NL2025106A - Methods and apparatus for determining control data for a lithographic apparatus - Google Patents

Methods and apparatus for determining control data for a lithographic apparatus Download PDF

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Publication number
NL2025106A
NL2025106A NL2025106A NL2025106A NL2025106A NL 2025106 A NL2025106 A NL 2025106A NL 2025106 A NL2025106 A NL 2025106A NL 2025106 A NL2025106 A NL 2025106A NL 2025106 A NL2025106 A NL 2025106A
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NL
Netherlands
Prior art keywords
substrate
fields
lens
lithographic apparatus
field
Prior art date
Application number
NL2025106A
Other languages
English (en)
Inventor
Alphons Van Hinsberg Michel
Robert Downes James
Fredrik Friso Klinkhamer Jacob
Sebastiaan Wildenberg Jochem
Josef Maria Verdurmen Erwin
Werkman Roy
Jan Urbanczyk Adam
Jan Joppe Visser Lucas
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=70549867&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=NL2025106(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Priority to NL2025106A priority Critical patent/NL2025106A/en
Publication of NL2025106A publication Critical patent/NL2025106A/en

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Claims (1)

  1. Een inrichting ingericht voor het belichten van een substraat.
NL2025106A 2020-03-11 2020-03-11 Methods and apparatus for determining control data for a lithographic apparatus NL2025106A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2025106A NL2025106A (en) 2020-03-11 2020-03-11 Methods and apparatus for determining control data for a lithographic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2025106A NL2025106A (en) 2020-03-11 2020-03-11 Methods and apparatus for determining control data for a lithographic apparatus

Publications (1)

Publication Number Publication Date
NL2025106A true NL2025106A (en) 2020-05-06

Family

ID=70549867

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2025106A NL2025106A (en) 2020-03-11 2020-03-11 Methods and apparatus for determining control data for a lithographic apparatus

Country Status (1)

Country Link
NL (1) NL2025106A (nl)

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