NL2024976A - Substrate support, substrate table and method - Google Patents
Substrate support, substrate table and method Download PDFInfo
- Publication number
- NL2024976A NL2024976A NL2024976A NL2024976A NL2024976A NL 2024976 A NL2024976 A NL 2024976A NL 2024976 A NL2024976 A NL 2024976A NL 2024976 A NL2024976 A NL 2024976A NL 2024976 A NL2024976 A NL 2024976A
- Authority
- NL
- Netherlands
- Prior art keywords
- substrate
- support
- main body
- support body
- immersion
- Prior art date
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Claims (1)
- CONCLUSIE1, Een inrichting ingericht voor het belichten van een substraat.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2024976A NL2024976A (en) | 2020-02-24 | 2020-02-24 | Substrate support, substrate table and method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2024976A NL2024976A (en) | 2020-02-24 | 2020-02-24 | Substrate support, substrate table and method |
Publications (1)
Publication Number | Publication Date |
---|---|
NL2024976A true NL2024976A (en) | 2020-04-24 |
Family
ID=70412420
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL2024976A NL2024976A (en) | 2020-02-24 | 2020-02-24 | Substrate support, substrate table and method |
Country Status (1)
Country | Link |
---|---|
NL (1) | NL2024976A (nl) |
-
2020
- 2020-02-24 NL NL2024976A patent/NL2024976A/en unknown
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