NL2025135B1 - An actuator device for use in a positioning system as well as such positioning system. - Google Patents

An actuator device for use in a positioning system as well as such positioning system. Download PDF

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Publication number
NL2025135B1
NL2025135B1 NL2025135A NL2025135A NL2025135B1 NL 2025135 B1 NL2025135 B1 NL 2025135B1 NL 2025135 A NL2025135 A NL 2025135A NL 2025135 A NL2025135 A NL 2025135A NL 2025135 B1 NL2025135 B1 NL 2025135B1
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Prior art keywords
group
coil assemblies
actuator device
carrier
recesses
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NL2025135A
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Dutch (nl)
Inventor
Hubertus Antonius Van De Rijdt Johannes
Van Ninhuijs Bob
Patti Francesco
Antonius Andries Verkooijen Rob
Fedde Bloemhof Jorrit
Adrianus Jacobus Van Mil Roel
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Vdl Enabling Tech Group B V
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Application filed by Vdl Enabling Tech Group B V filed Critical Vdl Enabling Tech Group B V
Priority to JP2022540773A priority Critical patent/JP2023509145A/en
Priority to US17/790,368 priority patent/US12021432B2/en
Priority to PCT/NL2020/050811 priority patent/WO2021137697A1/en
Priority to EP20830377.6A priority patent/EP4085480A1/en
Priority to KR1020227026496A priority patent/KR20230002285A/en
Priority to IL294394A priority patent/IL294394A/en
Application granted granted Critical
Publication of NL2025135B1 publication Critical patent/NL2025135B1/en
Priority to US18/663,918 priority patent/US20240339910A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/20—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium
    • H02K5/203—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium specially adapted for liquids, e.g. cooling jackets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/19—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/19—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil
    • H02K9/197—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil in which the rotor or stator space is fluid-tight, e.g. to provide for different cooling media for rotor and stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Atmospheric Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Toxicology (AREA)
  • Epidemiology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Linear Motors (AREA)

Abstract

The invention relates to an actuator device for use in a positioning system, wherein the actuator device is linearly movable within a plane with respect to a supporting structure of the positioning system as well as such a positioning system implementing such an actuator device. In an example of the actuator device according to the invention, it comprises a carrier having a longitudinal and a transversal dimension; and multiple groups of coil assemblies mounted in the carrier, each group of coil assemblies being structured to orientate the carrier in at least one degree of freedom. The single design actuator device according to the invention has limited constructional dimensions and allows high accuracy as to motion and position in multiple degrees of freedom.

Description

TITLE An actuator device for use in a positioning system as well as such positioning system.
BACKGROUND OF THE INVENTION The invention relates to an actuator device for use in a positioning system, wherein the actuator device is linearly movable within a plane with respect to a supporting structure of the positioning system as well as such a positioning system implementing such an actuator device.
In product processing applications under high or low vacuum (or clean room) conditions, for example but not limited to wafer handling applications in the semiconductor manufacturing industry, an increasing demand for improved process reliability and stability as well as more accurate position handling combined with a higher throughput of products exists.
These requirements in vacuum operated product process environment set high standards with respect to the positioning and the orientation of a product, such as a wafer, during the many, subsequent process steps. In particular, vibrations created in the process line by moving mechanical parts and/or by the electrical component circuit may adversely affect the displacement and positioning accuracy of the product to be processed within the process line.
Reduction of vibrations can be realized by implementing magnetic bearing assemblies or magnetic coil assemblies or in short magnetic bearings. Given that magnetic bearings are contactless, there is no mechanical friction and thus limited vibrations. Moreover, there is no need for lubrication, which enables in vacuum operation without significant outgassing of molecular contamination. Apart from that, very little particle generation occurs, which is highly desirable in vacuum conditioned process applications. These aspects make that contamination seals can be omitted.
The main challenges of applying magnetic bearings or magnetic coil assemblies in high-tech in-vacuum systems lie in minimization of heat dissipation in the coils, minimizing eddy-current effects, implementation of a stable control system and linearization of the typically non-linear characteristics.
In current vibration-free positioning system designs magnetic coil assemblies are implemented as actuators for displacing and positioning a product, such as a wafer, along several degrees of freedom within a plane. Two actuator solutions can be recognized: first, direct motion axis, meaning that each axis (degree of freedom) has a single actuator, supported by separate sensor, and controls. In the second category, indicated as dual motion axis, one or more axis (degrees of freedom) have a stacked or two-staged motion control. The first stage deals with the “rough” or “less accurate” displacement and the final stage deals with the “accurate” positioning. In most known process applications all axis (degrees of freedom) are either direct motion or dual motion controlled.
Direct motion axis actuators are implemented in processes where (sub) um accuracy is required with moderate accelerations exerted on the product to be processed. Dual motion axis actuators are applied in processes where (sub) nm accuracy with aggressive acceleration is required.
OBJECT OF THE INVENTION It is an object to provide an improved actuator device, which integrates both direct motion axis as well as dual motion axis control, in one single design of limited constructional dimensions allowing implementation in product processing applications under high or low vacuum requiring high accuracy as to motion and position.
DESCRIPTION OF THE INVENTION In an example of the actuator device according to the invention, it comprises a carrier having a longitudinal and a transversal dimension; and multiple groups of coil assemblies mounted in the carrier, each group of coil assemblies being structured to orientate the carrier in at least one degree of freedom.
The single design actuator device according to the invention has limited constructional dimensions and allows high accuracy as to motion and position in multiple degrees of freedom.
In an example the carrier is provided with multiple groups of one or more recesses, each group of one or more recesses structured to accommodate one or more coil assemblies belonging to one group of the multiple groups of coil assemblies.
In particular a first group of one or more recesses consist of four corner recesses, each corner recess being provided at or near a corner of the carrier. Each corner recess is provided with two through openings, wherein each corner recess is structured to accommodate a U-core coil assembly of a first group of coil assemblies, with each yoke of the U-core mounted through one of the corner through openings extending outward from the carrier surface and with a coil assembly of the first group of coil assemblies mounted around each yoke of the U-core. This first group of coil assemblies is arranged to control motion and position of the actuator device carrier in at least the z- degree of freedom.
In yet another advantageous example of the actuator device, a second group and a third group of one or more recesses for accommodating a second and third group of coil assemblies, respectively, are provided adjacent from each and between the first group of corner recesses, seen in the longitudinal dimension of the carrier. These second and third groups of coil assemblies are arranged to control motion and position of the actuator device carrier in at least the x-degree of freedom and y-degree of freedom, respectively.
In a particular example of the actuator device according to the invention the second group and/or the third group of one or more recesses consist of one recess, wherein the recesses of both the second and third group have a longitudinal dimension orientated parallel to the transversal dimension of the carrier. This allows for an easy machining of the carrier, and has advantageous thermal characteristics as to heat dissipation and cooling.
Preferably each coil assembly is accommodated in an insulated manner in each recess, thus preventing negative eddy-current effects.
In particular, each coil assembly is composed of a group of multiple single winded coils stacked together. This design guarantees a low thermal resistance, and results in a high fill factor coil and subsequently to a high accuracy as to motion and positioning.
In another example at least the second and/or the third group of the multiple coil assemblies is provided with at least one temperature sensor, in particular a PTC-resistor. Herewith a proper temperature control can be achieved, further improving stability of operation and preventing malfunction and/or disturbances which might adversely affect the motion and the positioning of the actuator device and product placed upon the actuator device.
To further improve the thermal characteristics of the carrier and thus improve the operation thereof within the positioning system, in an example the carrier comprises a channel for a coolant as well as an inlet and an outlet provided at respective ends of the channel.
In particular, starting from the inlet towards the outlet, the channel is in subsequent heat-exchanging contact with the first, the second and the third group of multiple coil assemblies. With this channel configuration it is emphasized to direct the coolant, which might be water, first over the group of multiple coil assemblies with the lowest heat dissipation, subsequently directing the coolant along longitudinal sides of the carrier-shaped actuator device and finally over the further groups of multiple coil assemblies located in the centre or middle of the actuator device between the first group of multiple coil assemblies, which further groups of multiple coil assemblies have the highest heat dissipation during operation.
In yet another advantageous example, the carrier is provided with a cover plate covering all recesses of the first, second and third group of recesses. This allows for an easy assembly as well as maintenance of the actuator device, wherein in a specific functional embodiment the channel for the coolant is provided in a surface of the cover plate facing the recesses.
Preferably the carrier is of a rectangular shape, however also other shapes such as a square shape are even effective and practical, in dependence on the product processing application.
An example of a positioning system for positioning an object in a plane comprises a supporting structure; an object table; a positioning module and implements an actuator device according to the invention, wherein the actuator device is structured to support the object table, and wherein the positioning module is structured to linearly move the actuator device together with the object table within a plane with respect to the supporting structure.
In particular the supporting structure comprises a first and a second elongated guide orientated parallel to each other, both first and second elongated guides comprising first and second groups of magnets positioned next to each other in opposite pole orientation.
In particular the magnets are permanent magnets or electromagnets and, during operation, the first and second group of magnets of the first and second elongated guides interact with the second and third group of coil assemblies of the actuator device, respectively. Herewith a proper position control can be achieved among the x-degree of freedom and the y-degree of freedom.
BRIEF DESCRIPTION OF THE DRAWINGS
The invention will now be described in more detail with reference to the accompanying drawings, which drawings show in: Figures 1A-1G several views of an embodiment of an actuator device according to the invention; 5 Figures 2A-2D several examples of electric coils used in the actuator device according to the invention; Figures 3A-3D several views of an embodiment of a positioning system according to the invention; Figures 3A-3D several views of an embodiment of a positioning system according to the invention; Figures 4A-4E further views of the embodiment of the positioning system according to the invention.
DETAILED DESCRIPTION OF THE INVENTION For a better understanding of the invention like parts in the drawings are denoted with like reference numerals.
Figures 1A-1G show several views of an embodiment of an actuator device according to the invention. The actuator device is indicated with reference numeral 1 and is in particular used in a positioning system, an example of such positioning system 20 being depicted in more detail in the Figures 3A-3C and 4A-4E.
In product processing applications under high or low vacuum (or clean room) conditions, for example but not limited to wafer handling applications in the semiconductor manufacturing industry, such an actuator device serves as a support for a wafer carrier carrying a wafer. The actuator device 1 together the wafer carrier and the wafer substrate placed upon it are linearly movable within a plane with respect to a supporting structure of the positioning system and within a processing chamber, allowing the wafer substrate to be subjected to - for example - several heat treatments and wafer deposition process steps or photolithography steps.
The actuator as depicted in Figures 1A-1E has a single design of limited constructional dimensions and allows implementation in product processing applications under high or low vacuum requiring high accuracy as to motion and position.
As shown in the Figures the actuator device 1 has a plane-shaped configuration with first surface side 1A and a second surface side 1B, located at the opposite side of the first surface side 1A of the actuator device 1. Preferably the actuator device 1 is composed as a carrier element 10, preferably manufactured as one piece element and made from a non-(ferro)-magnetic material, such as a plastic or aluminum.
The carrier element or carrier 10 has a flat, plane-shaped configuration, with a thickness dimension z which is significantly smaller than its longitudinal dimension y and its transversal dimensions x. The carrier 10 can be of a rectangular shape with its longitudinal dimension y being larger than its transversal dimensions x (y>x) or can be formed as a square with x=y.
The single design actuator device 1 according to the invention has limited constructional dimensions and allows high accuracy as to motion and position in multiple degrees of freedom within a plane.
The actuator device 1 is provided with multiple groups of coil assemblies mounted in the carrier 10. In the embodiments of Figures 1A-1F three groups of coil assemblies are implemented in the actuator device 1, said first, second and third group of coil assemblies being denoted with reference numerals 110, 120 and 130 respectively.
Each group of coil assemblies 110-120-130 operate as an actuator being structured to orientate the carrier 10 in at least one degree of freedom (six DOF x, y, z, ®, y and 8).
See Figure 1A-1B, 1E-1F for the three dimensional Cartesian coordinate system depicting the three orthogonal degrees of freedom (x, y and z directions of displacement) of the actuator device 1, as well as the three rotational degrees of freedom (©, y and 8 directions of rotation) of the actuator device 1 around its respective x, y and z directions of movement. This three dimensional Cartesian coordinate system applies for all embodiments depicted in the Figures.
In the embodiment of Figure 1G the actuator device 1’ is provided with only two groups of coil assemblies 120-130, each group operating as an actuator being structured to orientate the carrier 10 in at least three degrees of freedom, among these three degrees of freedom are the x- and y- degree of freedom.
Returning to Figures 1A-1F, the carrier 10 is provided with multiple groups (here three groups) of one or more recesses, (the number of) said groups of recesses being conformal to (the number of) the groups of coil assemblies being implemented in the actuator device 1. The groups of recesses are provided in the first surface side 1A of the actuator device 1, preferably by means of machining or another material removing technique. The three groups of recesses in the embodiment shown in Figures 1A-1F are being indicated with reference numerals 11-12-13. And each group of one or more recesses 11-12-13 is structured to accommodate one or more coil assemblies belonging to one group of the multiple groups of coil assemblies 110-120-130.
Thus the first group of recesses 11 is structured to accommodate one or more coil assemblies belonging to the first group 110 of coil assemblies, whereas the second group of recesses 12 is structured to accommodate one or more coil assemblies belonging to the second group 120 of coil assemblies, and finally the third group of recesses 13 is structured to accommodate one or more coil assemblies belonging to the third group 130 of coil assemblies.
When looking in more detail to the first group of recesses 11 accommodating the coil assemblies belonging to the first group 110 of coil assemblies, it is noted that in this example the first group 11 consists of four corner recesses 11A-11B- 11C-11D, with each corner recess 11A-11B-11C-11D being provided at or near a carrier corner 10A-10B-10C-10D of the carrier 10. In particular the corner recesses 11A-11B and 11C-11D are positioned next to each transversal side y of the carrier 10.
Furthermore each corner recess 11A-11B-11C-11D is provided with through openings 17A-17D, in particular each corner recess 11A-11B-11C-11D is provided with two through openings 17A1-17A2, 17B1-17B2, 17C1-17C2, 17D1-17D2 (or in simplified form 17#1-17#2 with # denoting A-D for the respective corner A-D).
Each corner recess 11A-11B-11C-11D is structured to accommodate a U- core coil assembly belonging to the first group of coil assemblies 110. These U-core coil assemblies are denoted with reference numerals 110A-110D and are depicted in more detail in Figure 2D. U-core coil assemblies 110A-110D are each composed of two coil sections 110#1-110#2 (with # being A-D) being wound around respective winding cores 113#1-113#2 (again, with # being A-D), both coil sections 110#1-110#2 are electrically interconnected by means of a wire connection 114. Each winding core 113#1-113#2 is provided with the winding core openings 115#1-115#2, respectively.
Each U-core coil assembly 110A-110D furthermore comprises reluctance yokes 111A-111D, each yoke having two yoke legs 111#1-111#2 (with # being A-D). Each reluctance yoke is preferably made from a ferromagnetic material, such as steel or iron. As shown in Figures 1A-1B-1D-1E-1F combined with Figure 2D, each yoke 111A- 111D is mounted with its two yoke legs 111#1-111#2 through the corner through openings 17#1-17#2 of each corner recess 11A-11B-11C-11D. In particular the two yoke legs 111#1-111#2 each extend from the second surface side 1b through the corner through openings 17#1-17#2 and the winding core opening 115#1-115#2 of the winding core 113#1-113#2 outward from the first carrier surface 1A. Each coil section 110#1- 110#2 of the coil assemblies 110A-110D of the first group 110 of coil assemblies is mounted around each yoke leg 111#1-111#2 of the yokes 111A-111D.
As shown in Figure 1B, but also in Figures 1E, 1F, 3A, 3B, 3C, 4A and 4B the centre part of the U-shaped yokes 111A-111D extend below at the second side 1B of (the carrier 10 of) the actuator device 1. The U-core coil assemblies 110A-110D function as reluctance coil actuators, being structured to orientate or position the carrier 10 in at least the z-degree of freedom. By actuating the U-core coil assemblies 110A-110D independent from each, it is herewith also possible to position the actuator 10 in the © (rotation around the x-axis direction) degree of freedom and wy (rotation around the y-axis direction) degree of freedom.
It is observed that in this example the first group of coil assemblies is comprised of four U-core coil assemblies 110A-110D, each being positioned and actuated near a corner of the carrier 10. This humber is not to be limiting for the invention, as the number is arbitrary. It is noted however, that in other non-depicted examples of the invention the carrier 10 can be provided with less (for example two) or more (for example six or eight) U-core coil assemblies 110# of the first group of coil assemblies (here, with # denoting A-B for the two-coils example or denoting A-F or A-H for the six- or eight-coils example). The number of the U-core coil assemblies belonging to the first group of coil assemblies can be arbitrary chosen dependent on the size of the carrier 10 and its application.
Likewise, the actuator device 1 as shown in Figures 1A-1F exhibit a second group 12 and a third group 13 of one or more recesses for accommodating a second group 120 and third group 130 of coil assemblies. These recesses 12 and 13 are provided in the first surface 1A of the carrier 10 of the actuator device 1, in such manner that they are positioned adjacent from each and are positioned between the first group of corner recesses 11A-11D, in particular between the corner recesses 11A-11B and 11C-11D, seen in the longitudinal x-dimension of the carrier 10.
In this particular example the second group and/or the third group of one or more recesses consist of one recess, indicated with reference numeral 12 and 13, respectively.
In particular the recesses 12-13 of both the second and third group have a longitudinal dimension, which is orientated parallel to the transversal x-dimension of the carrier 10. In fact the longitudinal dimension of the recesses 12-13 is orientated perpendicular to the longitudinal y-dimension of the carrier 10.
In the example shown in for example Figures 1A-1F the second group of coil assemblies 120 is being composed of six separate coil assemblies 120A-120F, and due to its orientation of the coil assemblies within the second recess 12 and with respect to the carrier 10, the second group 120 is being structured to orientate or position the carrier 10 in at least the x-degree of freedom.
Similarly, the third group of coil assemblies 130 is being composed of two separate coil assemblies 130A-130B, and due to its orientation of the coil assemblies within the third recess 13 and with respect to the carrier 10, the third group 130 is being structured to orientate or position the carrier 10 in at least the y-degree of freedom. Alternatively, by actuating the two coil assemblies 130A-130B independent from each, it is herewith also possible to position the actuator 10 in the © (rotation around the z-axis direction) degree of freedom.
Similar to the arbitrary number of the U-core coil assemblies belonging to the first group of coil assemblies it should be noted that also the number of coil assemblies in each second 120 and third group 130 of coil assemblies is arbitrary and can be any number between 1 (preferably at least 2) and 8. In an example the third group of coil assemblies 130 can be composed of four separate coil assemblies 130A-130A’- 130B-130B’, with the coil assemblies 130A-130A" and 130B-130B’ each grouped together in the longitudinal direction y of the carrier 10. The number of coils 120# and 130# can be dependent on the size of the carrier 10 and its application.
Each coil assembly 120A-120F and 130A-130B of the second group 120 and third group 130 of coil assemblies function in fact as permanent magnet Lorentz actuators.
In Figures 2A-2D several coil configurations of the coil assemblies of the first (Figure 2D), second and third (Figures 2A-2C) groups of coil assemblies are depicted. In Figures 2A-2C each coil assembly (120A-120F; 130A-130B) being part of the second group 120 and third group 130 of coil assemblies is composed of multiple single winded coils 18A (Figure 2A), which are stacked together, e.g. being composed of a stack of six single coils 18A-18F (Figure 2B). This design guarantees a low thermal resistance, and results in a high fill factor coil and subsequently to a high accuracy as to motion and positioning.
Furthermore, each coil assembly 120A-120F;, 130A-130B is accommodated in an insulated manner in each recess 12-13, for example by means of an enclosure 19 made of an electrical isolating material, such as a polyimide film material, which film material is folded and formed as a box 19 and positioned over or designed to accommodate the coil assembly 120A-120F; 130A-130B. Such polyimide film material is marketed under the trademark name Kapton™.
Via connecting guides 15A-15B-15C the several coil assemblies 110A- 110D; 120A-120F; 130A-130B can be electrically connected to proper control circuitry of the position means 22 of the positioning system 20.
In yet another example as shown in Figure 1D, at least the second group 120 and/or the third group 130 of the multiple coil assemblies 120A-120F; 130A-130B is provided with at least one temperature sensor 121 and 131 respectively. In particular the temperature sensor 121 and 131 can be a PTC-resistor. Herewith a proper temperature control can be achieved, further improving stability of operation and preventing malfunction and/or disturbances which might adversely affect the motion and the positioning of the actuator device 1 and product placed upon the actuator device 1.
To further improve the thermal characteristics of the carrier 10 and thus improve the operation thereof within the positioning system 20, in an example shown in Figure 1C the carrier 10 is shown from its lower, second surface side 1B. It comprises at least one channel 16 provided in the second surface side 1B for a coolant as well as an inlet 16A and an outlet 18B provided at respective ends of the channel 16.
In particular, starting from the inlet 18A towards the outlet 16B, the channel 16 is in subsequent heat-exchanging contact with the first 110, the second 120 and the third 130 group of multiple coil assemblies. See the thicker, dashed arrows, which demonstrate the direction of flow of coolant through the channel 16 along the several groups of multiple coil assemblies 110-120-130.
In this example two channels 16-16" are provided, each having an inlet 16A and an outlet 16B for directing a coolant in subsequent heat-exchanging contact with the first 110, the second 120 and the third 130 group of multiple coil assemblies. When following the dashed arrows of the direction of flow, for each channel 16 (16°) the coolant will pass via the first coil assemblies 110C-B (110D-A), then via or across the second coil assemblies 120D-E-F (120C-B-A) and finally across the third coil assembly 130B (130A), respectively.
However also one, single channel 16 for the coolant can be used for directing the coolant in subsequent heat-exchanging contact with all first 110, second 120 and third 130 group of multiple coil assemblies, in that flow sequence.
With this channel configuration it is emphasized to direct the coolant, which might be water, first over the group of multiple coil assemblies with the lowest heat dissipation, here the coil assemblies 110A-110D of the first group 110 of coil assemblies, subsequently directing the coolant along the longitudinal sides of the carrier-shaped actuator device 1 and finally over the further groups 120-130 of multiple coil assemblies
120A-120F; 130A-130B located in the centre or middle of the actuator device 1 between the first group of multiple coil assemblies 110A-110D, which further groups 120-130 of multiple coil assemblies have the highest heat dissipation during operation.
As depicted in Figure 1E, the carrier 10 is provided with a cover plate (shielding plate) 14 placed on the first surface side 1A of the carrier 10 covering all recesses 11A-11D; 12; 13 of the first 11, second 12 and third 13 group of recesses as well as the several coil assemblies 110A-110D; 120A-120F; 130A-130B of the several groups 110-120-130 of coil assemblies. Hereto the carrier 10 is provided with several mounting openings 10A’-10D’ near or at the corners. This allows for an easy assembly as well as maintenance of the actuator device 1.
In a specific functional embodiment different from the embodiment shown in Figure 1C, the channel 16 {or channels 16-16’) for the coolant is provided in a surface of the cover plate 14 facing the recesses 11-12-13 and the first surface side 1A of the actuator device 1/carrier 10. This embodiment is shown in Figure 1F with the cover plate 14 mounted to the first surface side 1A of the carrier 10. The channel 16 for the coolant is depicted in light grey indicating that the channel 16 is provided, e.g. by means of machining, in the surface of the cover plate 14, which is not visible in the Figure 1F, but which is facing towards the first (upper) surface side 1A (as in the embodiment shown in Figure 1B).
Preferably the carrier 10 is of a rectangular shape (Figures 1A-1F), however also other shapes such as a square shape (Figure 1G) are even effective and practical, in dependence on the product processing application.
It is noted that in Figures 1A-1F the actuator device 1 comprises three groups 11-12-13 of coil assemblies 110A-110D; 120A-120F; 130A-130B allowing the actuator 10 to be positioned in six degrees of freedom (DOF x, y, z, ®, y and 8).
In Figure 1G another example of an actuator device 1’ is shown wherein the first group 11 of coil assemblies 110A-110D at each carrier corner 10A-10D is omitted and the actuator device 1° comprises the second group 120 and third group 130 of coil assemblies, thus being structured to position the actuator device 1’ in four degrees of freedom DOF x, y, wy (rotation around y-axis) and 8 (rotation around z-axis). So this embodiment has further limited constructional dimensions and yet allows high accuracy as to motion and position in less, but still multiple degrees of freedom, albeit for another type of process application.
According to the invention it should be noted, that the actuator device 1 at least comprises two groups of coil assemblies, in particular at least the groups 12 and 13 of coil assemblies 120# and 130#, respectively.
Figures 3A-3C and 4A-4E disclose several views and examples of a positioning system 20 for positioning an object in a plane, the system 20 comprising a supporting structure 25; an object table 24; a positioning module or positioning means 22 and an actuator device 1 as depicted in any one or more of the Figures 1A-1G.
The actuator device 1 is structured to support the object table 24, and the positioning module or metrology parts 22 is structured to linearly move the actuator device 1 together with the object table 24 within a XY-plane with respect to the supporting structure 25. In particular the positioning module or metrology parts 22, the actuator device 1 and the product table 24 are mounted in a positioning frame 21, which additionally can be provided with additional mass or auxiliary means 23, for example for cooling, supporting stability and accuracy of the actuator 1 during operation.
The object table 24 serves to support a (not shown) substrate wafer or similar product, which is to be subjected for example to photolithography process steps in a process chamber 31 (see Figure 4D), which process steps require extreme high accuracy as to motion and positioning under vacuum conditions.
The object table 24 can be provided with a recess 24A for accommodating a substrate wafer.
The supporting structure 25 or solid world comprises a first 25A and a second 25B elongated guide, which guides 25A-25B are orientated parallel to each other within the positioning system.
Both first 25A and second 25B elongated guides comprise first 26 and second 27 groups of magnets positioned next to each other in opposite pole orientation.
Each second group of magnet assemblies 27 is composed of two individual magnets 28A-28B.
Preferably the magnets 26; 28A-28B are permanent magnets or electromagnets.
During operation, the first 26 and second 27 group of magnets of the first 25A and second 25B elongated guides interact with the second 120 and third 130 group of coil assemblies of the actuator device, respectively, thus acting as permanent magnet Lorentz actuators.
In particular the first group 26 of magnets of the first elongated guide 25A interact with the second 120 group of coil assemblies 120A-120F thus allowing the movement and positioning of the actuator 1 and the product table 24 in the x-direction along the longitudinal orientation of the elongated guides 25A-25B (degree of freedom x). The second group 27; 28A-28B of magnets of the second elongated guide 25B interact with the third 130 group of coil assemblies 130A-130B thus allowing the movement and positioning of the actuator 1 and the product table 24 in the y-direction (degree of freedom vy).
By accommodating the positioning module/metrology parts 22, the actuator device 1 and the product table 24 in the positioning frame 21, the positioning frame 21 is movable with respect to the supporting structure 25 by means of the positioning module 22 due to the interaction of the several coil assemblies of the second 120 and third 130 group in at least the xy-plane (two DOF x and y). Additionally, independent control of the two coil assemblies 130A-130B of the third group of coil assemblies also allow torsional orientation of the actuator device 1 and the product table 24 around its z-axis (DOF 8).
A cable slab 29 is provided close to the center of mass of the positioning frame 21, thus minimizing signal disturbances and vibration.
Also, the solid world or supporting structure 25 is provided with two additional elongated guides 25C, which are located at respective opposite sides of the positioning system 20, with the first and second elongated guides 25A-25B in between. The elongated guides 25A-25B-25C are made from a ferromagnetic material for proper interaction with the first 110, second 120, and third 130 group of coil assemblies. In particular, the additional guides 25C interact with the U-yoke coil assemblies 110A-110D of the first group 110 of coil assemblies allowing orientation of the actuator device 1 and the product table 24 in the z-direction (DOF z). Additionally, independent control of the coil assemblies 110A-110D of the first group of coil assemblies also allow bending orientation of the actuator device 1 and the product table 24 in the © (rotation around the x-axis direction) degree of freedom and y (rotation around the y-axis direction) degree of freedom.
The elongated guides 25A-25B-25C are covered by a magnetic shielding plate 30, shielding the product table 24 and the substrate wafer (not shown) positioned in the recess 24A thereof from any electro-magnetic interference from the magnets 26; 27- 28A-28B and the actuator device 1.
Reference numerals 32A-32D depict yoke connectors connected to the yokes 111A-111D of the U-yoke coil assemblies 110A-110D of the first 110 group of coil assemblies. These yoke connectors 32A-32D form the mechanical connection between the actuator device 1 (and the product table 24) with the positioning frame 21 allowing the displacement of the actuator device 1 (and the product table 24) together with the positioning frame 21 along the elongated guides 25A-25B-25C.
Figures 4A-4C depict a positioning system 20 provided with an actuator device 1 according to Figures 1A-1D, hence with three groups 110-120-130 of coil assemblies allowing the positioning of the carrier 10 and the product table 24 in six degrees of freedom (six DOF x, y, z, ®, y and 8).
Figure 4D depicts a positioning system 20 of a simplified design as it is provided with an actuator device 1 according to Figure 1G, hence with only two groups 120-130 of coil assemblies allowing the positioning of the carrier 10 in four degrees of freedom DOF x, y, y (rotation around y-axis) and © (rotation around z-axis). The absence of the first group 110 of coil assemblies 110A-110D means that the z-direction actuators are absent.
To compensate for this limited motion control air bearings 34 are provided between the positioning system 20 and the ground floor 33, thus minimizing any vibrations in the z-direction.
Figure 4E depicts a positioning system 20 of a design more or less similar as the Figures 4A-4D, also incorporating the three groups 110-120-130 of coil assemblies allowing the positioning of the carrier 10 and the product table 24 in six degrees of freedom (six DOF x, y, z, ®, y and 8). Additionally, passive damping elements 35 are disposed between the positioning frame 21 and the object table 24 to avoid high frequent undamped vibration in the metrology path.
Passive damping enables higher servo bandwidth further improving the accuracy of the positioning system 20, in particular the metrology parts 22. Additionally, reference numerals 36 denote additional balance mass bodies mounted in the positioning system 20 to avoid excitation of the column and metrology parts 22.
REFERENCE NUMERALS USED IN THE FIGURES 1 actuator device 1A first surface side 1B second surface side carrier body 10A-10D carrier corner 10A’-10D mounting holes 11 first group of recesses
10 11A-11D individual recesses belonging to the first group of recesses 110 first group of coil assemblies 110A-110D first coil assemblies belonging to the first group of coil assemblies 110#1-110#2 coil sections of first coil assembly 110# (with # being A-D) 111A-111D yokes of first coil assemblies
111#1-111#2 yoke legs of yoke 111# (with # being A-D) 113#1-113#2 winding core for coil sections 110#1-110#2 {with # being A-D) 114 wire connection between coil sections 110#1-110#2 (with # being A-D) 115#1-115#2 winding core opening of winding core 113#1-113#2 (with # being A-D) 12 second group of recesses
120 second group of coil assemblies 120A-120F second coil assemblies belonging to the second group of coil assemblies 121 temperature sensor of second group of coil assemblies 13 third group of recesses 130 first group of coil assemblies
130A-130B third coil assemblies belonging to the third group of coil assemblies 131 temperature of third group of coil assemblies 14 closure plate or shielding plate 15A-15B-15C connecting guides for several coil assemblies 16 coolant channel
186A coolant channel inlet 16B coolant channel outlet 17A-17D through openings in first group of recesses 17#1-17#2 through opening for yoke leg 111#1-111#2 of yoke 111# (with # being A-D) 18A-18F individual winded coil of second and third group of coil assemblies
19 electrically isolated pocket for second and third group of coil assemblies
20 positioning system 21 positioning frame 22 positioning means/metrology parts 23 additional mass or auxiliary means 24 object table 24A recess in surface of object table 25 supporting structure or solid world 25A first elongated guide of supporting structure 25B second elongated guide of supporting structure 25C third elongated guide of supporting structure 26 first magnet assembly 27 second magnet assembly 28A-28B individual magnets of second magnet assembly 29 signal cable slab 30 magnetic shielding plate 31 processing chamber 32A-32D yoke connectors 33 ground floor 34 air bearing 35 passive damping element 36 balance mass body

Claims (21)

CONCLUSIESCONCLUSIONS 1. Een actuatorinrichting voor toepassing in een positioneringssysteem, waarbij de actuatorinrichting lineair beweegbaar is in een vlak ten opzichte van een draagconstructie van het positioneringssysteem, waarbij de actuatorinrichting omvat: - een drager met een longitudinale en transversale afmeting; - meerdere groepen van spoelsamenstellen, welke op de drager zijn gemonteerd, waarbij elke groep van spoelsamenstellen is ingericht om de drager in ten minste één vrijheidsgraad te oriënteren.An actuator device for use in a positioning system, wherein the actuator device is linearly movable in a plane relative to a support structure of the positioning system, the actuating device comprising: - a support with a longitudinal and transverse dimension; - a plurality of groups of coil assemblies mounted on the carrier, each group of coil assemblies being arranged to orient the carrier in at least one degree of freedom. 2. Actuatorinrichting volgens conclusie 1, waarbij de drager is voorzien van meerdere groepen van één of meer uitsparingen, waarbij elke groep van één of meer uitsparingen is ingericht in het opnemen van één of meer spoelsamenstellen, welke spoelsamenstellen behoren tot één groep van de meerdere groepen van spoelsamenstellen.Actuator arrangement according to claim 1, wherein the carrier comprises a plurality of groups of one or more recesses, each group of one or more recesses being arranged to receive one or more coil assemblies, which coil assemblies belong to one group of the plurality of groups of coil assemblies. 3. Actuatorinrichting volgens conclusie 2, waarbij een eerste groep van één of meer uitsparingen bestaat uit vier hoekuitsparingen, waarbij elke hoekuitsparing is aangebracht aan of nabij een hoek van de drager.Actuator arrangement according to claim 2, wherein a first group of one or more recesses consists of four corner recesses, each corner recess being provided at or near a corner of the carrier. 4. Actuatorinrichting volgens conclusie 3, waarbij elke hoekuitsparing is voorzien van twee doorgaande openingen.Actuator arrangement according to claim 3, wherein each corner recess is provided with two through openings. 5. Actuatorinrichting volgens conclusie 4, waarbij elke hoekuitsparing is ingericht om een U-kernspoelsamenstel van een eerste groep van spoelsamenstellen op te nemen, waarbij elk juk van de U-kern door een van de doorgaande hoek openingen en uit het drageroppervlak reikt en waarbij een spoelsamenstel van de eerste groep spoelsamenstellen om elk juk van de U-kern is gemonteerd.The actuator arrangement of claim 4, wherein each corner recess is adapted to receive a U-core coil assembly of a first group of coil assemblies, each yoke of the U-core extending through one of the through-corner openings and out of the support surface and wherein a coil assembly of the first group of coil assemblies is mounted about each yoke of the U-core. 6. Actuatorinrichting volgens een of meer van de conclusies 2 tot en met 5, waarbij een tweede groep en een derde groep van een of meer uitsparingen voor het opnemen van een tweede respectievelijk een derde groep van spoelsamenstellen, welke aan elkaar grenzen en gezien in de lengtedimensie van de drager, tussen de eerste groep hoekuitsparingen zijn aangebracht.Actuator arrangement according to one or more of claims 2 to 5, wherein a second group and a third group of one or more recesses for receiving a second and a third group of coil assemblies, respectively, which are adjacent and viewed in the longitudinal dimension of the carrier, are provided between the first group of corner recesses. 7. Actuatorinrichting volgens conclusie 6, waarbij de tweede groep en/of de derde groep van één of meer uitsparingen uit één uitsparing bestaan.Actuator arrangement according to claim 6, wherein the second group and/or the third group of one or more recesses consist of one recess. 8. Actuatorinrichting volgens conclusie 6 of 7, waarbij de uitsparingen van zowel de tweede als de derde groep een longitudinale afmeting hebben, die parallel is georiénteerd aan de transversale afmeting van de drager.An actuator arrangement according to claim 6 or 7, wherein the recesses of both the second and third groups have a longitudinal dimension oriented parallel to the transverse dimension of the carrier. 9. Actuatorinrichting volgens een of meer van de conclusies 1-8, waarbij elk spoelsamenstel in elke uitsparing geisoleerd is opgenomen.Actuator arrangement according to one or more of the claims 1-8, wherein each coil assembly is received in an insulated manner in each recess. 10. Actuatorinrichting volgens een of meer van de conclusies 1-9, waarbij elk spoelsamenstel is samengesteld uit een groep van meerdere op elkaar gestapelde enkelvoudig gewikkelde spoelen.Actuator arrangement according to one or more of claims 1-9, wherein each coil assembly is composed of a group of a plurality of superimposed single wound coils. 11. Actuatorinrichting volgens een of meer van de conclusies 1-10, waarbij tenminste de tweede en/of de derde groep van de spoelsamenstellen is voorzien van tenminste een temperatuursensor, in het bijzonder een PTC-weerstand.Actuator device according to one or more of the claims 1-10, wherein at least the second and/or the third group of the coil assemblies is provided with at least one temperature sensor, in particular a PTC resistor. 12. Actuatorinrichting volgens een of meer van de conclusies 1-11, waarbij de drager een kanaal voor een koelmiddel omvat, evenals een inlaat en een uitlaat die zijn aangebracht aan respectievelijke uiteinden van het kanaal.Actuator device according to one or more of claims 1-11, wherein the carrier comprises a channel for a coolant, as well as an inlet and an outlet arranged at respective ends of the channel. 13. Actuatorinrichting volgens conclusie 12, waarbij het kanaal, beginnend vanaf de inlaat in de richting van de uitlaat, in opeenvolgend warmte-uitwisselend contact staat met de eerste, de tweede en de derde groep van meerdere spoelsamenstellen.An actuator arrangement according to claim 12, wherein the channel, starting from the inlet toward the outlet, is in sequential heat-exchanging contact with the first, second and third groups of plural coil assemblies. 14. Actuatorinrichting volgens een of meer van de conclusies 1-13, waarbij de drager is voorzien van een afdekplaat die alle uitsparingen van de eerste, tweede en derde groep van uitsparingen afdekt.14. Actuator device according to one or more of the claims 1-13, wherein the carrier is provided with a cover plate which covers all recesses of the first, second and third group of recesses. 15. Actuatorinrichting volgens conclusie 14 in combinatie met conclusie 12 of 13, waarbij het kanaal is voorzien in een naar de uitsparingen gericht oppervlak van de afdekplaat.15. Actuator device according to claim 14 in combination with claim 12 or 13, wherein the channel is provided in a surface of the cover plate facing the recesses. 16. Actuatorinrichting volgens een of meer van de conclusies 1-15, waarbij de drager een rechthoekige vorm heeft.Actuator device according to one or more of the claims 1-15, wherein the carrier has a rectangular shape. 17. Een positioneringssysteem voor het positioneren van een object in een vlak, waarbij het systeem een draagconstructie omvat; een objecttafel, een positioneringsmodule en een actuatorinrichting volgens één of meer van de conclusies 1- 16, waarbij de actuatorinrichting is ingericht om de objecttafel te ondersteunen, en waarbij de positioneringsmodule is ingericht om de actuatorinrichting samen met de objecttafel lineair te verplaatsen in een vlak ten opzichte van de draagconstructie.17. A positioning system for positioning an object in a plane, the system comprising a support structure; an object table, a positioning module and an actuator device according to one or more of the claims 1-16, wherein the actuator device is arranged to support the object table, and wherein the positioning module is adapted to linearly displace the actuator device together with the object table in a plane relative to the supporting structure. 18. Positioneringssysteem volgens conclusie 17, waarbij de draagconstructie een eerste en een tweede langgerichte geleiding omvat die parallel aan elkaar zijn georiënteerd, waarbij zowel de eerste als de tweede langgerichte geleidingen eerste en tweede groepen van magneten omvatten, welke naast elkaar doch in tegengestelde pooloriëntatie zijn georiënteerd.The positioning system of claim 17, wherein the support structure comprises first and second elongate guides oriented parallel to each other, wherein both the first and second elongate guides include first and second groups of magnets which are adjacent but in opposite pole orientations. oriented. 19. Positioneringssysteem volgens conclusie 18, waarbij de magneten permanente magneten of elektromagneten zijn.The positioning system of claim 18, wherein the magnets are permanent magnets or electromagnets. 20. Positioneringssysteem volgens conclusie 17 of 18, waarbij, tijdens bedrijf,A positioning system according to claim 17 or 18, wherein, during operation, de eerste en tweede groep magneten van de eerste en tweede langgerichte geleidingen interacteren met respectievelijk de tweede en derde groep spoelsamenstellen van de actuatorinrichting.the first and second group of magnets of the first and second elongate guides interact with the second and third group of coil assemblies of the actuator device, respectively. 21. Positioneringssysteem volgens een van de conclusies 17-20, waarbij de positioneringsmodule, de actuatorinrichting en de producttafel zijn opgenomen in een positioneringsframe, welk positioneringsframe door middel van de positioneringsmodule beweegbaar is ten opzichte van de draagconstructie.21. Positioning system as claimed in any of the claims 17-20, wherein the positioning module, the actuator device and the product table are accommodated in a positioning frame, which positioning frame is movable relative to the support structure by means of the positioning module.
NL2025135A 2019-12-31 2020-03-16 An actuator device for use in a positioning system as well as such positioning system. NL2025135B1 (en)

Priority Applications (7)

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JP2022540773A JP2023509145A (en) 2019-12-31 2020-12-21 Actuator devices and positioning systems used in positioning systems
US17/790,368 US12021432B2 (en) 2019-12-31 2020-12-21 Actuator device for use in a positioning system as well as such positioning system
PCT/NL2020/050811 WO2021137697A1 (en) 2019-12-31 2020-12-21 An actuator device for use in a positioning system as well as such positioning system.
EP20830377.6A EP4085480A1 (en) 2019-12-31 2020-12-21 An actuator device for use in a positioning system as well as such positioning system
KR1020227026496A KR20230002285A (en) 2019-12-31 2020-12-21 Actuator devices for use in positioning systems and such positioning systems
IL294394A IL294394A (en) 2019-12-31 2020-12-21 An actuator device for use in a positioning system as well as such positioning system
US18/663,918 US20240339910A1 (en) 2019-12-31 2024-05-14 Actuator device for use in a positioning system as well as such positioning system

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