NL2023284A - Interferometer system, Method of determining a mode hop of a laser source of an interferometer system, Method of determining a position of a movable object, and Lithographic apparatus - Google Patents

Interferometer system, Method of determining a mode hop of a laser source of an interferometer system, Method of determining a position of a movable object, and Lithographic apparatus Download PDF

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Publication number
NL2023284A
NL2023284A NL2023284A NL2023284A NL2023284A NL 2023284 A NL2023284 A NL 2023284A NL 2023284 A NL2023284 A NL 2023284A NL 2023284 A NL2023284 A NL 2023284A NL 2023284 A NL2023284 A NL 2023284A
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NL
Netherlands
Prior art keywords
measurement
optical path
laser source
movable object
mode hop
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Application number
NL2023284A
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English (en)
Inventor
Jozef Jansen Maarten
Original Assignee
Asml Netherlands Bv
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Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Priority to NL2023284A priority Critical patent/NL2023284A/en
Publication of NL2023284A publication Critical patent/NL2023284A/en

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1. Een inrichting ingericht voor het belichten van een substraat.
NL2023284A 2019-06-11 2019-06-11 Interferometer system, Method of determining a mode hop of a laser source of an interferometer system, Method of determining a position of a movable object, and Lithographic apparatus NL2023284A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2023284A NL2023284A (en) 2019-06-11 2019-06-11 Interferometer system, Method of determining a mode hop of a laser source of an interferometer system, Method of determining a position of a movable object, and Lithographic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2023284A NL2023284A (en) 2019-06-11 2019-06-11 Interferometer system, Method of determining a mode hop of a laser source of an interferometer system, Method of determining a position of a movable object, and Lithographic apparatus

Publications (1)

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NL2023284A true NL2023284A (en) 2019-07-02

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NL2023284A NL2023284A (en) 2019-06-11 2019-06-11 Interferometer system, Method of determining a mode hop of a laser source of an interferometer system, Method of determining a position of a movable object, and Lithographic apparatus

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NL (1) NL2023284A (nl)

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