NL2024880A - Method, assembly, and apparatus for improved control of broadband radiation generation - Google Patents

Method, assembly, and apparatus for improved control of broadband radiation generation Download PDF

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Publication number
NL2024880A
NL2024880A NL2024880A NL2024880A NL2024880A NL 2024880 A NL2024880 A NL 2024880A NL 2024880 A NL2024880 A NL 2024880A NL 2024880 A NL2024880 A NL 2024880A NL 2024880 A NL2024880 A NL 2024880A
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NL
Netherlands
Prior art keywords
radiation
fibre
core
hollow
substrate
Prior art date
Application number
NL2024880A
Other languages
English (en)
Inventor
Sabert Hendrik
Sebastian Uebel Patrick
Richard Pongers Willem
Original Assignee
Asml Netherlands Bv
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Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=69669234&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=NL2024880(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Priority to NL2024880A priority Critical patent/NL2024880A/en
Publication of NL2024880A publication Critical patent/NL2024880A/en

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Claims (1)

  1. CONCLUSIES
    1. Een inrichting ingericht voor het belichten van een substraat.
NL2024880A 2020-02-12 2020-02-12 Method, assembly, and apparatus for improved control of broadband radiation generation NL2024880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2024880A NL2024880A (en) 2020-02-12 2020-02-12 Method, assembly, and apparatus for improved control of broadband radiation generation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2024880A NL2024880A (en) 2020-02-12 2020-02-12 Method, assembly, and apparatus for improved control of broadband radiation generation

Publications (1)

Publication Number Publication Date
NL2024880A true NL2024880A (en) 2020-03-04

Family

ID=69669234

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2024880A NL2024880A (en) 2020-02-12 2020-02-12 Method, assembly, and apparatus for improved control of broadband radiation generation

Country Status (1)

Country Link
NL (1) NL2024880A (nl)

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