NL2024935A - Assemblies and methods for guiding radiation - Google Patents

Assemblies and methods for guiding radiation Download PDF

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Publication number
NL2024935A
NL2024935A NL2024935A NL2024935A NL2024935A NL 2024935 A NL2024935 A NL 2024935A NL 2024935 A NL2024935 A NL 2024935A NL 2024935 A NL2024935 A NL 2024935A NL 2024935 A NL2024935 A NL 2024935A
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NL
Netherlands
Prior art keywords
radiation
substrate
detector
alignment
reflected
Prior art date
Application number
NL2024935A
Other languages
English (en)
Inventor
Reinink Johan
Cottaar Jeroen
Thijmen Van Der Post Sietse
Nicolaas Lambertus Donders Sjoerd
Original Assignee
Asml Netherlands Bv
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Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=70412413&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=NL2024935(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Priority to NL2024935A priority Critical patent/NL2024935A/en
Publication of NL2024935A publication Critical patent/NL2024935A/en

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Claims (1)

  1. CONCLUSIE
    1. Een inrichting ingericht voor het belichten van een substraat.
NL2024935A 2020-02-18 2020-02-18 Assemblies and methods for guiding radiation NL2024935A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2024935A NL2024935A (en) 2020-02-18 2020-02-18 Assemblies and methods for guiding radiation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2024935A NL2024935A (en) 2020-02-18 2020-02-18 Assemblies and methods for guiding radiation

Publications (1)

Publication Number Publication Date
NL2024935A true NL2024935A (en) 2020-04-24

Family

ID=70412413

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2024935A NL2024935A (en) 2020-02-18 2020-02-18 Assemblies and methods for guiding radiation

Country Status (1)

Country Link
NL (1) NL2024935A (nl)

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