NL2024950A - Method for controlling a manufacturing process and associated apparatuses - Google Patents
Method for controlling a manufacturing process and associated apparatuses Download PDFInfo
- Publication number
- NL2024950A NL2024950A NL2024950A NL2024950A NL2024950A NL 2024950 A NL2024950 A NL 2024950A NL 2024950 A NL2024950 A NL 2024950A NL 2024950 A NL2024950 A NL 2024950A NL 2024950 A NL2024950 A NL 2024950A
- Authority
- NL
- Netherlands
- Prior art keywords
- substrate
- control
- optimization
- objective
- opw
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract description 161
- 238000004519 manufacturing process Methods 0.000 title abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 131
- 230000008569 process Effects 0.000 abstract description 86
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- 238000012935 Averaging Methods 0.000 description 1
- 108010001267 Protein Subunits Proteins 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Claims (1)
- CONCLUSIE:1. Een inrichting ingericht voor het belichten van een substraat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2024950A NL2024950A (en) | 2020-02-20 | 2020-02-20 | Method for controlling a manufacturing process and associated apparatuses |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2024950A NL2024950A (en) | 2020-02-20 | 2020-02-20 | Method for controlling a manufacturing process and associated apparatuses |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL2024950A true NL2024950A (en) | 2020-04-24 |
Family
ID=70412411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL2024950A NL2024950A (en) | 2020-02-20 | 2020-02-20 | Method for controlling a manufacturing process and associated apparatuses |
Country Status (1)
| Country | Link |
|---|---|
| NL (1) | NL2024950A (nl) |
-
2020
- 2020-02-20 NL NL2024950A patent/NL2024950A/en unknown
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