NL2024976A - Substrate support, substrate table and method - Google Patents

Substrate support, substrate table and method Download PDF

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Publication number
NL2024976A
NL2024976A NL2024976A NL2024976A NL2024976A NL 2024976 A NL2024976 A NL 2024976A NL 2024976 A NL2024976 A NL 2024976A NL 2024976 A NL2024976 A NL 2024976A NL 2024976 A NL2024976 A NL 2024976A
Authority
NL
Netherlands
Prior art keywords
substrate
support
main body
support body
immersion
Prior art date
Application number
NL2024976A
Other languages
English (en)
Inventor
Hubertus Matheus Baltis Coen
Ten Kate Nicolaas
Alexander Tromp Siegfried
Pieter Albert Van Den Berkmortel Frank
Jacobus Johannes Roset Niek
Martinus Petrus Adrianus Vermeulen Marcus
Kramer Gijs
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=70412420&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=NL2024976(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Priority to NL2024976A priority Critical patent/NL2024976A/en
Publication of NL2024976A publication Critical patent/NL2024976A/en

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Claims (1)

  1. CONCLUSIE
    1, Een inrichting ingericht voor het belichten van een substraat.
NL2024976A 2020-02-24 2020-02-24 Substrate support, substrate table and method NL2024976A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2024976A NL2024976A (en) 2020-02-24 2020-02-24 Substrate support, substrate table and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2024976A NL2024976A (en) 2020-02-24 2020-02-24 Substrate support, substrate table and method

Publications (1)

Publication Number Publication Date
NL2024976A true NL2024976A (en) 2020-04-24

Family

ID=70412420

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2024976A NL2024976A (en) 2020-02-24 2020-02-24 Substrate support, substrate table and method

Country Status (1)

Country Link
NL (1) NL2024976A (nl)

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