositions and articles having non-ionic surfactants
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US4174222A
(en)
*
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1975-05-24 |
1979-11-13 |
Tokyo Ohka Kogyo Kabushiki Kaisha |
Positive-type O-quinone diazide containing photoresist compositions
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DE2547905C2
(de)
*
|
1975-10-25 |
1985-11-21 |
Hoechst Ag, 6230 Frankfurt |
Lichtempfindliches Aufzeichnungsmaterial
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JPS561044A
(en)
*
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1979-06-16 |
1981-01-08 |
Konishiroku Photo Ind Co Ltd |
Photosensitive composition
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JPS59165053A
(ja)
*
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1983-03-11 |
1984-09-18 |
Japan Synthetic Rubber Co Ltd |
ポジ型感光性樹脂組成物
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US4499171A
(en)
*
|
1982-04-20 |
1985-02-12 |
Japan Synthetic Rubber Co., Ltd. |
Positive type photosensitive resin composition with at least two o-quinone diazides
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DE3220816A1
(de)
*
|
1982-06-03 |
1983-12-08 |
Merck Patent Gmbh, 6100 Darmstadt |
Lichtempfindliche komponenten fuer positiv arbeitende fotoresistmaterialien
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DE3421471A1
(de)
*
|
1984-06-08 |
1985-12-12 |
Hoechst Ag, 6230 Frankfurt |
Perfluoralkylgruppen aufweisende 1,2-naphthochinondiazidverbindungen und reproduktionsmaterialien, die diese verbindungen enthalten
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US4596763A
(en)
*
|
1984-10-01 |
1986-06-24 |
American Hoechst Corporation |
Positive photoresist processing with mid U-V range exposure
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JPS61118744A
(ja)
*
|
1984-11-15 |
1986-06-06 |
Tokyo Ohka Kogyo Co Ltd |
ポジ型ホトレジスト組成物
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JPS61141441A
(ja)
*
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1984-12-14 |
1986-06-28 |
Tokyo Ohka Kogyo Co Ltd |
ポジ型ホトレジスト組成物
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US5217840A
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*
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1985-08-12 |
1993-06-08 |
Hoechst Celanese Corporation |
Image reversal negative working o-quinone diazide and cross-linking compound containing photoresist process with thermal curing treatment and element produced therefrom
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US4929536A
(en)
*
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1985-08-12 |
1990-05-29 |
Hoechst Celanese Corporation |
Image reversal negative working O-napthoquinone diazide and cross-linking compound containing photoresist process with thermal curing
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US5256522A
(en)
*
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1985-08-12 |
1993-10-26 |
Hoechst Celanese Corporation |
Image reversal negative working O-naphthoquinone diazide and cross-linking compound containing photoresist process with thermal curing
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US4684597A
(en)
*
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1985-10-25 |
1987-08-04 |
Eastman Kodak Company |
Non-precipitating quinone diazide polymer containing photoresist composition with o-quinone diazide trisester as dissolution inhibitor
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US4737437A
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*
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1986-03-27 |
1988-04-12 |
East Shore Chemical Co. |
Light sensitive diazo compound, composition and method of making the composition
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*
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1986-05-02 |
1992-11-10 |
Hoechst Celanese Corporation |
Process for the preparation of photosensitive compositions containing a mixed ester o-quinone photosensitizer
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*
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1986-05-02 |
1991-07-30 |
Hoechst Celanese Corporation |
Photosensitive article having phenolic photosensitizers containing quinone diazide and acid halide substituents
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US4732837A
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*
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1986-05-02 |
1988-03-22 |
Hoechst Celanese Corporation |
Novel mixed ester O-quinone photosensitizers
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*
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1986-05-02 |
1990-02-20 |
Hoechst Celanese Corporation |
Phenolic photosensitizers containing quinone diazide and acidic halide substituents
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US4732836A
(en)
*
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1986-05-02 |
1988-03-22 |
Hoechst Celanese Corporation |
Novel mixed ester O-quinone photosensitizers
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JP2568827B2
(ja)
*
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1986-10-29 |
1997-01-08 |
富士写真フイルム株式会社 |
ポジ型フオトレジスト組成物
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*
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1987-03-12 |
1993-01-26 |
Mitsubishi Kasei Corporation |
Positive photosensitive planographic printing plates containing specific high-molecular weight compound and photosensitive ester of O-napthoquinonediazidosulfonic acid with polyhydroxybenzophenone
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JPS6449038A
(en)
*
|
1987-08-19 |
1989-02-23 |
Mitsubishi Chem Ind |
Positive type photoresist composition
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US5248582A
(en)
*
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1988-09-07 |
1993-09-28 |
Fuji Photo Film Co., Ltd. |
Positive-type photoresist composition
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JPH0743534B2
(ja)
*
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1989-04-21 |
1995-05-15 |
東京応化工業株式会社 |
半導体デバイス用レジストパターンの製造方法
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*
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1990-01-09 |
1991-12-24 |
Industrial Technology Research Institute |
Positive photoresist composition containing 4,4-diester, 4,5-diester, or 5,5-diester of spiroglycol and 1-oxo-2-diazonaphthalene-5-sulfonic acid chloride
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1991-08-30 |
1994-03-22 |
Ciba-Geigy Corp. |
Positive photoresists containing quinone diazide photosensitizer, alkali-soluble resin and tetra(hydroxyphenyl) alkane additive
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1991-11-15 |
2000-12-26 |
Shipley Company, L.L.C. |
Antihalation compositions
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JP2944296B2
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1992-04-06 |
1999-08-30 |
富士写真フイルム株式会社 |
感光性平版印刷版の製造方法
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1992-04-14 |
1995-01-24 |
Tokyo Ohka Kogyo Co., Ltd. |
Alkali-developable positive-working photosensitive resin composition
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1992-08-12 |
1995-03-28 |
Tokyo Ohka Kogyo Co., Ltd. |
Positive working photosensitive resin composition containing 1,2-naphthoquinone diazide esterification product of triphenylmethane compound
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US5645970A
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*
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1995-10-25 |
1997-07-08 |
Industrial Technology Research Institute |
Weak base developable positive photoresist composition containing quinonediazide compound
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*
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1995-12-21 |
1998-12-29 |
Clariant Finance (Bvi) Limited |
Quinonediazide positive photoresist utilizing mixed solvent consisting essentially of 3-methyl-3-methoxy butanol and propylene glycol alkyl ether acetate
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1997-01-23 |
2007-10-23 |
Sequenom, Inc. |
Systems and methods for preparing and analyzing low volume analyte array elements
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2000-02-25 |
2004-08-31 |
Massachusetts Institute Of Technology |
Encapsulated inorganic resists
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2000-05-08 |
2005-02-17 |
Deutsch Albert S. |
Ink jet imaging of a lithographic printing plate
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EP1332000B1
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2000-10-30 |
2012-06-20 |
Sequenom, Inc. |
Method for delivery of submicroliter volumes onto a substrate
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2001-05-09 |
2005-08-30 |
Massachusetts Institute Of Technology |
Resist with reduced line edge roughness
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JP4001232B2
(ja)
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2002-12-26 |
2007-10-31 |
Ｔｄｋ株式会社 |
マスク形成方法、パターン化薄膜形成方法およびマイクロデバイスの製造方法
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US6852465B2
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*
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2003-03-21 |
2005-02-08 |
Clariant International Ltd. |
Photoresist composition for imaging thick films
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US7090958B2
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2003-04-11 |
2006-08-15 |
Ppg Industries Ohio, Inc. |
Positive photoresist compositions having enhanced processing time
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WO2006039810A1
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*
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2004-10-13 |
2006-04-20 |
St-Jean Photochimie Inc. |
Photoactive compositions and preparation thereof
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JP4800321B2
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2004-12-09 |
2011-10-26 |
コーロン インダストリーズ インク |
ポジティブ型ドライフィルムフォトレジスト及びこれを製造するための組成物
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2005-07-12 |
2007-08-14 |
Az Electronic Materials Usa Corp. |
Photoresist composition for imaging thick films
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*
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2005-11-10 |
2007-05-10 |
Toukhy Medhat A |
Developable undercoating composition for thick photoresist layers
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2007-09-17 |
2009-07-16 |
Sequenom, Inc. |
Integrated robotic sample transfer device
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2011-11-01 |
2013-05-02 |
Az Electronic Materials Usa Corp. |
Nanocomposite positive photosensitive composition and use thereof
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2021-04-15 |
2023-06-13 |
Industrial Technology Research Institute |
Photosensitive compound, photosensitive composition, and patterning method
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